Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2003.12a
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- Pages.45-49
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- 2003
Direct Liquid Injection Metal Organic Chemical Vapor Deposition of $HfO_2$ Thin Films Using $Hf(dimethylaminoethoxide)_4$ .
Abstract
본 논문에서는 gate 산화막을 위한 Hf oxide 박막을
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