• 제목/요약/키워드: Mu-Scan

검색결과 242건 처리시간 0.034초

Comparison of structural and electrical properties of PMN-PT/LSCO thin films deposited on different substrates by pulsed laser deposition

  • ;;윤순길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.214-214
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    • 2010
  • The 0.65Pb($Mg_{1/3}Nb_{2/3})O_3-0.35PbTiO_3$ (PMN-PT) thin films with $La_{0.5}Sr_{0.5}CoO_{3-\delta}$ (LSCO) bottom electrodes were grown on $CeO_2$/YSZ/Si(001), Pt/$TiO_2$/Si and $SrTiO_3$ (STO) substrates using conventional pulsed laser deposition (PLD) at a substrate temperature of $550^{\circ}C$. Since generally the crystallographic orientation of the bottom electrode induces the orientation of the films deposited on it, it allows us to observe the influence of the PMN-PT film orientation on the electrical properties. Phi scan done on PMN-PT/LSCO thin films shows epitaxial behavior of the films grown on sto substrates and $CeO_2$/YSZ buffered Si(001) substrates, and (110) texture on Pt/$TiO_2$/Si substrates. Polarization-electricfield (P-E) measurement shows good hysteresis behavior of PMN-PT films with remnant polarization of 18.2, 8.8, and $4.4{\mu}C/cm^2$ on $CeO_2$/YSZ/Si, Pt/TiO2/Si and STO substrates respectively.

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자화된 유도결합형 플라즈마를 이용한 Al-Nd 박막의 식각특성에 관한 연구

  • 한혜리;이영준;오경희;홍문표;염근영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.246-246
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    • 1999
  • TFT-LCD 제조공정의 발전에 따라, 박막층(a-Si, SiNx, gate 전극, ITO 등)에 대한 습식공정을 대치하는 건식식각이 선호되고 있다. scan signal의 전파지연시간을 단축시키는 장점을 갖는 Al gate 전극의 건식식각의 경우, 높은 식각속도와 slope angle의 조절, 그리고 식각균일도가 요구된다. 이러한 Al gate 전극물질로는 Al에 Ti이나 Nd와 같은 금속을 첨가하여 post annealing 동안에 발생하는 hillock을 방지하고 더불어 낮은 resistivity(<10$\mu$$\Omega$cm)와 열과 부식에 대한 높은 저항성을 얻을 수 있다. 그러나 Al-Nd alloy 박막은 식각속도와 photoresist에 대한 식각선택도가 낮아 문제로 지적되고 있다. 본 실험에서는 고밀도 플라즈마원의 일종인 자화된 고밀도 유도결합형 플라즈마를 이용하여 식각가스 조합, inductive power, bias voltage 그리고 공정압력 등의 다양한 공정변수에 따른 Al-Nd film의 기본적인 식각특성 변화를 관찰하였다. 식각시 chloring gas를 주요 식각가스로 사용하고 BCl, HBr 등을 10mTorr의 일정한 압력을 유지하는 조건하에서 첨가하였으며 inductive power는 5100W~800W, bias voltage는 -50V~-200V까지 변화를 주었다. 식각공정의 전후를 통하여 Al-Nd 박막표면의 조성변화를 관찰하기 위하여 X-ray photoelectron spectroscopy(XPS)를 이용하였으며 공정변수에 따른 식각후 profile 관찰은 scanning electron microscopy(SEM)을 통하여 관찰하였다. Al-Nd 식각속도는 100% Cl2 플라즈마에 비해 BCl3의 양이 증가할수록 증가하였으며 75%의 BCl3 gas를 첨가하였을 때 가장 높은 식각속도를 얻을 수 있었다. 또한 SEM을 이용한 표면분석으로 roughness가 감소된 공정조건을 찾을 수 있었다.

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A Multi-purpose Fingerprint Readout Circuit Embedding Physiological Signal Detection

  • Eom, Won-Jin;Kim, Sung-Woo;Park, Kyeonghwan;Bien, Franklin;Kim, Jae Joon
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제16권6호
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    • pp.793-799
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    • 2016
  • A multi-purpose sensor interface that provides dual-mode operation of fingerprint sensing and physiological signal detection is presented. The dual-mode sensing capability is achieved by utilizing inter-pixel shielding patterns as capacitive amplifier's input electrodes. A prototype readout circuit including a fingerprint panel for feasibility verification was fabricated in a $0.18{\mu}m$ CMOS process. A single-channel readout circuit was implemented and multiplexed to scan two-dimensional fingerprint pixels, where adaptive calibration capability against pixel-capacitance variations was also implemented. Feasibility of the proposed multi-purpose interface was experimentally verified keeping low-power consumption less than 1.9 mW under a 3.3 V supply.

유연소자 응용을 위한 은 나노입자의 레이저 소결 (Laser Sintering of Silver Nanoparticle for Flexible Electronics)

  • 지석영;박원태;노용영;장원석
    • 한국생산제조학회지
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    • 제24권1호
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    • pp.135-139
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    • 2015
  • We present a fine patterning method of conductive lines on polyimide (PI) and glass substrates using silver (Ag) nanoparticles based on laser scanning. Controlled laser irradiation can realize selective sintering of conductive ink without damaging the substrate. Thus, this technique easily creates fine patterns on heat-sensitive substrates such as flexible plastics. The selective laser sintering of Ag nanoparticles was managed by optimizing the conditions for the laser scan velocity (1.0-20 mm/s) and power (10-150 mW) in order to achieve a small gap size, high electrical conductivity, and fine roughness. The fabricated electrodes had a minimum channel length of $5{\mu}m$ and conductivity of $4.2{\times}10^5S/cm$ (bulk Ag has a conductivity of $6.3{\times}10^5S/cm$) on the PI substrate. This method was used to successfully fabricate an organic field effect transistor with a poly(3-hexylthiophene) channel.

골융합 임플란트 개발을 위한 동물임상실험;비글견 경골 적용 (Clinical animal test for development of osseointegration implant;application for beagle tibia)

  • 최경주;김신기;문무성;안재용
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 추계학술대회
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    • pp.1373-1377
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    • 2003
  • Current prostheses for amputees are generally extrinsic wearing socket type that the coupling between body stump and appliance wraps the soft tissue and this structure causes several problems :applying direct weight to soft tissue such as skin and muscle, skin trouble of contacting area and pain. In this study, osseointegration implant is a method to directly connect prosthesis to the residual stump skeletal tissue of arm, finger and leg through surgical operation. Technology presented in this paper essentially solves the problems of pain and abnormal weight transfer system indicated above and recovers the functions of the amputated arm and leg. In this paper, implant shape was designed for the first step for the development of osseointegration implant and then we studied the possibility to apply this osseointegration implant to human body by performing implant insertion operation to beagle tibia for the clinical animal test and normal beagle's gait analysis was executed in order to quantitatively verify the beagle's skeletal functions after the implant insertion.

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요소측정용 바이오센서를 위한 Cu-doped PPy electrode의 제작 (Fabrication of Cu-doped PPy electrode for urea sensor)

  • 양정훈;진준형;송민정;윤동화;민남기;홍석인
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 하계학술대회 논문집 C
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    • pp.2000-2002
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    • 2002
  • 신장병의 조기진단을 위해서 체내의 요소 농도의 정확한 측정은 매우 중요하며, 이러한 이유에서 많은 연구자들은 보다 빠르고 정확한 체내의 요소농도 측정을 위한 바이오센서를 개발 중이다. 본 논문은 반도체 공정을 이용하여 산화막(4.000${\AA}$)이 성장된 p-형 실리콘 웨이퍼를 사용하였다. RF sputter를 사용하여 티타늄과 백금을 증착한 백금 박막전극을 제작하였다. 그 위에 전도성 고분자인 Polypyrrole(PPy)과 전도도를 증가시키기 위하여 구리를 도펀트로 사용 scan rate 40mV/S $0.8{\sim}-0.8V$ 전위영역에서 산화적 전기 중합법 (anodical electropolymerization)을 이용하여 전극을 형성하였다. 요소를 2개의 암모늄 이온과 1개의 탄산 이온으로의 가수분해반응을 촉매하는 효소로써 유레이즈(urease)를 전기적 흡착방법을 이용하여 고정화하고 이에 요소농도의 변화에 대하여 시간대 전류법 (chronoamperometry:CA)을 사용하여 감도를 측정하였다. 최적화된 조건하에서 요소농도에 비례하여 Cu-doped PPy electrode로부터 얻어진 확산한계전류는 $4.5{\mu}A$/decade의 기울기를 나타내었다. 전극의 표면은 SEM(Scanning Electron Microscopy)과 EDX(Energy Dispersive X-Ray Spectrometer)를 이용하여 분석 하였다.

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Acoustic Emission Monitoring of Lightning-Damaged CFRP Laminates during Compression-after-Impact Test

  • Shin, Jae-Ha;Kwon, Oh-Yang
    • 비파괴검사학회지
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    • 제32권3호
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    • pp.269-275
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    • 2012
  • Carbon-fiber reinforced plastic(CFRP) laminates made of nano-particle-coated carbon fibers and damaged by a simulated lightning strike were tested under compression-after-impact(CAI) mode, during which the damage progress due to compressive loading has been monitored by acoustic emission(AE). The impact damage was induced not by mechanical loading but by a simulated lightning strike. Conductive nano-particles were coated directly on the fibers, from which CFRP coupons were made. The coupon were subjected to the strikes with a high voltage/current impulse of 10~40 kA within a few ${\mu}s$. The effects of nano-particle coating and the degree of damage induced by the simulated lightning strikes on AE activities were examined, and the relationship between the compressive residual strength and AE behavior has been evaluated in terms of AE event counts and the onset of AE activity with the compressive loading. The degree of impact damage was also measured in terms of damage area by using ultrasonic C-scan images. The assessment during the CAI tests of damaged CFRP showed that AE monitoring appeared to be useful to differentiate the degree of damage hence the mechanical integrity of composite structures damaged by lightning strikes.

MICROSTRUCTURE AND MECHANICAL STRENGTH OF SURFACE ODS TREATED ZIRCALOY-4 SHEET USING LASER BEAM SCANNING

  • Kim, Hyun-Gil;Kim, Il-Hyun;Jung, Yang-Il;Park, Dong-Jun;Park, Jeong-Yong;Koo, Yang-Hyun
    • Nuclear Engineering and Technology
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    • 제46권4호
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    • pp.521-528
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    • 2014
  • The surface modification of engineering materials by laser beam scanning (LBS) allows the improvement of properties in terms of reduced wear, increased corrosion resistance, and better strength. In this study, the laser beam scan method was applied to produce an oxide dispersion strengthened (ODS) structure on a zirconium metal surface. A recrystallized Zircaloy-4 alloy sheet with a thickness of 2 mm, and $Y_2O_3$ particles of $10{\mu}m$ were selected for ODS treatment using LBS. Through the LBS method, the $Y_2O_3$ particles were dispersed in the Zircaloy-4 sheet surface at a thickness of 0.4 mm, which was about 20% when compared to the initial sheet thickness. The mean size of the dispersive particles was 20 nm, and the yield strength of the ODS treated plate at $500^{\circ}C$ was increased more than 65 % when compared to the initial state. This strength increase was caused by dispersive $Y_2O_3$ particles in the matrix and the martensite transformation of Zircaloy-4 matrix by the LBS.

Electrochemical Determination of Artemisinin Using a Multi-wall Carbon Nanotube Film-modified Electrode

  • Yang, Xiaofeng;Gan, Tian;Zheng, Xiaojiang;Zhu, Dazhai;Wu, Kangbing
    • Bulletin of the Korean Chemical Society
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    • 제29권7호
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    • pp.1386-1390
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    • 2008
  • Artemisinin, the effective ingredient of Chinese herb Artemisia annua L (Qinghao in Chinese), has been proved to be effective to antimalarial. Herein, a reliable, sensitive and convenient electrochemical method was developed for the determination of artemisinin utilizing the excellent properties of multi-wall carbon nanotube (MWNT). The electrochemical behavior of artemisinin was investigated. It is found that the reduction peak current of artemisinin remarkably increases and the peak potential shifts positively by 240 mV at the MWNT film-modified electrode. These phenomena indicate that the MWNT film exhibits efficient catalytic activity to the electrochemical reduction of artemisinin. The effects of pH value, amount of MWNT, scan rate and accumulation time were examined. The limit of detection (S/N = 3) is as low as 10 $\mu$ g $L^{-1}$. Finally, this newly developed method was used to determine the content of artemisinin in Artemisia annua L.

다결정 실리콘 박막 트랜지스터 Active Matrix OLED 디스플레이를 위한 이중 변조 구동 (Dual Modulation Driving for Poly-Si TFT Active Matrix OLED Displays)

  • 김재근;정주영
    • 대한전자공학회논문지SD
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    • 제41권10호
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    • pp.17-22
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    • 2004
  • 본 논문에서는 진폭 변조와 펄스 폭 변조를 모두 사용하는 새로운 AMOLED 디스플레이 구동 방식을 개발하였다. 펄스 폭 변조를 위해서 다섯 개의 서브 프레임으로 화상 프레임을 나누었고 진폭 변조를 위해 TFT 게이트 전압에 의해 제어되는 3가지의 OLED 휘도(전류) 레벨을 사용하였다. 이 두 종류의 변조를 조합하여 35(=243) 계조를 얻었다. 그리고 DAC를 사용하지 않고 2개의 쉬프트 레지스터를 갖는 새로운 데이터 전극 구동 회로를 설계하였다. 회로 동작은 6㎛ 채널 길이 다결정 TFT의 전류-전압 특성에서 추출된 TFT 파라미터를 이용한 HSpice 시뮬레이션을 통하여 검증하였다. 시뮬레이션 결과로부터 320×240, 이중 스캔, 243 계조 AMOLED 디스플레이를 구현할 수 있음을 확인하였다.