• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.464-464
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• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.7
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• pp.717-722
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• 2012

This paper presents the design and dynamic model of the finger exoskeleton actuated by Ionic Polymer Metal Composites (IPMC) to assist a tip pinch task. Although this exoskeleton will be developed to assist 3 degree-of-freedom motion of each finger, it has been currently made to perform the tip pinch task using 1 degree-of-freedom mechanism as the first step. The six layers of IPMC were stacked in parallel to increase the low actuation force of IPMC. In addition, the finger dummy was manufactured to evaluate the performance of the finger exoskeleton. The pinch task experiments, which were performed on the finger dummy with the developed exoskeleton, showed that the pinch force close to the desired level was obtained. Moreover, the dynamic model of the exoskeleton and finger dummy was developed in order to perform the various analyses for the improvement of the exoskeleton.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.2
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• pp.157-166
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• 2014

A light water reactor (LWR) fuel rod consists of zirconium alloy cladding tube and uranium dioxide pellets with a slight gap between them. The modeling of heat transfer across the gap between fuel pellets and the protective cladding is essential to understanding fuel behavior under irradiated conditions. Many researchers have been developing fuel performance codes based on finite element method (FE) to calculate temperature, stress and strain for multidimensional analysis. The gap conductance model for multi-dimension is difficult issue in terms of convergence and nonlinearity because gap conductance is function of gap thickness which depends on mechanical analysis at each iteration step. In this paper, virtual link gap element (VLG) has been proposed to resolve convergence issue and nonlinear characteristic of multidimensional gap conductance. In terms of calculation accuracy and convergence efficiency, the proposed VLG model has been evaluated for variable cases.

• Journal of Korea Society of Industrial Information Systems
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• v.11 no.2
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• pp.40-47
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• 2006

The learning control develops controllers that learn to improve their performance at executing a given task, based on experience performing this specific task. In a previous work the authors presented an iterative precision of linear decentralized learning control based on p-integrated teaming method for the vertical dynamic multiple systems. This paper develops an indirect decentralized learning control based on adaptive control method. The original motivation of the loaming control field was learning in robots doing repetitive tasks such as on a]1 assembly line. This paper starts with decentralized discrete time systems, and progresses to the robot application, modeling the robot as a time varying linear system in the neighborhood of the nominal trajectory, and using the usual robot controllers that are decentralized, treating each link as if it is independent of any coupling with other links. Error wave propagation method will show up in the numerical simulation for five-bar linkage as a vertical dynamic robot. The methods of learning system are shown up for the iterative precision of each link at each time step in repetition domain. Those can be helped to apply to the vertical multiple dynamic systems for precision quality assurance in the industrial robots and medical equipments.

• Journal of KIISE
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• v.42 no.9
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• pp.1117-1123
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• 2015

Use The Use Case Points method is a software estimation method that is based on user requirements. When requirement analysts elicit user requirements, they obtain different use cases because different levels of detail are possible for the Use Case, and this affects the Use Case Points. In this paper, we suggest a method to refine the level of detail of the Use Case by using the concept of an elementary function. This refinement method achieves the desired reliability for the Use Case Points because it produces less of a deviation in the Use Case Points for different requirement analysts than other methods that are based on the step, transaction, and narrative of the Use Case.

• Journal of the Earthquake Engineering Society of Korea
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• v.7 no.4
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• pp.31-37
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• 2003

This paper presents the methodologies for seismic retrofitting of cabinet equipment which can be employed to resolve the USI A-46 problem related to seismic qualification of old nuclear power plant. To obtain accurate dynamic characteristics of a cabinet structure, three types of structural modeling are introduced and the their free vibration modes are compared. Three types of seismic retrofitting scenarios, such as 1) the installation of bracing, 2) installation of damper, 3) installation of tuned mass damper(TMD), are established and evaluated for the decrease of ICRS(In Cabinet Reponse Spectrum). In the cases of 1) ＆ 2), since the retrofitted structures show larger ICRS than that of the original structure, the careful considerations are need in the application of these methods. Though the installation of TMD shows the best retrofitting result, the construction of analysis model that indicate the accurate vibration modes of real structure is estimated the essential step of this retrofitting method.

• The KIPS Transactions:PartD
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• v.11D no.4
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• pp.907-916
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• 2004

The present code generation system, developing based on single system, Is not easy for developers or maintenance men to share pattern design information in distribution environment. So in this paper, we design and implement XML as basis of web environment, and JiKU/XML object-oriented code generator using pattern design. We use UML to change pattern design to XML code, and create code, suitable to PIML command, to generate design information designed by UML into XML code. This JiKU/XML Object-oriented Code Generator makes 10-step codes, and can be easily applied to web environment. It complements the disadvantage of present generator, F77/J++, and makes standardization of design because it uses UML and design pattern information. We compare it with present system by implement Eases, and as a result, generator suggested in this study gives more effective function.

• Journal of the Korean Institute of Intelligent Systems
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• v.21 no.3
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• pp.353-358
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• 2011

This paper presents a virtual-legged walking model for bipedal robots and analyzes its fundamental RPY(Roll, Pitch, and Yaw) motion effects by simulation. For the purpose of identifying the motion effects of the bipedal walking, we assign some arbitrary trajectories both at the center of mass and at the center of pressure of the robot based on human walking. And then we verify the major moments to the roll, pitch, and yaw directions of the robot. As a result, it is shown that those motions are natural in the process of bipedal walking and they are deeply dependent on the step distance, the vertical level of the center of mass, and the acceleration of the robot. The importance of trajectory planning for the footstep location during a bipedal walking is finally addressed in terms of balance.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.12 no.3
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• pp.581-589
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• 2008

The goal of a simulator is to provide for the testing of new technologies and to facilitate the eventual transfer of these technologies to the applications. In the Development Step, Simulation can provide a cost effective alternative to expensive and hazardous field testing. In this paper, a 3D simulator is developed to test UUV navigation system bated on RVC model. The simulation system consists of a environment manager, objects and a 3D viewer. Objects are modeling all physical elements such as map, obstacle and UUV which reside in a underwater environment. Those objects are created and initialized by environment manager. The environment manager plays the role of intermediator which allows created objects to interact with each other, and transmits information on the objects to 3D viewer. The 3D viewer analyzes the received information and visualizes 3D graphic by using OpenGL primitives.

• Korean Journal of Remote Sensing
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• v.10 no.2
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• pp.37-48
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• 1994

In spatial information processing, particularly in non-renewable resource exploration, the spatial data sets, including remote sensing, geophysical and geochemical data, have to be geocoded onto a reference map and integrated for the final analysis and interpretation. Application of a computer based GIS(Geographical Information System of Geological Information System) at some point of the spatial data integration/fusion processing is now a logical and essential step. It should, however, be pointed out that the basic concepts of the GIS based spatial data fusion were developed with insufficient mathematical understanding of spatial characteristics or quantitative modeling framwork of the data. Furthermore many remote sensing and geological data sets, available for many exploration projects, are spatially incomplete in coverage and interduce spatially uneven information distribution. In addition, spectral information of many spatial data sets is often imprecise due to digital rescaling. Direct applications of GIS systems to spatial data fusion can therefore result in seriously erroneous final results. To resolve this problem, some of the important mathematical information representation techniques are briefly reviewed and discussed in this paper with condideration of spatial and spectral characteristics of the common remote sensing and exploration data. They include the basic probabilistic approach, the evidential belief function approach (Dempster-Shafer method) and the fuzzy logic approach. Even though the basic concepts of these three approaches are different, proper application of the techniques and careful interpretation of the final results are expected to yield acceptable conclusions in cach case. Actual tests with real data (Moon, 1990a; An etal., 1991, 1992, 1993) have shown that implementation and application of the methods discussed in this paper consistently provide more accurate final results than most direct applications of GIS techniques.