• Korean Journal of Materials Research
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• v.34 no.3
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• pp.163-169
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• 2024

As the limitations of Moore's Law become evident, there has been growing interest in advanced packaging technologies. Among various 3D packaging techniques, Cu-SiO₂ hybrid bonding has gained attention in heterogeneous devices. However, certain issues, such as its high-temperature processing conditions and copper oxidation, can affect electrical properties and mechanical reliability. Therefore, we studied depositing only a heterometal on top of the Cu in Cu-SiO₂ composite substrates to prevent copper surface oxidation and to lower bonding process temperature. The heterometal needs to be deposited as an ultra-thin layer of less than 10 nm, for copper diffusion. We established the process conditions for depositing a Co film using a Co(EtCp)₂ precursor and utilizing plasma-enhanced atomic layer deposition (PEALD), which allows for precise atomic level thickness control. In addition, we attempted to use a growth inhibitor by growing a self-assembled monolayer (SAM) material, octadecyltrichlorosilane (ODTS), on a SiO₂ substrate to selectively suppress the growth of Co film. We compared the growth behavior of the Co film under various PEALD process conditions and examined their selectivity based on the ODTS growth time.

• Polymer(Korea)
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• v.27 no.5
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• pp.397-404
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• 2003

The interaction of cell adhesive protein and polypeptide with bone marrow stromal stem cells (BMSCs) grown in tissue engineered films and scaffolds were examined. Several proteins or polypeptide known as cell-adhesive were coated adsorption on poly(lactide-co-glycolide) (PLGA) films and scaffolds and adhesion and proliferation behavior of BMSC on those surfaces were compared. The protein and polypeptide used include collagen IV, fibrinogen, laminin, gelatin, fibronectin, and poly(L-lysine). The protein and polypeptide were adsorbed on the PLGA film surfaces with almost monolayer coverage except poly(L-lysine). BMSCs were cultured for 1, 2, and 4 days on the protein- or polypeptide-adsorbed PLGA films and scaffolds. The cell adhesion and proliferation behaviors were assessed by sulforho damine B assay. It was observed that the protein- or polypeptide-adsorbed surfaces showed better cell adhesion and proliferation than the control.

• Journal of Radiation Protection and Research
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• v.33 no.2
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• pp.53-59
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• 2008

We observed DNA damages as a function of mean absorbed dose to identify the indirect effect of high-energy radiation such as x-ray. Monolayer films of lyophilized pGEM-3Zf(-) plasmid DNA deposited on tantalum foils were exposed to Al $K{\alpha}$ X-ray (1.5 keV) for 0, 3, 7 and 10 min, respectively, in a condition of ultrahigh vacuum state. We compared DNA damages by X-ray irradiation with those by 3 eV electron irradiation. X-ray photons produced low-energy electrons (mainly below 20 eV) from the tantalum foils and DNA damage was induced chiefly by these electrons. For electron beam irradiation, DNA damage was directly caused by 3 eV electrons. Irradiated DNA was analyzed by agarose gel electrophoresis and quantified by ImagaQuant program. The quantities of remained supercoiled DNA after irradiation were linearly decreased as a function of mean absorbed dose. On the other hand, the yields of nicked circular (single strand break, SSB) and interduplex crosslinked form 1 DNA were linearly increased as a function of mean absorbed dose. From this study, it was confirmed that DNA damage was also induced by low energy electrons ($0{\sim}10\;eV$) even below threshold energies for the ionization of DNA.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.7
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• pp.4457-4462
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• 2014

This paper presents an antenna design that can be applied to flexible transparent conducting film. The antennas shaping PIFA (Planar Inverted F-shpae Antenna) were produced on polyamide substrates, which are flexible. The IZTO/Ag/IZTO multilayer films were used for the antennas and exhibited superior electrical, optical and flexible characteristics. This study compared the transparency and performance of two antennas (IZTO/Ag/IZTO multilayer film, and Ag monolayer film). The operation frequencies were set to 5.18~5.32 GHz of WLAN (802.11a). The performance showed a maximum efficiency and peak gain of 89 % and 5.86 dBi, respectively.

• Journal of Adhesion and Interface
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• v.11 no.4
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• pp.144-148
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• 2010

It reports the surface modification of gold nanoparticles (AuNPs) by the synthesis of thin silica layer and the fabrication of AuNPs monolayer on the glass surface. AuNPs of 10 nm in diameter were prepared in aqueous solution. A silica layer was synthesized at the different concentration of tetraethlyorthosilicate for the control of silica layer thickness. Langmuir-Blodgett (LB) film was fabricated by dispersing AuNPs on the aqueous solution and raising a surface pressure up to a solid phase. The change of AuNPs' size was observed by the change of UV/Visible spectra. Atomic force microscopic images confirmed the reliable fabrication of AuNPs LB films.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.376-376
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• 2012

Semiconductor nanowires (NWs) are future building block for nano-scale devices. Especially, Ge NWs are fascinated material due to the high electrical conductivity with high carrier mobility. It is strong candidate material for post-CMOS technology. However, thermal stability of Ge NWs are poor than conventional semiconductor material such as Si. Especially, when it reduced size as small as nano-scale it will be melted around CMOS process temperature due to the melting point depression. Recently, Graphene have been intensively interested since it has high carrier mobility with single atomic thickness. In addition, it is chemically very stable due to the $sp^2$ hybridization. Graphene films shows good protecting layer for oxidation resistance and corrosion resistance of metal surface using its chemical properties. Recently, we successfully demonstrated CVD growth of monolayer graphene using Ge catalyst. Using our growth method, we synthesized Ge/graphene core/shell (Ge@G) NW and conducted it for highly thermal stability required devices. We confirm the existence of graphene shell and morphology of NWs using SEM, TEM and Raman spectra. SEM and TEM images clearly show very thin graphene shell. We annealed NWs in vacuum at high temperature. Our results indicated that surface melting phenomena of Ge NWs due to the high surface energy from curvature of NWs start around $550^{\circ}C$ which is $270^{\circ}C$ lower than bulk melting point. When we increases annealing temperature, tip of Ge NWs start to make sphere shape in order to reduce its surface energy. On the contrary, Ge@G NWs prevent surface melting of Ge NWs and no Ge spheres generated. Furthermore, we fabricated filed emission devices using pure Ge NWs and Ge@G NWs. Compare with pure Ge NWs, graphene protected Ge NWs show enhancement of reliability. This growth approach serves a thermal stability enhancement of semiconductor NWs.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.60-60
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• 2015

Nanosheets of graphene and related 2D materials have attracted much attention due to excellent physical, chemical and mechanical properties. Single-layer graphene (SLG) was first synthesized by Blakely et al in 1974 [1]. Following his achievements, we initiated the growth and characterization of graphene and h-BN on metal substrates using surface segregation and precipitation in 1980s [2,3]. There are three important steps for nanosheet growth; surface segregation of dopants, surface reaction for monolayer phase, and subsequent 3-D growth (surface precipitation). Surface phase transition was clearly demonstrated on C-doped Ni(111) by in situ XPS at elevated temperatures [4]. The growth mode was clarified by inelastic background analysis [5]. The surface segregation approach has been applied to C-doped Pt(111) and Pd(111), and controllable growth of SLG has been demonstrated successfully [6]. Recently we proposed a promising method for producing SLG fully covering an entire substrate using Ni films deposited on graphite substrates [7]. A universal method for layer counting has been proposed [8]. In this paper, we will focus on the effect of competitive surface-site occupation between carbon and other surface-active impurities on the graphene growth. It is known that S is a typical impurity of metals and the most surface-active element. The surface sites shall be occupied by S through surface segregation. In the case of Ni(110), it is confirmed by AES and STM that the available surface sites is nearly occupied by S with a centered $2{\times}2$ arrangement. When Ni(110) is doped with C, surface segregation of C may be interfered by surface active elements like S. In this case, nanoscopic characterization has discovered a preferred directional growth of SLG, exhibiting a square-like shape (Fig. 1). Also the detailed characterization methodologies for graphene and h-BN nanosheets, including AFM, STM, KPFM, AES, HIM and XPS shall be discussed.

• Journal of the Korean Chemical Society
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• v.43 no.1
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• pp.58-68
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• 1999

The phthalocyanine(Pc) film can not be prepared by LB method because it is insoluble in organic solvents. In order to increase its solubility, two kinds of copper phthalocyanine derivatives (CuPc$(COOH)_2$ and CuPc$(COOH)_4$) were synthesized and their monolayers were prepared by LB method. It is found from the surface pressure-area curves that the LB monolayer film of CuPc$(COOH)_2$ have more ordered structure than that of CuPc$(COOH)_4$. In the photocurrent characteristic the value Of CuPc$(COOH)_2$ was superior to that of CuPc $(COOH)_4$. Therefore, it is found that the charge generation efficiency for phthalocyanines have influenced on its ordered structure as the functional groups.

• Applied Chemistry for Engineering
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• v.19 no.1
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• pp.111-116
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• 2008

Collapsed perflurostearic acid (PFS) films were prepared on the different pH and the various metal ion ($Na^+$, $Ca^{2+}$, $La^{3+}$) containing subphase using Langmuir-Blodgett (LB) trough. The degree of ionization of collapsed PFS film formed from floating monolayer has been determined by Fourier transform infrared (FTIR) spectroscopy. The intensity of C = O of -COOH peaks of collapsed PFS decreased with increasing pH of subphase. The order of ionization of collapsed PFS on the subphase of the same pH was $La^{3+}$ > $Ca^{2+}$ > $Na^+$. The degree of ionization of collapsed PFS on the Deionized (D.I.) water subphase is above 50% even at subpahse pH 3, which is much higher degree of ionization than that of stearic acid.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.141-141
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• 1999

전기화학과 초고진공(ultra-high vacuum, UHV) 분광법을 이용하여 고체/액체의 계면에서 일어나는 현상을 분자단위에서 이해하고 조절하기 위한 연구를 수행하였다. 이들 중 전기화학으로 형성된 구리 및 은 금속(sub)monlayer 박막을 그 예로 선택하여 소개한다. 초박막 금속의 흡착량은 cyclic voltammogram과 새로 개발된 Auger electron spectroscopy (AES) 정량법을 통해 얻어졌고, 이 값들은 low energy electron diffraction (LEED) 및 in-situ atomic force microscopy (AFM)법을 이용한 구조 분석결과와 비교되어졌다. 또한 화학상태를 확인하기 위하여 core-level electron energyy loss spectroscopy (CEELS)를 사용하였다. 먼저 황산 전해질에서 금(111) 단결정 전극상에 전기화학적으로 형성된 굴의 계면특성을 조사하였다. 특정 전위값에서 2/3 ML의 구리와 1/3 ML의 음이온이 상호 흡착하여 ({{{{ SQRT { 3} }}$\times${{{{ SQRT { 3} }}) 격자 구조를 보였고, 전위값이 커지거나 줄어들면, 이 구조가 사라지는 현상이 관찰되었다. 즉 이 ({{{{ SQRT { 3} }}}}$\times${{{{ SQRT { 3} }}}}) 흡착구조는 첫 번째 UPD underpotential deposition) 피크에 특이하게 관련되어 있음을 알 수 있었다. 금속 초박막 형성에 미치는 음이온의 영향을 좀 더 확인하기 위해 초박막 은이 증착된 금 단결정 전극상의 황산 음이온에 관하여 연구하였다. 은의 증착이 일어날 수 없는 양전위값 영역에서 ({{{{ SQRT { 3} }}}}$\times${{{{ SQRT { 3} }}}})의 규칙적인 음이온의 구조를 보였다. 그리고 은의 장착은 세척 과정과 용액의 농도에 따라 p(3$\times$3)과 p(5$\times$5)의 규칙적인 두가지 구조를 가졌다. in-situ AFM에서는 p(3$\times$3)의 은 증착 구조만 나타났고, 음 전위값으로 옮겨가면 p(1$\times$1) 구조로 바뀌었다. ex-situ 초고진공 결과와 이 AFM의 in-situ 결과를 상호 비교 논의할 것이다. 음이온의 흡착이 없는 묽은 플로르산(HF) 전해질에서 은은 전위값을 음전위 쪽으로 이동해 감에 따라 p(3$\times$3), p(5$\times$5), (5$\times$5), (6$\times$6), 그리고 (1$\times$1)의 연속적 구조 변화를 보였다. 이 다양한 구조들을 AES로부터 얻어진 표면 흡착량과 연결시켰더니 정량적으로 잘 일치되는 결과를 보였다. 전기화학적인 증착에서는 기존의 진공 증착과 비교할 때 음이온의 공흡착이 금속 초박막 형성 메카니즘에 큰 영향을 미침을 알 수 있었다. 또한 은의 전기화학적 다층박막 성장은 MSM (monolayer-simultaneous-multilayer) 메카니즘을 따름을 확인하였다. 마지막으로 구조 및 양이 규칙적으로 조절되는 전극의 응용가능성이 간단히 논의될 것이다.