• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.913-916
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• 2005

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

• 센서학회지
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• 제15권1호
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• pp.47-52
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• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.680-683
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• 1997

In this paper, the multilayer actuator is investigated by using the finite element method. The material is taken to be piezoelectric. The capacitor and interdigital wlfloating type actuator are compared to the stress field distribution under the uniform electric field. As the length of the floating electrode in the interdigital wlfloating actuator changes, the stress field around the edge of electrode is studied.

• 한국전기전자재료학회논문지
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• 제11권11호
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• pp.963-968
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• 1998

The stress distribution in multilayer piezoelectric ceramic actuators was investigated by Finite element analysis. The y direction stress was concentrated at electrode tip. The y direction maximum stress was decreased to 4.9$\times10^ 7 N/m^2$ with internal electrode gap(a) until 0.4 mm and was not much difference with external electrode thickness(c). The stress distribution with internal layers was almost same and the stress distribution of load condition was higher than that of no load condition The y direction maximum stress increased with the number of layer and saturated at 260 layers. In the case of defective actuator, the stress distribution was disconnected around the defect and larger than that of normal actuator.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.478-481
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• 2004

This study presents the combined effect of electric Held application and mechanical compressive stress loading on deformation in a multilayer ceramic actuator, designed with stacking alternatively 0.2(PbMn$\_$1/3/Nb$\_$2/3/O$_3$)-0.8(PbZr$\_$0.475/Ti$\_$0.525/O$_3$) ceramics and Ag-Pd electrode. The deformation behaviors were thought to be attributed to relative 180$^{\circ}$domain quantities which is determined by pre-loaded stress and electric field. The non-linearity of piezoelectricity and strain are dependent upon the young's modulus resulting from the domain reorientation.

• Transactions on Electrical and Electronic Materials
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• 제10권4호
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• pp.121-124
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• 2009

In this study, in order to develop compositions of ceramics suitable for piezoelectric actuator and ultrasonic vibrator applications using low temperature sintering, multilayer, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3$ and $Na_2CO_3$ as sintering aids. Their structural, piezoelectric and dielectric characteristics were investigated according to the Zr/Ti ratio. As the Zr/Ti ratio increased, the electromechanical coupling factor $k_p$, and piezoelectric constant $d_{33}$ and the mechanical quality factor $Q_m$ all increased with Zr/Ti ratio and then decreased after the ratio exceeded 50/50. At the ratio of Zr/Ti =49/51 and sintering temperature of $900^{\circ}C$; the density, electromechanical coupling factor $k_p$, dielectric constant ${\varepsilon}_r$ piezoelectric $d_{33}$ constant and mechanical quality factor $Q_m$ all showed the optimum values of 7.900 $g/cm^3$, 0.576, 856, 312 pC/N, 1,326, respectively. These property values are very suitable for multilayer ceramics actuator applications.

• 한국전기전자재료학회논문지
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• 제20권9호
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• pp.766-770
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• 2007

In this study, in order to develop low temperature sintering ceramics for multilayer piezoelectric actuator, $0.07Pb(Mn_{1/3}Nb_{2/3})O_3-xPb(Ni_{1/3}Nb_{2/3})O_3-(0.93-x)Pb(Zr,Ti)O_3$ ceramics system were fabricated using $Li_2CO_3-Bi_2O_3-CuO$ sintering aids and the specimens were sintered at $930^{\circ}C$. Thereafter, their piezoelectric and dielectric characteristics were investigated according to the amount of PNN substitution. At 9 mol% PNN substitution, density, electromechanical coupling factor ($k_p$), dielectric constant, mechanical quality factor ($Q_m$) and piezoelectric constant ($d_{33}$) showed the optimum value of $7.86g/cm^3$, 0.60, 1640, 1323 and 387 pC/N, respectively. It is considered that these values are suitable for piezoelectric divece application such ad multilayer piezoelectric actuator and ultrasonic vibrator with pure Ag internal electrode.

• 한국전기전자재료학회논문지
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• 제20권2호
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• pp.130-134
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• 2007

In this study, in order to. develop the low temperature sintering ceramics for multilayer piezoelectric actuator, PMN-PNN-PZT ceramics using CuO, $Bi_{2}O_{3}\;and\;Li_{2}CO_{3}$ as sintering aids were manufactured with the amount of $WO_{3}$ addition. The ceramics were sintered at $900,\;930,\;960^{\circ}C$, respectively. Thereafter, their microstructural, dielectric and piezoelectric properties were investigated. The $WO_{3}$ was proved to lower the sintering temperature of piezoelectric ceramics due to the effects of PbO and $WO_{3}$ liquid phase. At 0.3 wt% $WO_{3}$ added specimen sintered at $930^{\circ}C$, electromechanical coupling factor($k_{p}$), mechanical quality factor($Q_{m}$), dielectric constant and $d_{33}$ showed the optimum values as the values of 0.60, 1,402, 1,440 and 360 pC/N, respectively, for multilayer piezoelectric actuator application.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.556-560
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• 2002

The rheological characteristics of PNN-PZT ceramics with high electromechanical coupling factor and electricstrictive constant was investigated. Green sheets of piezoelectric PNN-PZT ceramics were made by tape-casting method with controlling the mixing ratio of a dispersant, an organic binder, and a plasticizer. When the dispersant content was 1 wt.%, the slurry showed the best rheological characteristics for tape casting. The amounts of the plasticizer and the binder was simultaneously varied in the ranges of 1.5~18 and 3~9 wt.%, respectively. When both the plasticizer and binder of 6 wt.% mixed in the solution, respectiveley, the highest green density of the sheet was obtained without macrodefects. Multilyered structures of PNN-PZT/Ag-Pd were successfully fabricated using the optimized tape casting condition. The polarization behavior of these actuators seemed to similar to typical electricstrictive polarization behavior. The multilayer ceramic actuator is about $0.6{\times}10^{-3}$ of strain.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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• pp.33-34
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• 2005

In this study, in odor to develop low temperature sintering multilayer piezoelectric actuator and ultrasonic vibrator, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3$ and $Na_2CO_3$ as sintering aids and their piezoelectric and dielectric characteristics were investigated according to the addition of dopant CuO and $Fe_2O_3$, respectively. The CuO added PMN-PNN-PZT ceramics improved mechanical quality factor Qm due to the acceptor doping effect. And also, $Fe_2O_3$ reacted as softner in this composition system in addition to the increase of grain size and sinterability. Taking into consideration electromechanical coupling factor kp of 0.62, dielectric constant $\varepsilon_r$, of 1275, Piezoelectric $d_{33}$ constant of 377[pC/N] and mechanical quality factor Qm of 975, it was concluded that the ceramics with the $Fe_2O_3$, added composition sintered at 900[$^{\circ}C$] were best for the multilayer piezoelectric actuator and ultrasonic vibrator application.