• Title/Summary/Keyword: Molecular pump

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Development of UBMS(Unbalanced Magnetron Sputtering) System and Ion Current Density Measurement of Copper Target (UBM 마그네트론 스퍼터 시스템을 이용한 구리 타겟의 이온전류밀도 향상 연구)

  • Kang, Chunghyeon;Joo, Junghoon
    • Journal of Surface Science and Engineering
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    • v.50 no.3
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    • pp.192-197
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    • 2017
  • A 6-way-cross consisting of a 2.75-inch CF flange was used as a main chamber on a PFEIFFER VACUUM TMP station based on a 67 l / sec turbo molecular pump and a diaphragm pump to produce a magnet array with a volume ratio of 5.5: 1.A 1-inch diameter copper target and graphite target were fabricated using MDX-1.5K from Advanced Energy Industries, Inc as a DC power supply. Ion current density of copper target and graphite target was measured by unbalanced magnetron sputtering. The basic pressure condition was $6.3{\times}10^{-7}mbar$ and the process pressure was Ar 50 sccm at $1.0{\times}10^{-2}mbar$ (7.5 mTorr) in the Ar atmosphere. Therefore, the relative density of copper ions reaching the substrate with the measured ion current density was derived.

Tribological Characteristics of Si-Diamond-Like Carbon Films in a Condition with Carbon Nanotube Ink Lubricant (Carbon Nanotube 잉크 환경에서의 Si-Diamond-Like Carbon 박막의 내마모 특성)

  • Jang, Kil-Chan;Kim, Tae-Gyu
    • Korean Journal of Materials Research
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    • v.21 no.3
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    • pp.149-155
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    • 2011
  • We investigated tribological characteristics of diamond-like carbon (DLC) in a condition with carbon nanotube (CNT) content of 1wt% in aqueous solution. Si-DLC films were deposited by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) process on Al6061 aluminum alloy. In this study, the deposition of DLC films was carried out in vacuum with a chamber pressure of 10-5 to 10-3 Torr achieved by mechanical pump followed by turbo molecular pump. The surface adsorbed oxygen on the Aluminum substrates was removed by passing Ar gas for 10 minutes. The RF power was maintained at 500W throughout the experiment. A buffer layer of HMDSO was deposited on the substrate to improve the adhesion of DLC coating. At this point CH4 gas was introduced in the chamber using gas flow controller and DLC coating was deposited on the buffer layer along with HMDSO for 50 min. The thickness of 1 ${\mu}m$ was obtained for DLC films on aluminum substrates The tribological properties of as synthesized DLC films were analyzed by wear test in the presence of dry air, water and lubricant such as CNT ink.

KS 규격 안에 따른 터보분자펌프의 성능시험

  • 박미영;인상렬
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.46-46
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    • 1999
  • 터보분자펌프(turbomolecular pump, TMP)는 각종 연구장비, 반도체 제조장치, 가속기, 핵융합 실험 장치 등 여러 분야에서 가장 널리 쓰이는 고진공 펌프로서 자리잡고 있다. 이런 TMP의 광범위한 사용에도 불구하고 성능평가에 관한 통일된 규격이 마련되어 있지 않다. 국제 규격협회(ISO)의 터보분자펌프 성능평가방법 시안을 토대로 제정중인 KS 규격은 아직 실험적인 근거를 자체적으로 가지고 있지 못하므로 앞으로 각 항목들에 대한 많은 실험이 수행되어야 한다. TMP의 성능을 나타내 주는 항목들 중 배기속도(pumping speed)와 압축비(compression ratio)는 가장 중요한 것들로서 다른 고진공 펌프 및 TMP 상호간의 성능을 비교할 수 있는 기본 항목이라 할 수 있다. 본 실험에서는 종래의 단순 TMP와 큰 기체유량에서도 안정된 배기속도를 유지하는 복합터보분자펌프(compound molecular pump, CMP)의 배기속도와 압축비 및 임계배압(critical backing pressure)을 KS 규격안대로 시험 평가하여 안의 평가방법과 기준의 타당성을 검토하고, 두 가지 다른 방식의 펌프에 적용할 수 있는지를 검토하였다. TMP 및 CMP 흡기구에 표준용기를 부착하고 수소 및 질소 기체를 사용하여 흡기구 압력을 변화시키면서 배기속도 및 압축비를 측정하고 배기구 압력을 변호시키면서 최대압축비 및 임계배압을 측정하였다. 흡기구의 압력측정에는 인출형 전리진공계(EG)를 사용하였고, 배기구의 압력측정은 전기용량의 격막진공계(CDG)와 피라니 진공계로 측정하였다. 진공계는 모두 회전식 점성진공계(SRG)로 교정한 후 사용하였다.

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Ion Beam Assisted Deposition System의 제작 및 자동화

  • 손영호
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.27-27
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    • 1998
  • 진공기술의 응용과 진공환경의 이용은 더 이상 논하지 않더라도 산업 전반에 그 충요성이 점점 더 커가고 있다. 이러한 여건에도 불구하고 진공율 이용하는 system 개밟의 국산화는 수 입하는 system으$\mid$ 수에 비하여 절대적으로 부족하며, 또한 개발하는 system의 자동화는 거의 이 루어지지 않고 있으며, 자동화된 진공판련 system은 거의 대부분 수입에 의흔하고 있다. 실험 실 규모에서부터 System올 하나하나 개밭하고, 이톨 자동화하는 노력과 일이 진행됨다면 산업 응용에 있어서도 자연스럽게 자동화된 system으$\mid$ 개발이 이루어 질 것이다 .. system 자동화는 상 품수명의 단축과 이에 따른 다품종 소량을 요구하는 시장수요에 대응하고, 인력절감과 고풀짙 화로 생산성 향상의 요구에 대응하기 위하여 필요하다. 본 연 구에 서 는 e-beam evaporator로 evaporation하면 서 ion beam으로 assist하여 thin film율 제 작하는 IBAD vacuum system율 싫 계 및 제 작하고[1,2], PLC[3,떼톨 이 용하여 system 자동화톨 하였다 .. thin film 제작 process는 먼저 기본 진공상태로 만뚫고 난 뒤, e-beam evaporator로 e evaporation하면서 ion beam source로 assist하여 substrate 011 thin film율 제조한다 226;. thin film올 제 조하면서 thickness monitor로 sample의 thickness rate톨 control 하고, sample의 균얼성과 밀착 성을 고려하여 substrate톨 rotation 및 heating 할 수 있도록 싫계, 제작하였다. 양질의 박막올 제조하기 위해서 진공환경이 좋은 상태로 제공되어야 한다. 이톨 위하여 oil free operation 0 I 가 능한 dry pump와 turbo molecular pump로 고진공 배기 하였다. 진공도의 흑점은 thermal effect 툴 고려하여 cold cathode ion gauge률 사용하였고, intro chamber와 main chamber 사이에는 g gate valve톨 설치하여 벌도로 운용되도록 하였다. 이러한 process를 박막의 두께, 진공도, 시 간, 온도, 공정 동의 조건올 기훈으로 자동화한 것이다. 또한 정전과 단수에 대한 interlock 기능 도 고려하였다.하였다.

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Molecular Characterization of Quinolone Antibiotic Resistance in Escherichia coli Isolated from Retail Meat in Seoul (서울시내 시판 식육에서 분리한 대장균의 퀴놀론계 항생제 내성 기전 분석)

  • Park, Ji Min;Choi, Sung Sook
    • YAKHAK HOEJI
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    • v.60 no.1
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    • pp.1-7
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    • 2016
  • The aim of this study was to investigate the prevalence of quinolone resistant E. coli from retail meat and to characterize the resistant determinants. Determination of minimum inhibitory concentration, the sequence analysis of gyrA, gyrB, parC, and parE quinolone resistance determining regions (QRDR), the presences of plasmid mediated quinolone resistance (PMQR) and the expression of efflux pump genes were investigated. Of the total 277 retail meat samples, 67 coli form bacteria were isolated. 15 of 67 isolates showed nalidixic acid resistance and 7 of 15 nalidixic acid resistant isolates were also resistant to ciprofloxacin, moxifloxacin and levofloxacin. 11 of 15 nalidixic acid resistant strains were isolated from chicken, 2 of 15 were isolated from beef and 2 of 15 were isolated from pork samples. 11 of 15 nalidixic acid resistant strains have single mutation at codon 87 (D87N or D87G) in gyrA, 2 of 11 gyrA mutants have double mutations at codon 86 and 87 (L86A and L87I) in parC with mutations at codon 434+445+465 or 429 in gyrB. 2 of 15 resistant isolates harbored qnrS, a PMQR determinant. Over expression of the acrB gene, efflux pump gene (3.93~16.53 fold), was observed in 10 of 15 resistant isolates.

Review on innovative small refrigeration methods for sub-Kelvin cooling

  • Dohoon, Kwon;Junhyuk, Bae;Sangkwon, Jeong
    • Progress in Superconductivity and Cryogenics
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    • v.24 no.4
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    • pp.71-77
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    • 2022
  • Sub-Kelvin cooling has been generally demanded for the fields of low temperature physics, such as physical property measurements, astronomical detection, and quantum computing. The refrigeration system with a small size can be appropriately introduced when the measurement system does not require a high cooling capacity at sub-Kelvin temperature. The dilution refrigerator which is a common method to reach sub-Kelvin, however, must possess a large 3He circulation equipment at room temperature. As alternatives, a sorption refrigerator and a magnetic refrigerator can be adopted for sub-Kelvin cooling. This paper describes those coolers which have been developed by various research groups. Furthermore, a cold-cycle dilution refrigerator of which the size of the 3He circulation system is minimized, is also introduced. Subsequently, a new concept of dilution refrigerator is proposed by our group. The suggested cooler can achieve sub-Kelvin temperature with a small size since it does not require any recuperator and turbo-molecular vacuum pump. Its architecture allows the compact configuration to reach sub-Kelvin temperature by integrating the sorption pump and the magnetic refrigerators. Therefore, it may be suitably utilized in the low temperature experiments requiring low cooling capacity.

Target Size of $(Na^++K^+)$-ATPase and $Na^+,\;K^+)$Pump of Human Erythrocytes (사람 적혈구막의 $(Na^++K^+)-ATPase/Na^+,\;K^+\;Pump$의 Target Size)

  • Hah, Jong-Sik;Jung, Chan Y.
    • The Korean Journal of Physiology
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    • v.19 no.1
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    • pp.15-23
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    • 1985
  • Previous biochemical studies indicate that $(Na^++K^+)-ATPase$ is composed of two subunits, ${\alpha}$ and ${\beta}$, in a form of ${\alpha}_2{\beta}_2$ with a molecular weight of approximately 300,000 daltons. There is also suggestive evidence that the $Na^+$, $K^+$ pump in human erythrocytes occurs in a complex with some glycolytic enzymes. We assessed here in situ assembly size of the $(Na^++K^+)-ATPase$ of human erythrocytes by applying classical target theory to radiation inactivation data of the ouabain-sensitive sodium flux and ATP hydrolysis of intact cells and ghosts. Cells(in the presence of cryoprotective agent) and ghosts were irradiated at $-45^{\circ}C$ to $-50^{\circ}C$ with an increasing dose of a 1.5 MeV electron beam, and after thawing, the pump and/or enzyme activities were assayed. Each activity measured was decreased as a simple exponential function of radiation dose, from which a radiation sensitive volume (target size) was calculated. When intact cells were used, the target size of both $(Na^++K^+)-ATPase$ and $Na^+$, $K^+$ pump was found to be approximately 600,000 daltons. This target size of the ATPase was reduced to approximately 325,000 daltons if the cells were pretreated with strophanthidin. When ghosts were used, the target size of the ATPase was again approximately 325,000 daltons. Our target size measurement suggests that, in intact cells, the $(Na^++K^+)-ATPase/Na^+,K^+$ pump exists either as a dimer of $(\alpha\beta)_2$ which is a functional unit or as a monomer of $(\alpha\beta)_2$ but in tight complex with other enzyme or enzymes. The results also suggest that this dimeric or heterocomplex association is dissociated during ghost preparation and strophanthidin treatment.

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Structure of the Tripartite Multidrug Efflux Pump AcrAB-TolC Suggests an Alternative Assembly Mode

  • Kim, Jin-Sik;Jeong, Hyeongseop;Song, Saemee;Kim, Hye-Yeon;Lee, Kangseok;Hyun, Jaekyung;Ha, Nam-Chul
    • Molecules and Cells
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    • v.38 no.2
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    • pp.180-186
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    • 2015
  • Escherichia coli AcrAB-TolC is a multidrug efflux pump that expels a wide range of toxic substrates. The dynamic nature of the binding or low affinity between the components has impeded elucidation of how the three components assemble in the functional state. Here, we created fusion proteins composed of AcrB, a transmembrane linker, and two copies of AcrA. The fusion protein exhibited acridine pumping activity, suggesting that the protein reflects the functional structure in vivo. To discern the assembling mode with TolC, the AcrBA fusion protein was incubated with TolC or a chimeric protein containing the TolC aperture tip region. Three-dimensional structures of the complex proteins were determined through transmission electron microscopy. The overall structure exemplifies the adaptor bridging model, wherein the funnel-like AcrA hexamer forms an intermeshing cogwheel interaction with the ${\alpha}$-barrel tip region of TolC, and a direct interaction between AcrB and TolC is not allowed. These observations provide a structural blueprint for understanding multidrug resistance in pathogenic Gram-negative bacteria.

고진공펌프의 상태진단 시스템

  • Jeong, Wan-Seop;Nam, Seung-Hwan;Kim, Wan-Jung;Im, Jong-Yeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.101-101
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    • 2012
  • 본 논문은 현재 제품화 단계로 진행 중인 터보 분자펌프(turbo-molecular pump, TMP)와 극저온 펌프(cryopump)의 고장 방지 및 예지 보수를 위한 상태 진단 시스템에 대하여 소개를 한다. 본 상태 진단 시스템은 고진공 펌프들의 다중 상태변수 즉 흡/배기부의 진공 압력, 부위별 온도, 소비 전류(혹은 전력), 그리고 부위별 진동 신호들을 실시간으로 측정하는 상태변수 수집장치, 수집된 시계열 상태변수들이 저장된 database, 그리고 저장된 상태변수를 이용한 고진공펌프의 상태진단 프로그램으로 구성되어 있다. 금번 연구에서 구축한 상태변수 체계의 특징 중 하나는 진동신호를 상태변수로 측정하여 이를 상태진단에 활용하는 점이 기존의 접근방법과 상이한 점이다. 실시간 신호 수집장치는 NI사 PXI 시스템 기반의 16채널 24-bit 동시 전압신호 측정 모듈, 8부위의 온도 측정장치(Lakeshore 218S, RS-232C 통신), 그리고 펌프의 소비전류/전력 측정장치(Hioki 3169, RS-232C), 그리고 고진공 펌프의 흡입 및 배기구의 진공도 측정장치로 구성하였다. 신호 수집용 프로그램은 NI사 Labview를 이용하여 작성하였다. 본 장치는 Nano-Fab 센터의 협조 하에 turbo-molecular 펌프와 cryopump측정 단에 각각 1대를 설치 완료하였으며 현재까지 운용 중이다. PC에 저장된 시계열 상태변수 database는 기 개발된 적응형 인자모델을 이용한 매개변수로 변환되며, 상태진단은 변환된 매개변수를 이용하여 수행할 예정이다.

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Combustion Characteristics of High Pressure Gas Generator for Liquid Rocket Engine (액체로켓엔진용 가스발생기의 고압연소특성)

  • Han Yeoung-Min;Lee Kwang-Jin;Moon Il-Yoon;Seo Seong-Hyeon;Choi Hwan-Seok;Lee Soo-Yong
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2005.11a
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    • pp.341-345
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    • 2005
  • This paper is for the combustion characteristics of gas generator which drive 1.5MW-class turbo pump and runs in fuel-rich combustion regime with LOx/kerosene as propellant. The outline of development procedure of real scale high pressure gas generator is introduced and the relation between O/F ratio and outlet temperature and the molecular weight and specific heat ratio of combustion gas are described. The relation between O/F ratio and temperature is newly obtained at higher pressure and the molecular weight and specific heat ratio is modified and their validity is confirmed by the mass relation equation.

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