• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2009년도 추계학술대회 논문집
• /
• pp.74-74
• /
• 2009

The ArF PR mask was. developed to overcome the limit. of sub 40nm patterning technology with KrF PR. But ArF PR difficult to meet the required PR selectivity by thin PR thickness. So need to the multi-stack mask such as amorphous carbon layer (ACL). Generally capacitively coupled plasma (CCP) etcher difficult to make the high density plasma and inductively coupled plasma (ICP) type etcher is more suitable for multi stack mask etching. Hybrid Coupled Plasma source (HCPs) etcher using the 13.56MHz RF power for ICP source and 2MHz and 27.12MHz for bias power was adopted to improve the process capability and controllability of ion density and energy independently. In the study, the oxide trench which has the multi stack layer process was investigated with the HCPs etcher (iGeminus-600 model DMS Corporation). The results were analyzed by scanning electron microscope (SEM) and it was found that etching characteristic of oxide trench profile depend on the multi-stack mask.

• 한국지진공학회:학술대회논문집
• /
• 한국지진공학회 2000년도 춘계 학술발표회 논문집 Proceedings of EESK Conference-Spring
• /
• pp.443-450
• /
• 2000

In this study a numerical method for soil-pile interaction analysis buried in multi-layered half planes is presented in frequency domain using FE-BE coupling. The total soil-pile interaction system is divided into two parts so called far field and near field beam elements are used for modeling a pile and coupled with plain strain elements for soil modeling. Boundary element formulation using the multi-layered dynamic fundamental solution is adopted to the far field and coupled with near field modeled by finite elements. In order to verify the proposed soil-pile interaction analysis method the dynamic responses of a pile on multi-layered dynamic fundamental solution is adopted to the far field and coupled with near field modeled by finite elements. In order to verify the proposed soil-pile interaction analysis method the dynamic responses of a pile on multi-layered half-planes are performed and compared with experiment results. Through this developed method the dynamic response analysis of a pile buried in multi-layered half planes can be calculated effectively in frequency domain.

• 대한전자공학회:학술대회논문집
• /
• 대한전자공학회 2004년도 하계종합학술대회 논문집(2)
• /
• pp.439-442
• /
• 2004

Timing delays due to VLSI circuit interconnects strongly depend on neighbor line switching patterns as well as input transition time. Considering both the input transition and input switching pattern, a new analytical timing delay model is developed by using the decoupling technique of transfer multi-coupled lines into an effective single line. The analytical timing delay model can determine the timing delay of multi-coupled lines accurately as well as rapidly. It is verified by using DSM-Technology ($0.1{\mu}m$ /low-k copper-based process) that the model has excellent agreement with the results of SPICE simulation.

• 전력전자학회:학술대회논문집
• /
• 전력전자학회 2016년도 전력전자학술대회 논문집
• /
• pp.231-232
• /
• 2016

This paper investigates the design of multi-winding coupled inductor for minimum inductor current ripple. Based on the general circuit model of coupled inductor together with the operating principles of dc-dc converter, the relationship between the ripple size of inductor current and the coupling factor is derived under the different duty ratio. The optimal coupling factor of n-phase multi-winding coupled inductor which corresponds to a minimum inductor ripple current becomes -(1/n-1), i.e. a complete inverse coupling without leakage inductance, as the duty ratio of steady-state operating point approaches 1/n, 2/n, ${\cdots}$ or (n-1)/n. In an opposite manner, the optimal coupling factor value of zero, i.e. zero mutual inductance, is required when the duty ratio of steady-state operating point approaches either zero or one. Therefore, coupled inductors having optimal coupling factor can minimize the ripple current of inductor and inductor size.

• Structural Engineering and Mechanics
• /
• 제42권1호
• /
• pp.13-24
• /
• 2012

There are a large number of papers in the literature dealing with the free vibration analysis of single/multi-span uniform beam with multiple spring-mass systems, but that of coupled multi-span beams carrying spring-mass attachments is rare. In this note, free vibration analysis of a weakly coupled beam system with spring-mass attachments is conducted. The mode localization and frequency loci veering phenomena of the coupled beam system are investigated. Studies show that for weakly coupled beam system with spring-mass attachments, the mode localization and frequency loci veering will occur once there is a disorder in the system.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2013년도 춘계학술대회 논문집
• /
• pp.663-664
• /
• 2013

• Bulletin of the Korean Chemical Society
• /
• 제27권12호
• /
• pp.1940-1960
• /
• 2006

Theoretical descriptions of two-dimensional (2D) vibrational and electronic spectroscopy are presented. By using a coupled multi-chromophore model, some examples of 2D spectroscopic studies of peptide solution structure determination and excitation transfer process in electronically coupled multi-chromophore system are discussed. A few remarks on perspectives of this research area are given.

• Wind and Structures
• /
• 제6권5호
• /
• pp.387-402
• /
• 2003

In the past decades, much effort has been made towards the study of single-mode-based vibration controls with dynamic energy absorbers such as single or multiple Tuned Mass Dampers(TMDs). With the increase of bridge span length and the tendency of the bridge cross-section being more slender and streamlined, multi-mode coupled vibrations as well as their controls have become very important for large bridges susceptible to strong winds. As a simple but effective device, the TMD system especially the semi-active one has become a promising option for such coupled vibration controls. However, despite various studies of optimal controls of single-mode-based vibrations with TMDs, research on the corresponding controls of the multi-mode coupled vibrations is very rare so far. For the development of a semi-active control strategy to suppress the multi-mode coupled vibrations, a comprehensive parametric analysis on the optimal variables of this control is substantial. In the present study, a multi-mode control strategy named "three-row" TMD system is discussed and the general numerical equations are developed at first. Then a parametric study on the optimal control variables for the "three-row" TMD system is conducted for a prototype Humen Suspension Bridge, through which some useful information and a better understanding of the optimal control variables to suppress the coupled vibrations are obtained. This information lays a foundation for the design of semi-active control.

• 한국광학회지
• /
• 제16권6호
• /
• pp.527-534
• /
• 2005

하나의 DFB 영역, 위상 조정 영역과 이득 영역으로 구성된 다중 전극 DFB 레이저의 pulsation 동작 특성을 살펴본다. Anti-phase (AP) complex-coupled (CC) DFB 구조를 사용한 경우가 in-phase CC DFB 구조나 index-coupled DFB 구조를 사용한 경우에 비하여 안정된 pulsation 동작이 발생하는 이득 영역과 위상 조정 영역의 전류 범위가 큼을 알 수 있다. AP CC DFB 구조를 사용한 경우 결합 세기가 커질수록, 이득 결합 계수가 커질수록 안정된 pulsation 동작이 발생하는 이득 영역의 전류 범위가 증가하고 pulsation 주파수의 튜닝 영역이 커짐을 볼 수 있다. 또한 위상 조정 영역의 위상 변화에 의한 pulsation주파수의 튜닝 영역도 커짐을 볼 수 있다. 고정된 결합 세기에서 DFB 영역의 길이가 증가할수록 pulsation 동작이 발생하는 위상 조정 영역과 이득 영역의 전류 범위가 증가하여 pulsation 주파수 튜닝 영역이 넓어짐을 볼 수 있다.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1995년도 추계학술대회 논문집 학회본부
• /
• pp.186-188
• /
• 1995

In this paper, Cross-Coupled Controller proposed for multi axes servo system. Tracking error and contouring error exist when a machine tool moves along the trajectory in multi exes system. The proposed scheme enhances the contouring performance by reducing contour error. Feedforward compensator reduces the effects of a nonlinear disturbance such as friction or dead zone. The proposed control scheme reduces the contour error which occured when the tool tracks the reference trajectory. Simulation results show that this scheme improves the contouring performance along the reference trajectory in XY-table.