• Journal of the Korean Ceramic Society
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• v.30 no.7
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• pp.571-577
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• 1993

The effect of $\alpha$-Al2O3 seeding on preparation of zirconia/alumina gel fragment prepared by sol-gel processing was characterized through XRD, SEM, TG/DTA and IR analysis. Aluminum isopropoxide and zirconium butoxide were used as starting materials. $\alpha$-Al2O3 seeding restrained grain growth of alumina and zirconia, and decreased tetragonal to monoclinic phase transformation of zirconia on cooling. Therefore, fine zirconia-toughened alumina composite having the relative sintered density of about 98% of theoretical at 140$0^{\circ}C$ for 2h could be obtained.

• Journal of the Korean Ceramic Society
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• v.31 no.10
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• pp.1176-1180
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• 1994

The sliding wear behavior of the plasma-sprayed zirconia containing 3 mol% yttria was investigated after the annealing at room temperature to 80$0^{\circ}C$ in various concentrations of humid atmosphere as laboratory, humid, dry argon atmosphere. Both of the friction coefficient and the wear loss increased with increasing temperature up to 80$0^{\circ}C$. Surface morphology of the worn samples changed with annealing temperature. The change of monoclinic/tetragonal (m/t) x-ray peak intensity ratio effected the wear behavior. The m/t ratio had maximum value at 20$0^{\circ}C$ and decreased with increased temperature in laboratory and humid atmosphere. In argon atmosphere the m/t ratio had no maximum value and decreased with increasing temperature. At all the annealing temperature humid atmosphere had more the m/t ratio value than any other atmosphere. The change of toughness was showed the inversed result of m/t ratio change. The results indicated that the resudial stress which was induced by the different amount of phase transformation takes a detrimental role in wear behavior.

• Journal of the Korean Ceramic Society
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• v.45 no.2
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• pp.126-131
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• 2008

In this study, we prepared zirconia gel by the sol-gel method and investigated its photoluminescence properties by varying pyrolysis temperature. The addition of acetic acid into a Zr-alkoxide solution resulted in forming the bidentate ligands with Zr ions and producing a stable gel. At the pyrolysis temperature of $350^{\circ}C$, the zirconia nanocrystals with tetragonal structure gradually appeared in the gel. The PL intensity of the zirconia gel increased with increasing the pyrolysis temperature up to $350^{\circ}C$, but decreased above the temperature. Concurrently, its PL peak wavelength continuously shifted from ${\sim}440\;nm$ to ${\sim}550\;nm$ with the temperature. The PL characteristics of the zirconia gels were closely associated with decomposition of residual organic groups, the formation of the zirconia nanocrystals, and the tetragonal to monoclinic phase transformation.

• Journal of the Korean Ceramic Society
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• v.33 no.1
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• pp.25-34
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• 1996

Yttria stabilized zirconia (YSZ) thin films were prepared by the electrochemical vapor deposition (EVD) method on the porous Al2O3 substrates which were fabricated by different substrate thickness and porosity. Film growth rates decreased with increase on the substrate thickness and porosity and obeyed a parabolic rate law. Activa-tion energy calculated from the parabolic rate onstants was 69.9 kcal/mol. With increase on the deposition time, monoclinic phase was appeared and then disappeared. YSZ penetrated deeply into substrates when the EVD temperature decreased. Electrical conductivity of the films was 0.09 S/cm at 100$0^{\circ}C$ similar to the value of YSZ single crystal.

• Journal of Applied Reliability
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• v.15 no.3
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• pp.216-221
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• 2015

Sintering behavior of 3%yttria-stabilized zirconia was comparatively studied using a spray-dried powder produced by a domestic and global company. Quality of the sintered block was analysed in terms of relative density, shrinkage rate, grain growth, hardness, and fracture toughness. Relative density, shrinkage rate, and hardness value of the finally sintered block was similar between domestic and global zirconia powder, respectively. But, flexural strength of the domestic powder specimen was about 70% of the sintered block produced by using a global powder. The poor sintering quality of the domestic powder was discussed in relation with compressibility of the spray-dried granule-type powder and the amount of monoclinic phase in the as-received powder.

• Journal of Powder Materials
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• v.10 no.3
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• pp.186-189
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• 2003

A chemical vapor condensation (CVC) process using the pyrolysis of metal-organic precursors was applied to produce the nanosized $WO_3$ powders. Morphology and phase changes of the synthesized $WO_3$ powder as a function of CVC parameters were investigated by XRD, BET and TEM. The agglomerated nanosized monoclinic $WO_3$ powders with nearly spherical shape and 10-38 nm in mean diameter could be obtained. Conditions to produce the $WO_3$ nanopowders are presented in this paper.

• Journal of the Korean Ceramic Society
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• v.27 no.8
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• pp.1064-1070
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• 1990

ZrO2 fine powders were prepared by hydrolysis, adding 0.1, 0.2, 0.3, 0.4, 0.5, 0.6mol/1H2O/ethanol to 0.1 mol/l Zr(OC3H7)4/ethanol. When hydrolized by adding 0.1mol/l Zr(OC3H7)4/ethanol to 0.1, 0.2mol/l H2O/ethanol., spherical monodispersed ZrO2 fine powders were obtained. And in this condition average sizes were about 0.5, 0.3${\mu}{\textrm}{m}$, respectively. The more H2O/ethanol concentration increased, the more the particle size decreased and the particles were agglomerated strongly. Prepared powders were amorphous and hydrates. The calcined powders with 43$0^{\circ}C$ and 100$0^{\circ}C$ were showed tetragonal and monoclinic phase, respectively.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.45-49
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• 2003

본 논문에서는 gate 산화막을 위한 Hf oxide 박막을 $Hf(dmae)_4$ (dmae=dimethylaminoethoxide) 전구체로 Direct Liquid Injection Metal Organic Chemical Vapor Deposition (DLI-MOCVD)방법을 이용하여 p-type Si(100) 기판 위에 증착하였다. 이 전구체를 이용하여 $150^{\circ}C$의 낮은 증착 온도에서도 낮은 carbon 농도와 roughness를 가지는 양질의 박막을 증착할 수 있었다. 증착된 박막은 비정질 구조를 나타내었지만 annealing 온도를 증가시킴에 따라서 결정성(monoclinic phase)을 나타내었다. $500{\AA}$으로 증착한 박막을 C-V 와 I-V curve를 통하여 전기적 특성을 평가하였다. 열처리 온도가 증가함에 따라 유효유전상수(k)는 증가하지만 열처리 온도가 $900^{\circ}C$ 이상이 되면 계면층의 형성에 의해 유효유전상수는 감소하게 되고 이에 따라 누설 전류도 감소하게 된다. 산소분위기 $800^{\circ}C$에서 annealing한 $HfO_2$ 박막의 유전상수는 20.1이고, 누설 전류 밀도는 SV에서 $2.2\times10^{-6}A/\textrm{cm}^2$ 로 좋은 전기적 특성을 가진다.

• Journal of the Korean Ceramic Society
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• v.33 no.7
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• pp.779-784
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• 1996

The spinel/cubic stabilized zirconia composites were fabricated via, The reaction sintering of monoclinic zirco-nia(baddeleyite) added with MgAl powder. During heating Mg and Al were oxidizedfirst and subsequently the oxides formed spinel (MgAl2O4) and finally remained MgO stabilized the zirconia, Because the oxides formed during the oxidation process would have very fine grain size (order of submicron) mainly due to the effects of attrition milling the reaction sintering was more effective in densification and improvement of strength and fracture toughness than conventional sintering with direct addition of MgO. The sintering behavior phase transformation during firing and mechanical properties of sintered body were investigated with emphasis on the relations between spinel formation due to MgAl addition and sintering and mechanical properties.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.9
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• pp.527-531
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• 2016

In this study, p-type thin film transistors consisting of CuO channels were fabricated by sol-gel process, with copper (II) acetate monohydrate precursors. At $500^{\circ}C$, the deposited films were fully converted into monoclinic phase CuO. The fabricated CuO thin film transistors deliver field effect mobility in saturation regime of $0.015cm^2/Vs$, and $I_{on}/I_{off}$ of ${\sim}10^3$. The degradation of the performance of the fabricated CuO thin film transistor caused by the exposure to air has been studied.