• 제목/요약/키워드: Multi-layer actuator

검색결과 30건 처리시간 0.03초

AgPd 내부전극을 이용한 적층형 압전 액츄에이터의 제조 (Fabrication of Multilayer Piezoelectric Actuator with AgPd Internal Electrode)

  • 임인호;윤현상;박종주;백동수;박창엽
    • 한국전기전자재료학회논문지
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    • 제13권1호
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    • pp.33-38
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    • 2000
  • In this study, multilayer piezoelectric actuators were fabricated with 75 layers by a conventional multi-layer capacitor (MLC) techniques, using 70Ag/30Pd paste as an internal electrode which can be sintered at low temperature and have cost down effect in mass productions. The multilayer piezoelectric actua-tors had no defects such as diffusions of internal electrode to ceramic bodies and shortages of internal electrodes. The multilayer piezoelectric actuators did not show the crack in the ceramics parts and the gapping phenomena in the external eletrodes when Ag paste was used as external electrodes. The multilayer piezoelectric actuators showed a maximum displacement of 4${\mu}{\textrm}{m}$ at 100V dc voltage and kept the maximum displacement constant for 300 seconds. The multilayer piezoelectric actuators showed good matching properties between ceramic bodies and AgPd internal electrodes. We confirmed the possibility of large-scaled production of the multilayer piezoelectric actuators with superior electrical properties and cost down effect using 70Ag/30Pd paste as an internal electrodes.

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다층 압전 필름의 전극 패턴 최적화를 통한 2차원 구조물에서의 모달 변환기 구현 (Design of Modal Transducer in 2D Structure Using Multi-Layered PVDF Films Based on Electrode Pattern Optimization)

  • 유정규;김지철;김승조
    • 소음진동
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    • 제8권4호
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    • pp.632-642
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    • 1998
  • A method based on finite element discretization is developed for optimizing the polarization profile of PVDF film to create the modal transducer for specific modes. Using this concept, one can design the modal transducer in two-dimensional structure having arbitrary geometry and boundary conditions. As a practical means for implementing this polarization profile without repoling the PVDF film the polarization profile is approximated by optimizing electrode patterns, lamination angles, and poling directions of the multi-layered PVDF transducer. This corresponds to the approximation of a continuous function using discrete values. The electrode pattern of each PVDF layer is optimized by deciding the electrode of each finite element to be used or not. Genetic algorithm, suitable for discrete problems, is used as an optimization scheme. For the optimization of each layers lamination angle, the continuous lamination angle is encoded into discrete value using binary 5 bit string. For the experimental demonstration, a modal sensor for first and second modes of cantilevered composite plate is designed using two layers of PVDF films. The actuator is designed based on the criterion of minimizing the system energy in the control modes under a given initial condition. Experimental results show that the signals from residual modes are successfully reduced using the optimized multi-layered PVDF sensor. Using discrete LQG control law, the modal peaks of first and second modes are reduced in the amount of 12 dB and 4 dB, resepctively.

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Unified solutions for piezoelectric bilayer cantilevers and solution modifications

  • Wang, Xianfeng;Shi, Zhifei
    • Smart Structures and Systems
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    • 제16권5호
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    • pp.759-780
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    • 2015
  • Based on the theory of piezoelasticity, the static performance of a piezoelectric bilayer cantilever fully covered with electrodes on the upper and lower surfaces is studied. Three models are considered, i.e., the sensor model, the driving displacement model and the blocking force model. By establishing suitable boundary conditions and proposing an appropriate Airy stress function, the exact solutions for piezoelectric bilayer cantilevers are obtained, and the effect of ambient thermal excitation is taken into account. Since the layer thicknesses and material parameters are distinguished in different layers, this paper gives unified solutions for composite piezoelectric bilayer cantilevers including piezoelectric bimorph and piezoelectric heterogeneous bimorph, etc. For some special cases, the simplifications of the present results are compared with other solutions given by other researches based on one-dimensional constitutive equations, and some amendments have been found. The present investigation shows: (1) for a PZT-4 piezoelectric bimorph, the amendments of tip deflections induced by an end shear force, an end moment or an external voltage are about 19.59%, 23.72% and 7.21%, respectively; (2) for a PZT-4-Al piezoelectric heterogeneous bimorph with constant layer thicknesses, the amendments of tip deflections induced by an end shear force, an end moment or an external voltage are 9.85%, 11.78% and 4.07%, respectively, and the amendments of the electrode charges induced by an end shear force or an end moment are both 1.04%; (3) for a PZT-4-Al piezoelectric heterogeneous bimorph with different layer thicknesses, the maximum amendment of tip deflection approaches 23.72%, and the maximum amendment of electrode charge approaches 31.09%. The present solutions can be used to optimize bilayer devices, and the Airy stress function can be used to study other piezoelectric cantilevers including multi-layered piezoelectric cantilevers under corresponding loads.

Synthetic Jet을 이용한 유동제어 특성연구 (A STUDY ABOUT FLOW CONTROL CHARACTERISTICS USING A SYNTHETIC JET)

  • 홍우람;김상훈;김우레;김유신;김종암
    • 한국전산유체공학회지
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    • 제12권2호
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    • pp.1-7
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    • 2007
  • To develop an aerodynamic performance, two groups of studies have been achieved widely. One is about the geometric design of vehicles and the other is about aerodynamic devices. Geometric design is a credible and stable method. However, it is not flexible and each part is related interactively. Therefore, if one part of geometry is modified, the other part will be required to redesign. On the other hand, the flow control by aerodynamic devices is flexible and modulized method. Even though it needs some energy, a relatively small amount of input makes more advanced aerodynamic performance. Synthetic jet is one of the method in the second group. The device repeats suctions and blowing motions in constant frequency. According to the performance, the adjacent flow to flight surface are served momentum. This mechanism can reduce the aerodynamic loss of boundary layer and separated flow. A synthetic jet actuator has several parameters, which influences the flow control. This study focuses on the parameter effects of synthetic jet - orifice geometry, frequency, jet speed and etc.

Synthetic jet을 이용한 유동제어 특성연구 (STUDY OF FLOW CONTROL CHARACTER USING SYNTHETIC JET)

  • 홍우람;김상훈;김우레;김유신;김종암
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2007년도 춘계 학술대회논문집
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    • pp.72-78
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    • 2007
  • To develop the aerodynamic performance, there are widely two group of studies are achieved. The first one is about design of the vehicles geometry and the second one is about aerodynamic devices. Geometry design is highly credible and stable method. But it is not flexible and each parts are related interactively. So if one part geometry are modified, the other parts are required to be redesigned. The other hand, flow control by aerodynamic device is flexible and modulized method. Though it needs energy, relatively little input makes far advanced aerodynamic performance. Synthetic Jet is one of the second group method. The device repeats suction and blowing motion in constant frequency. According to the performance, the flow which are near the flight surface are served momentum. This mechanism can reduce the aerodynamic loss by boundary layer and separated flow. Synthetic jet actuator has several parameters, that influence the flow control. This study focus the parameters effects of the synthetic jet - orifice geometry, frequency, jet speed and etc.

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실리콘기판위에 양극접합된 MLCA의 기계적 특성 (Mechanical Characteristics of MLCA Anodic Bonded on Si wafers)

  • 김재민;이종춘;윤석진;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.160-163
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    • 2003
  • This paper describes on anodic bonding characteristics of MLCA(Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100 %, input power $1\;/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-008 %FS. Moreover, any damages or separation of MICA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MICA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

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NKN 무연압전 액추에이터의 신뢰성 연구 (An Investigation on the Aging Properties of NKN Lead-free Piezoelectric Multi-layer Ceramic Actuators)

  • 채문순;이규탁;고중혁
    • 한국전기전자재료학회논문지
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    • 제24권10호
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    • pp.803-806
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    • 2011
  • 1 mol% $Li_2O$ excess $0.9(Na_{0.52}K_{0.48})NbO_3-0.1LiTaO_3$ lead-free piezoelectric multilayer ceramic actuators were investigated to determine their aging properties. To reduce the thermal aging behavior, we applied a rectified unipolar electric field of 5 kV/mm to the specimen to accelerate the electric aging behavior. By employing a rectified unipolar electric field for the piezoelectric actuators, we could remove undesirable heating from the relaxation current in the motion of the ferroelectric domain. To accelerate the aging test, the applied electric fields had a frequency of 900 Hz. To have enough time for charging and discharging, we employed an accurate time constant to design the equivalent circuit model for the aging tester. To extract exact aging behavior, we measured the pseudo-piezoelectric coefficient before and after the aging process. We also measured the electro-mechanical coupling coefficient, the frequency-dependent dielectric permittivity, and the impedance to compare with fresh and aged specimen.

P(VDF-TrFE-CFE)를 이용한 초소형 압전 적층형 진동 출력 소자의 제작 (Fabrication of Ultra-Small Multi-Layer Piezoelectric Vibrational Device Using P(VDF-TrFE-CFE))

  • 조성우;;김재규;류정재;김윤정;김혜진;박강호;홍승범
    • 한국전기전자재료학회논문지
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    • 제32권2호
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    • pp.157-160
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    • 2019
  • P(VDF-TrFE-CFE) (Poly (vinylidene fluoride-trifluoroethylene-chlorofluoroethylene)), which exhibits a high electrostriction of about 7%, can transmit tactile output as vibration or displacement. In this study, we investigated the applicability of P(VDF-TrFE-CFE) to wearable piezoelectric actuators. The P(VDF-TrFE-CFE) layers were deposited through spin-coating, and interspaced with patterned Ag electrodes to fabricate a two-layer $3.5mm{\times}3.5mm$ device. This layered structure was designed and fabricated to increase the output and displacement of the actuator at low driving voltages. In addition, a laser vibrometer and piezoelectric force microscope were used to analyze the device's vibration characteristics over the range of ~200~4,200 Hz. The on-off characteristics were confirmed at a frequency of 40 Hz.

미세 조작을 위한 압전 구동 집게의 설계 및 제작 (A Design and Manufacturing of Two Types of Micro-grippers using Piezoelectric Actuators for the Micromanipulation)

  • 박종규;문원규
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.246-250
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    • 2003
  • In this study, two new types of micro-grippers in which micro-fingers are actuated by piezoelectric multi-layer benders and stacks are introduced for the manipulation of micrometer-sized objects. First, we constructed a 3-chopstick-mechanism tungsten gripper, which is composed of three chopsticks: two are designed to grip micro-objects, and tile third is used to help grasp and release the objects through overcoming especially electrostatic force among some surface effects including electrostatic, van der Waals forces and surface tension. Second, a 2-chopstick-mechanism silicon micro-gripper that uses an integrated force sensor to control the gripping force was developed. The micro-gripper is composed of a piezoelectric multilayer bender for actuating the gripper fingers, silicon fingertips fabricated by use of silicon-based micromachining, and supplementary supports. The micro-gripper is referred to as a hybrid-type micro-gripper because it is composed of two main components; micro-fingertips fabricated using micromachining technology to integrate a very sensitive force sensor for measuring the gripping force, and piezoelectric gripper finger actuators that are capable of large gripping forces and moving strokes. The gripping force signal was found to have a sensitivity of 667 N/V. To the design of each of components of both of the grippers. a systematic design approach was applied, which made it possible to establish the functional requirements and design parameters of the micro-grippers. The micro-grippers were installed on a manual manipulator to assess its performance in tasks such as moving micro-objects from one position to a desired position. The experiment showed that the micro-grippers function effectively.

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온실 ICT융복합 실태조사와 복숭아형 랙피니언천창 적용 단동온실 및 CFD 유동해석 (Survey of ICT Apply to Plastic Greenhouse, Rack·Pinion Adaption to Single Span and CFD Analysis)

  • 조규정;김기영;양원모
    • 생물환경조절학회지
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    • 제24권4호
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    • pp.308-316
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    • 2015
  • 최근 관심이 집중되고 있는 스마트온실의 기술적용 실태와 문제점을 파악하고 이를 토대로 단동온실의 ICT 기술적용 장애요인 극복과 생산성을 제고하기 위하여 실험을 수행하였다. 자동화 시설의 도입 장애요인으로는 시설비 부담(24%)이 높았으며, 설치업체 사후관리 미흡(19%), 잦은 고장(16%), 관리기술 미흡(15%), 기능 미흡(13%), 소득향상기여 미흡(12%) 순이었다. ICT 도입필요성은 노동력절감(15%)이 가장 높았다. 자동화 온실에서 문제가 발생되는 부분은 온실구조, 구동기제어, 복합환경제어기, 센서기술이 각 14%로 비슷하였고, 원격제어기술 13%, 작물관리기술 12%, 에너지절감기술 10%, 소프트웨어활용 8%이었다. 온실구조 측면에서의 문제점은 천창개선이 18%로 가장 많았다. 효율적인 온도 및 환기 제어를 위해 농촌진흥청 고시 10-단동-7형 온실에 랙피니언 천창을 추가하였으며, 지붕형태를 복숭아형으로 변경하였다. 온실내 환경의 균일성을 위해 공기 유동팬은 6대를 설치하도록 하되 필요에 따라 증설 가능하도록 하였으며, 에너지 절약을 위해 1, 2중은 두께 0.1mm필름을 사용하고 3중은 5겹보온커튼을 설치하였다. CFD 유동해석 결과, 측창이 열린조건에서는 풍상 방향의 평균 유속이 빠르고 온도가 낮았으며, 풍하 방향으로 멀어 질수록 평균 유속이 점차 느려지고 온도는 높게 나타났다. 반면, 측창이 닫힌조건에서는 평균 유속이 낮으며, 구역별로 큰 편차는 없었다. 다만 풍상 풍하의 천창이 모두 열린 조건에 비하여 풍하 방향의 천창만 열린조건이 영역별 평균 유속에서 더 높은 값을 보였다. 측창을 닫은 조건에서는 외기의 유동이 아닌 온실 내 설치된 환기용 유동팬에 의해 유속이 발생하며 외부 환기가 없는 조건에서 유동팬에 의한 순환은 실내 전체 공간의 유동 편차를 줄여 줄 수는 있지만 전체적인 온도에는 영향을 미치지 못하였다. 저측고의 영역별 평균 온도는 고측고보다 균일하게 나타났다. 겨울철 3중 다겹보온커튼 여닫음에 관계없이 유동팬 근처에서 유속이 높고 유동팬에서 멀어지면 유속이 거의 없는 것으로 나타났다. 또한, 시간경과에 따른 평균 온도는 3중다겹보온커튼 열림상태에서 약 2시간 후에 외부온도와 같아졌으나 닫힘상태에서는 5시간 이후에 외부온도와 같아져, 3중 다겹보온커튼의 보온효과가 뚜렷하였다. 같은 조건에서 열용량의 차이로 인해 저측고 온실이 고측고 온실에 비하여 온도 하강 속도가 빨랐다.