• Title/Summary/Keyword: Molecular pump

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Development of Turbo Molecular Pump Vacuum Facility for High Altitude Space Environment Test (고고도 우주환경모사용 터보분자펌프 진공설비 구축)

  • Huh, Hwan-Il;Kim, Min-Jae;Kim, Sung-Su
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2011.11a
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    • pp.827-829
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    • 2011
  • Vacuum facility is required for high altitude space environment test to develop satellites or space launch vehicles. We, at Chungnam, National University, developed turbo molecular pump vacuum test facility up to $1.0{\times}10-6$ torr to simulate 200 km altitude environment. In this paper, we present some preliminary vacuum performance test results.

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A Study of the numerical method on the molecular transition flow for the rotating blades (회전날개주위 분자천이유동의 수치해석방법에 관한 연구)

  • 허중식;황영규;박종윤
    • Journal of the Korean Vacuum Society
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    • v.8 no.2
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    • pp.83-92
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    • 1999
  • Pumping performance of a disk-type molecular drag pump for a hybrid molecular pump is numerically analyzed by the direct simulation onte-Carlo method. The flows in pumping channels are three-dimensional (3D) in a molecular transition regime. The main difficulty in modeling a 3D case comes from the rotating frame of reference. Thus, trajectories of particles ar no longer straight lines. In the present study, trajectories of particles are calculated by integrating a system of differential equations including the Coriolis and centrifugal forces. The null-collisions. The present numerical results molecular model is used for calculation of molecular collisions. The present numerical results significantly disagree with the previously known ones. This indicates that an actual pumping passage is very limited to a narrow region due to the significant backstreaming of molecules from the outlet.

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An Experimental Study on the Pumping Performance of Molecular Drag Pumps

  • Kwon, Myoung-Keun;Hwang, Young-Kyu
    • Journal of Mechanical Science and Technology
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    • v.20 no.9
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    • pp.1483-1491
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    • 2006
  • The pumping performance of molecular drag pumps (MDP) has been investigated experimentally. The exporimented MDPs are a disk-type drag pump (DTDP), helical-type drag pump(HTDP) and compound drag pump (CDP), respectively In the case of the DTDP, spiral channels of a rotor are cut on both upper surface and lower surface of a rotating disk, and the corresponding stator is a planar disk. In the case of the HTDP, the rotor has six rectangular grooves. The CDP consists with the DTDP, at lower part, and with the HTDP, at upper part. The experiments are performed in the outlet pressure range of $0.2{\sim}533Pa$. The inlet pressure and compression ratio are measured under the various conditions of outlet pressure and throughputs, and nitrogen is used for the test gas. At the outlet pressure of 0.2Pa, the ultimate pressure has been reached to $1.0{\times}10^{-2}Pa$ for the HTDP, $1.3{\times}10^{-4}Pa$ for the DTDP, and $3.6{\times}10^{-5}Pa$ for the CDP. The maximum compression ratio of the CDP is much higher than those of the DTDP or HTDP. Consequently, the ultimate pressure of the CDP is the lowest one.

A numerical study of the performance of a turbomolecular pump (터보분자펌프의 성능해석에 관한 수치해석적 연구)

  • Hwang, Yeong-Gyu;Heo, Jung-Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.20 no.11
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    • pp.3620-3629
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    • 1996
  • In the free molecular flow range, the pumping performance of a turbomolecular pump has been predicted by calculation of the transmission probability which employs the integral method and the test particle Monte-Carlo method. Also, new approximate method combining the double stage solutions, so called double-approximation, is presented here. The calculated values of transmission probability for the single stage agree quantitatively with the previous known numerical results. For a six-stage pump, the Monte-Carlo method is employed to calculate the overall transmission probability for the entire set of blade rows. When the results of the approximate method combining the single stage solutions are compared with those of the Monte-Carlo method at dimensionless blade velocity ratio C=0.4, the previous known approximate method overestimates as much as 34% than does the Monte-Carlo method. But, the new approximate method gives more accurate results, whose relative error is 10% compared to the Monte-Carlo method, than does the previous approximate method.

A Study on the Pumping Performance of a Disk-type Drag Pump (원판형 드래그펌프의 배기특성에 관한 연구)

  • Hwang, Young-Kyu;Heo, Joong-Sik;Choi, Wook-Jin
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.24 no.6
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    • pp.860-869
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    • 2000
  • Numerical and experimental investigations are performed for the molecular transition and slip flows in pumping channels of a disk-type drag pump. The flow occurring in the pumping channel develops from the molecular transition to the slip flow traveling downstream. Two different numerical methods are used in this analysis: the first one is a continuum approach in solving the Navier-Stokes equations with slip boundary conditions, and the second one is a stochastic approach through the use of the direct simulation Monte Carlo method. In the experimental study, the inlet pressures are measured for various outlet pressures in the range of 0.1{\sim}4Torr. From the present study, the numerical results of predicting the performance, obtained by both methods, agree well with the experimental data for the range of Knudsen number $Kn{\leq}0.1$ (i.e., the slip flow regime). But the results from the second method only agree with the experimental data for Kn>0.1(i.e., the molecular transition regime)

Effects of Cofilin and PMA on $NA^+-K^+$ Pump Current in Guinea- pig Ventricular Myocytes

  • Lee, So-Young;Jaehoon Jung;Lee, Chin O.;Lee, Kyunglim
    • Proceedings of the Korean Biophysical Society Conference
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    • 2001.06a
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    • pp.45-45
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    • 2001
  • The Na$^{+}$-K$^{+}$ pump, a plasma membrane Na$^{+}$-K$^{+}$ ATPase is plays a key role in the regulation and maintenance of Na$^{+}$ and $K^{+}$ ion concentration gradients across cell membranes. This enzyme pumps three Na$^{+}$ out of and two $K^{+}$ into the cell against their electrochemical gradient by utilizing the energy derived from ATP. Therefore, the Na$^{+}$-K$^{+}$ pump generates a net outward electrical current.(omitted)ted)

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Fabrication and Vacuum Performance Test of the NEG Pump for $10^{-9}$ Pa Chamber ($10^{-9}$ Pa대 용기를 위한 NEG 펌프 제작 및 진공성능 조사)

  • 박미영;인상렬
    • Journal of the Korean Vacuum Society
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    • v.10 no.3
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    • pp.312-320
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    • 2001
  • A Non-Evaporable Getter(NEG) pump was fabricated using Zr-V-Fe alloy modules to obtain $10^{-9}$ Pa range pressures. Pumping performances and activation characteristics were investigated and the pumping speeds for hydrogen, deuterium and carbon monoxide gases of the NEG pump were measured. And hydrogen desorption characteristics were examined during activation at $450^{\circ}C$. Futhermore the vacuum performance was compared with those of other high vacuum pumps as turbo-molecular pump, sputter-ion pump, and cryo pump by analyzing the residual gases of the system.

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An Experimental Study on the Pumping Performance of the Turbo-Type Disk-Type Drag Pump (터보형 원판형 드래그펌프의 배기특성에 관한 실험적 연구)

  • Hwang Young-Kyu;Heo Joong-Sik;Kwon Myung-Keun;Lee Seung-Jae
    • Proceedings of the KSME Conference
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    • 2002.08a
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    • pp.577-580
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    • 2002
  • In this paper, the pumping performance of the disk-type drag pump which works in the outlet pressure range from 4 to 0.001 Torr is studied experimentally. The pumping characteristics of various drag pumps are performed. The inlet pressures are measured for various outlet pressures of the test pump. The flow-meter method is adopted to calculate the pumping speed. Compression ratios and pumping speeds for the nitrogen gas are measured. The present experimental data show the leak-limited value of the compression ratio in the molecular transition region. The rotational speed of the pump is 24,000rpm. The inlet pressures are measured for various outlet pressures of the test pump. The ultimate Pressures for zero throughput are measured for three-stage, two-stage and single-stage disk-type, respectively.

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A Destruction Pattern Analysis of a Turbo-Molecular Pump According to the Foreline Clamp Damage in an ICP Dry Etcher for 300 mm Wafers

  • Jeong, Jinyong;Lee, Intaek;Joo, Junghoon
    • Applied Science and Convergence Technology
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    • v.24 no.2
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    • pp.27-32
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    • 2015
  • We analyzed the destruction patterns of a turbo-molecular pump (TMP) resulting from its sudden exposure of a foreline to the atmospheric pressure due to a destruction of the foreline connecting clamp of an ICP dry etcher for 300 mm wafers during high-vacuum operation ($5{\times}10^{-6}$ Torr). Unlike in the case of view port's breakage, the TMP's rotor module was crashed inside the chamber. The primary damage resulted from the collision of the blades and stators, and the secondary damage resulted from the breaking of the rotor - driving shaft assembly. The fixing screws of the rotor and axial shaft were bent and broken when the TMP controller output the maximum current even after the crash event. Electrical power consumption analysis of the TMP power controller confirmed it. The stress distributions were analyzed by a finite element method using CFD-ACE+ multi physics software. Rotating inertia of each parts and kinetic energies were calculated as well. 68% of the rotational kinetic energy is deposited by the rotor - shaft module.

Proton Pump Inhibitors and Helicobacter Pylori-Associated Pathogenesis

  • Hagiwara, Tadashi;Mukaisho, Ken-Ichi;Nakayama, Takahisa;Hattori, Takanori;Sugihara, Hiroyuki
    • Asian Pacific Journal of Cancer Prevention
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    • v.16 no.4
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    • pp.1315-1319
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    • 2015
  • The fact that long-term use of proton pump inhibitors (PPIs) aggravates corpus atrophic gastritis in patients with Helicobacter pylori infection has been proven clinically and experimentally. Corpus atrophic gastritis is a known risk factor for gastric cancer. Therefore, gastric neoplasia might be associated with the long-term use of PPIs. One of the causes of worsening corpus atrophic gastritis, leading to the development of adenocarcinoma, might be bacterial overgrowth under conditions of hypochlorhydria. The production of potentially carcinogenic N-nitrosocompounds by nitrosating organisms under conditions of hypochlorhydria might be associated with carcinogenesis. Interactions between bile acids, pH, and H. pylori might also contribute to carcinogenicity, especially in patients with gastro-esophageal reflux disease (GERD). The concentration of soluble bile acids, which have bactericidal or chemorepellent properties toward H. pylori, in gastric contents is considerably higher in patients undergoing continuous PPI therapy than in healthy individuals with normal acid production. Under these circumstances, H. pylori might colonize the stomach body rather than the pyloric antrum. Hypergastrinemia induced by PPI administration might promote the development of gastric cancer. Because the main cause of corpus atrophic gastritis is H. pylori infection, and not PPI administration, H. pylori infection should be eradicated before starting long-term PPI therapy.