• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.11a
• /
• pp.74-74
• /
• 2009

The ArF PR mask was. developed to overcome the limit. of sub 40nm patterning technology with KrF PR. But ArF PR difficult to meet the required PR selectivity by thin PR thickness. So need to the multi-stack mask such as amorphous carbon layer (ACL). Generally capacitively coupled plasma (CCP) etcher difficult to make the high density plasma and inductively coupled plasma (ICP) type etcher is more suitable for multi stack mask etching. Hybrid Coupled Plasma source (HCPs) etcher using the 13.56MHz RF power for ICP source and 2MHz and 27.12MHz for bias power was adopted to improve the process capability and controllability of ion density and energy independently. In the study, the oxide trench which has the multi stack layer process was investigated with the HCPs etcher (iGeminus-600 model DMS Corporation). The results were analyzed by scanning electron microscope (SEM) and it was found that etching characteristic of oxide trench profile depend on the multi-stack mask.

• Proceedings of the Earthquake Engineering Society of Korea Conference
• /
• 2000.04a
• /
• pp.443-450
• /
• 2000

In this study a numerical method for soil-pile interaction analysis buried in multi-layered half planes is presented in frequency domain using FE-BE coupling. The total soil-pile interaction system is divided into two parts so called far field and near field beam elements are used for modeling a pile and coupled with plain strain elements for soil modeling. Boundary element formulation using the multi-layered dynamic fundamental solution is adopted to the far field and coupled with near field modeled by finite elements. In order to verify the proposed soil-pile interaction analysis method the dynamic responses of a pile on multi-layered dynamic fundamental solution is adopted to the far field and coupled with near field modeled by finite elements. In order to verify the proposed soil-pile interaction analysis method the dynamic responses of a pile on multi-layered half-planes are performed and compared with experiment results. Through this developed method the dynamic response analysis of a pile buried in multi-layered half planes can be calculated effectively in frequency domain.

• Proceedings of the IEEK Conference
• /
• 2004.06b
• /
• pp.439-442
• /
• 2004

Timing delays due to VLSI circuit interconnects strongly depend on neighbor line switching patterns as well as input transition time. Considering both the input transition and input switching pattern, a new analytical timing delay model is developed by using the decoupling technique of transfer multi-coupled lines into an effective single line. The analytical timing delay model can determine the timing delay of multi-coupled lines accurately as well as rapidly. It is verified by using DSM-Technology ($0.1{\mu}m$ /low-k copper-based process) that the model has excellent agreement with the results of SPICE simulation.

• Proceedings of the KIPE Conference
• /
• 2016.07a
• /
• pp.231-232
• /
• 2016

This paper investigates the design of multi-winding coupled inductor for minimum inductor current ripple. Based on the general circuit model of coupled inductor together with the operating principles of dc-dc converter, the relationship between the ripple size of inductor current and the coupling factor is derived under the different duty ratio. The optimal coupling factor of n-phase multi-winding coupled inductor which corresponds to a minimum inductor ripple current becomes -(1/n-1), i.e. a complete inverse coupling without leakage inductance, as the duty ratio of steady-state operating point approaches 1/n, 2/n, ${\cdots}$ or (n-1)/n. In an opposite manner, the optimal coupling factor value of zero, i.e. zero mutual inductance, is required when the duty ratio of steady-state operating point approaches either zero or one. Therefore, coupled inductors having optimal coupling factor can minimize the ripple current of inductor and inductor size.

• Structural Engineering and Mechanics
• /
• v.42 no.1
• /
• pp.13-24
• /
• 2012

There are a large number of papers in the literature dealing with the free vibration analysis of single/multi-span uniform beam with multiple spring-mass systems, but that of coupled multi-span beams carrying spring-mass attachments is rare. In this note, free vibration analysis of a weakly coupled beam system with spring-mass attachments is conducted. The mode localization and frequency loci veering phenomena of the coupled beam system are investigated. Studies show that for weakly coupled beam system with spring-mass attachments, the mode localization and frequency loci veering will occur once there is a disorder in the system.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2013.05a
• /
• pp.663-664
• /
• 2013

• Bulletin of the Korean Chemical Society
• /
• v.27 no.12
• /
• pp.1940-1960
• /
• 2006

Theoretical descriptions of two-dimensional (2D) vibrational and electronic spectroscopy are presented. By using a coupled multi-chromophore model, some examples of 2D spectroscopic studies of peptide solution structure determination and excitation transfer process in electronically coupled multi-chromophore system are discussed. A few remarks on perspectives of this research area are given.

• Wind and Structures
• /
• v.6 no.5
• /
• pp.387-402
• /
• 2003

In the past decades, much effort has been made towards the study of single-mode-based vibration controls with dynamic energy absorbers such as single or multiple Tuned Mass Dampers(TMDs). With the increase of bridge span length and the tendency of the bridge cross-section being more slender and streamlined, multi-mode coupled vibrations as well as their controls have become very important for large bridges susceptible to strong winds. As a simple but effective device, the TMD system especially the semi-active one has become a promising option for such coupled vibration controls. However, despite various studies of optimal controls of single-mode-based vibrations with TMDs, research on the corresponding controls of the multi-mode coupled vibrations is very rare so far. For the development of a semi-active control strategy to suppress the multi-mode coupled vibrations, a comprehensive parametric analysis on the optimal variables of this control is substantial. In the present study, a multi-mode control strategy named "three-row" TMD system is discussed and the general numerical equations are developed at first. Then a parametric study on the optimal control variables for the "three-row" TMD system is conducted for a prototype Humen Suspension Bridge, through which some useful information and a better understanding of the optimal control variables to suppress the coupled vibrations are obtained. This information lays a foundation for the design of semi-active control.

• Korean Journal of Optics and Photonics
• /
• v.16 no.6
• /
• pp.527-534
• /
• 2005

We investigate the pulsation characteristics in a multi-section DFB laser which is composed of one DFB section, phase tuning section, and gain section. Multi-section DFB lasers with anti-phase (AP) complex-coupled (CC) DFB structure show wide current ranges of gain and phase tuning sections fer stable pulsations compared to those with in-phase CC DFB structure or index-coupled DFB structure. For multi-section DFB lasers with AP CC DFB structure, the current range of a gain section for stable pulsations increases and the tuning range of the pulsation frequency increases as a coupling strength or a gain coupling coefficient increases Also, the tuning range using the phase variation in a phase tuning section increases. For a fixed coupling strength, the current ranges of gain and phase tuning sections for stable pulsations increase and the tuning range of the pulsation frequency increases as the length of a DFB section increases.

• Proceedings of the KIEE Conference
• /
• 1995.11a
• /
• pp.186-188
• /
• 1995

In this paper, Cross-Coupled Controller proposed for multi axes servo system. Tracking error and contouring error exist when a machine tool moves along the trajectory in multi exes system. The proposed scheme enhances the contouring performance by reducing contour error. Feedforward compensator reduces the effects of a nonlinear disturbance such as friction or dead zone. The proposed control scheme reduces the contour error which occured when the tool tracks the reference trajectory. Simulation results show that this scheme improves the contouring performance along the reference trajectory in XY-table.