• Title/Summary/Keyword: Multi step

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Effect of a Multi-Step Gap-Filling Process to Improve Adhesion between Low-K Films and Metal Patterns

  • Lee, Woojin;Kim, Tae Hyung;Choa, Yong-Ho
    • Korean Journal of Materials Research
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    • v.26 no.8
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    • pp.427-429
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    • 2016
  • A multi-step deposition process for the gap-filling of submicrometer trenches using dimethyldimethoxysilane (DMDMOS), $(CH_3)_2Si(OCH_3)_2$, and $C_xH_yO_z$ by plasma enhanced chemical vapor deposition (PECVD) is presented. The multi-step process consisted of pre-treatment, deposition, and post-treatment in each deposition step. We obtained low-k films with superior gap-filling properties on the trench patterns without voids or delamination. The newly developed technique for the gap-filling of submicrometer features will have a great impact on inter metal dielectric (IMD) and shallow trench isolation (STI) processes for the next generation of microelectronic devices. Moreover, this bottom up gap-fill mode is expected to be universally for other chemical vapor deposition systems.

A Study on Development of Multi-step Neural Network Predictive Controller (다단 신경회로망 예측제어기 개발에 관한 연구)

  • Bae, Geun-Shin;Kim, Jin-Su;Lee, Young-Jin;Lee, Kwon-Soon
    • Proceedings of the KIEE Conference
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    • 1996.11a
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    • pp.62-64
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    • 1996
  • Neural network as a controller of a nonlinear system and a system identifier has been studied during the past few years. A well trained neural network identifier can be used as a system predictor. We proposed the method to design multi-step ahead predictor and multi-step predictive controller using neural network. We used the input and out put data of B system to train the NNP and used the forecasted approximat system output from NNP as B input of NNC. In this paper we used two-step ahead predictive controller to test B heating controll system and compared with PI controller.

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The Multi-step Adomian Decomposition Method for Approximating a Fractional Smoking Habit Model

  • Zuriqat, Mohammad;Freihat, Asad
    • Kyungpook Mathematical Journal
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    • v.60 no.4
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    • pp.753-765
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    • 2020
  • Smoking is one of the main causes of health problems and continues to be one of the world's most significant health challenges. In this paper, we use the multi-step Adomian decomposition method (MSADM) to obtain approximate analytical solutions for a mathematical fractional model of the evolution of the smoking habit. The proposed MSADM scheme is only a simple modification of the Adomian decomposition method (ADM), in which ADM is treated algorithmically with a sequence of small intervals (i.e. time step) for finding accurate approximate solutions to the corresponding problems. A comparative study between the new algorithm and the classical Runge-Kutta method is presented in the case of integer-order derivatives. The solutions obtained are also presented graphically. The results reveal that the method is effective and convenient for solving linear and nonlinear differential equations of fractional order.

Multi-step design optimization of a high speed machine tool structure using a genetic algorithm with dynamic penalty (동적 벌점함수 유전 알고리즘과 다단계 설계방법을 이용한 공작기계 구조물의 설계 최적화)

  • 최영휴;배병태;김태형;박보선
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.108-113
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    • 2002
  • This paper presents a multi-step structural design optimization method fur machine tool structures using a genetic algorithm with dynamic penalty. The first step is a sectional topology optimization, which is to determine the best sectional construction that minimize the structural weight and the compliance responses subjected to some constraints. The second step is a static design optimization, in which the weight and the static compliance response are minimized under some dimensional and safety constraints. The third step is a dynamic design optimization, where the weight static compliance, and dynamic compliance of the structure are minimized under the same constraints. The proposed design method was examined on the 10-bar truss problem of topology and sizing optimization. And the results showed that our solution is better than or just about the same as the best one of the previous researches. Furthermore, we applied this method to the topology and sizing optimization of a crossbeam slider for a high-speed machining center. The topology optimization result gives the best desirable cross-section shape whose weight was reduced by 38.8% than the original configuration. The subsequent static and dynamic design optimization reduced the weight, static and dynamic compliances by 5.7 %, 2.1% and 19.1% respectively from the topology-optimized model. The examples demonstrated the feasibility of the suggested design optimization method.

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Comparison of Numerical Orbit Integration between Runge-Kutta and Adams-Bashforth-Moulton using GLObal NAvigation Satellite System Broadcast Ephemeris

  • Son, Eunseong;Lim, Deok Won;Ahn, Jongsun;Shin, Miri;Chun, Sebum
    • Journal of Positioning, Navigation, and Timing
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    • v.8 no.4
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    • pp.201-208
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    • 2019
  • Numerical integration is necessary for satellite orbit determination and its prediction. The numerical integration algorithm can be divided into single-step and multi-step method. There are lots of single-step and multi-step methods. However, the Runge-Kutta method in single-step and the Adams method in multi-step are generally used in global navigation satellite system (GNSS) satellite orbit. In this study, 4th and 8th order Runge-Kutta methods and various order of Adams-Bashforth-Moulton methods were used for GLObal NAvigation Satellite System (GLONASS) orbit integration using its broadcast ephemeris and these methods were compared with international GNSS service (IGS) final products for 7days. As a result, the RMSE of Runge-Kutta methods were 3.13m and 4th and 8th order Runge-Kutta results were very close and also 3rd to 9th order Adams-Bashforth-Moulton results. About result of computation time, this study showed that 4th order Runge-Kutta was the fastest. However, in case of 8th order Runge-Kutta, it was faster than 14th order Adams-Bashforth-Moulton but slower than 13th order Adams-Bashforth-Moulton in this study.

Multi-step Optimization of the Moving Body for the High Speed Machinining Center using Weighted Method and G.A. (가중치방법과 유전알고리즘을 이용한 금형가공센터 고속이송체의 다단계 최적설계)

  • 최영휴;배병태;강영진;이재윤;김태형
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.23-27
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    • 1997
  • This paper introduces the structural design optimization of a high speed machining center using multi-step optimization combined with G.A.(Genetic Algorithm) and Weighted Method. In this case, the design problem is to find out the best design variables which minimize the static compliance, the dynamic compliance, and the weight of the machine structure simultaneously. Dimensional thicknesses of the thirteen structural members of the machine structure are adopted as design variables. The first step is the cross-section configuration optimization, in which the area moment of inertia of the cross-section for each structural member is maximized while its area is kept constant The second step is a static design optimization, In which the static compliance and the weight of the machine structure are minimized under some dimensional and safety constraints. The third step IS a dynamic design optimization, where the dynamic compliance and the structure weight are minimized under the same constraints. After optunization, static and dynamic compliances were reduced to 62.3% and 95.7% Eorn the initial design, while the weight of the moving bodies are also in the feaslble range.

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Large Step Optimization Approach to Flexible Job Shop Scheduling with Multi-level Product Structures (다단계 제품 구조를 고려한 유연 잡샵 일정계획의 Large Step Optimization 적용 연구)

  • Jang, Yang-Ja;Kim, Kidong;Park, Jinwoo
    • Proceedings of the Korea Inteligent Information System Society Conference
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    • 2002.05a
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    • pp.429-434
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    • 2002
  • For companies assembling end products from sub assemblies or components, MRP (Material Requirement Planning) logic is frequently used to synchronize and pace the production activities for the required parts. However, in MRP, the planning of operational-level activities is left to short term scheduling. So, we need a good scheduling algorithm to generate feasible schedules taking into account shop floor characteristics and multi-level job structures used in MRP. In this paper, we present a GA (Genetic Algorithm) solution for this complex scheduling problem based on a new gene to reflect the machine assignment, operation sequences and the levels of the operations relative to final operation. The relative operation level is the control parameter that paces the completion timing of the components belonging to the same branch in the multi-level job hierarchy. In order to revise the fixed relative level which solutions are confined to, we apply large step transition in the first step and GA in the second step. We compare the genetic algorithm and 2-phase optimization with several dispatching rules in terms of tardiness for about forty modified standard job-shop problem instances.

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New Double-Connected Multi-Step Inverter for SVC Applications (SVC적용을 위한 새로운 이중접속방식의 멀티스텝 인버터)

  • 양승욱;최세완;문건우;조정구
    • The Transactions of the Korean Institute of Power Electronics
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    • v.4 no.6
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    • pp.547-553
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    • 1999
  • A new multi-step voltage source inverter is proposed in this paper. The proposed scheme is composed of t the double-connected 12-step inverter with an auxiliary circuit. The auxiliary circuit includes two voltage d dividing capacitors, two switching devices and a low KV A autotransformer. The resultant system is shown to b be a 24-step inverter suitable for medium power level SVC applications in which the PWM method can not be e employed. A 36-step operation can also be 이)tained by the addition of a bidirectional switch to the ProlXlsed I inverter. The design parameters are derived from the analysis of voltages and currents by means of switching f functions. The validity of the proposed scheme is confirmed by the simulated and experimental results.

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Research on a New 12-Pulse Step-Up and Step-Down Aviation Auto-Transformer Rectifier

  • Jiang, Fan;Ge, Hong-juan;Dong, Xiao-xu;Zhang, Lu
    • Journal of Power Electronics
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    • v.18 no.1
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    • pp.266-276
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    • 2018
  • This paper presents a new step-up and step-down multi-pulse auto-transformer rectifier unit (ATRU) topology. This structure can achieve a wide range of output voltages, which solves the problem of auto-transformer output voltage being difficult to regulate. Adding middle taps to the primary winding and reasonably setting the number of auto-transformer windings, constituted two groups of three-phase output voltages with a $30^{\circ}$ phase difference. Multi-pulse output DC voltage is obtained after a three-phase output voltage across two rectifier bridges and inter-phase reactor. Thus, the output DC voltage is related to the number and configuration of the auto-transformer winding. In this paper, the relationship between the voltage ratio of the auto-transformer and the ratio of winding, input current and auto-transformer kilovoltampere rating are deduced and validated by simulations. On this basis, the output voltage range is optimized. An experiment on two different voltage ratio principle prototypes was carried out to verify the correctness of the analysis design.

A Study on the Characteristics of Circular Piezoelectric Transformner which has Multi-layered Crescent-Shaped Input Electrode (적층형 Crescent-Shaped Input Type 원형 압전변압기의 특성)

  • Jeong, Seong-Su;Park, Tae-Gone
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.223-224
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    • 2006
  • This paper present a new disk-type piezoelectric transformer. The input side of the transformer has a crescent-shaped electrode and the output side has a focused poling direction. This transformer has multi-layered structure. The piezoelectric transformers operated m each transformer's resonance vibration mode. The electrodes and poling directions on commercialy available piezoelectric ceramic disks were designed so that the planar or shear mode coupling factor ($k_p,\;k_{15}$) becomes effective rather than the transverse mode coupling factor ($k_{31}$). The Resonance frequency is 65.22[kHz] and maximum voltage step-up ratio is 149. Multi-layered transformer has better efficiency and step-up ratio than the single-layered transformer.

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