• 제목/요약/키워드: Model parameters

검색결과 15,035건 처리시간 0.043초

Enhancement of the Virtual Metrology Performance for Plasma-assisted Processes by Using Plasma Information (PI) Parameters

  • Park, Seolhye;Lee, Juyoung;Jeong, Sangmin;Jang, Yunchang;Ryu, Sangwon;Roh, Hyun-Joon;Kim, Gon-Ho
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.132-132
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    • 2015
  • Virtual metrology (VM) model based on plasma information (PI) parameter for C4F8 plasma-assisted oxide etching processes is developed to predict and monitor the process results such as an etching rate with improved performance. To apply fault detection and classification (FDC) or advanced process control (APC) models on to the real mass production lines efficiently, high performance VM model is certainly required and principal component regression (PCR) is preferred technique for VM modeling despite this method requires many number of data set to obtain statistically guaranteed accuracy. In this study, as an effective method to include the 'good information' representing parameter into the VM model, PI parameters are introduced and applied for the etch rate prediction. By the adoption of PI parameters of b-, q-factors and surface passivation parameters as PCs into the PCR based VM model, information about the reactions in the plasma volume, surface, and sheath regions can be efficiently included into the VM model; thus, the performance of VM is secured even for insufficient data set provided cases. For mass production data of 350 wafers, developed PI based VM (PI-VM) model was satisfied required prediction accuracy of industry in C4F8 plasma-assisted oxide etching process.

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승용차 현가모듈 설계를 위한 새로운 부싱모델 개발 (Development of a New Bushing Model for Vehicle Suspension Module Design)

  • 옥진규;박동운;유완석;손정현
    • 한국자동차공학회논문집
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    • 제14권6호
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    • pp.143-150
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    • 2006
  • In this paper, a new bushing model for vehicle dynamics analysis using Bouc-Wen hysteretic model is proposed. Bushing components of a vehicle suspension system are tested to capture the nonlinear behavior of rubber bushing elements using the MTS 3-axes rubber test machine. The results of the tests are used to define parameters in Bouc-Wen bushing model, which was employed to represent the hysteretic characteristics of the bushing. Bushing parameters are obtained by using genetic algorithms and sensitivity analysis of parameters are also carried out. ADAMS program was used for the identification process and VisualDOC program was employed to find the optimal parameters. A half-car simulation was carried out to show the usefulness of the developed bushing model.

강우 유출사상을 통한 Clark 모형의 매개변수 평가 (Estimation of the Parameters for the Clark Model through the Rainfall-Runoff Events)

  • 안태진;백천우;김민혁;최광훈;강인웅
    • 한국수자원학회:학술대회논문집
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    • 한국수자원학회 2006년도 학술발표회 논문집
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    • pp.770-774
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    • 2006
  • The determination of feasible design flood is the most important to control flood damage in river management. Model parameters should be calibrated using observed discharge but due to deficiency of observed data the parameters have been adopted by engineer's empirical sense. Storage coefficient in the Clark unit hydrograph method mainly affects magnitude of peak flood. This study is to estimate the storage coefficients based on the observed rainfall-runoff events at the four stage stations in the Hantan river basin. Model calibration is the process of adjusting model parameter values until model results match historical data. An objective function which is the percent difference between the observed and computed peak flows is available for measuring the goodness-of-fit between computed and observed hydrographs. By sensitivity analysis for the storage coefficient, it has been shown that the storage coefficients affect the peak flows. The Clark parameters adopted in the River Rectification Basic Plan have been estimated through an iterative process designed to produce a hydrograph with the peak flow.

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Modeling of a Building System and its Parameter Identification

  • Park, Herie;Martaj, Nadia;Ruellan, Marie;Bennacer, Rachid;Monmasson, Eric
    • Journal of Electrical Engineering and Technology
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    • 제8권5호
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    • pp.975-983
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    • 2013
  • This study proposes a low order dynamic model of a building system in order to predict thermal behavior within a building and its energy consumption. The building system includes a thermally well-insulated room and an electric heater. It is modeled by a second order lumped RC thermal network based on the thermal-electrical analogy. In order to identify unknown parameters of the model, an experimental procedure is firstly detailed. Then, the different linear parametric models (ARMA, ARX, ARMAX, BJ, and OE models) are recalled. The parameters of the parametric models are obtained by the least square approach. The obtained parameters are interpreted to the parameters of the physically based model in accordance with their relationship. Afterwards, the obtained models are implemented in Matlab/Simulink(R) and are evaluated by the mean of the sum of absolute error (MAE) and the mean of the sum of square error (MSE) with the variable of indoor temperature of the room. Quantities of electrical energy and converted thermal energy are also compared. This study will permit a further study on Model Predictive Control adapting to the proposed model in order to reduce energy consumption of the building.

효율적인 대각보강 콘크리트 연결보의 이력거동 예측 (Efficient Simulation of Hysteretic Behavior of Diagonally Reinforced Concrete Coupling Beams)

  • 고혜영;한상환;이창석
    • 한국지진공학회논문집
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    • 제22권2호
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    • pp.95-101
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    • 2018
  • Diagonally reinforced concrete coupling beams (DRCB) play an important role in coupled shear wall systems since these elements dissipate most of seismic input energy under earthquake loading. For reliable seismic performance evaluation using nonlinear response history analysis, it is important to use an accurate analytical model for DRCBs. In this study, the Pinching4 model is used as a base model to simulate the cyclic behavior of DRCBs. For simulating the cyclic behavior of DRCBs using the Pinching4 model, the analytical parameters for backbone curve, pinching and cyclic deterioration in strength and stiffness should be computed. To determine the proper values of the constituent analytical parameters efficiently and accurately, this study proposes the empirical equations for the analytical parameters using regression analyses. It is shown that the hysteretic behavior of coupling beams can be simulated efficiently and accurately using the proposed numerical model with the proposed empirical equations of model parameters.

펄스응답에 의한 저차 이산시간 모델의 식별 (Identification of Discrete-Time Low-Order Model from Pulse Response)

  • 황지호;차승표;김영철
    • 전기학회논문지
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    • 제67권8호
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    • pp.1062-1070
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    • 2018
  • This paper presents a simple identification method for discrete-time low-order model of unknown delay process from pulse response. The key idea is to find the parameters of the model such that the first N moments of the unknown process and the model are equal. We first show that the k-th moment of a process can be determined by the moments of the input and output. The parameters and delay are estimated separately. It is shown that for a given delay, the parameters of the low-order model can be determined by solving linear equations in a matrix form. Delay of the model is estimated such that the integral of the absolute errors (IAE) of the candidate models with possible delays minimizes. The illustrative example shows that the proposed method can directly identify low-order models without order reduction process from a single pulse response.

Development of Full ice-cream cone model for HCME 3-D parameters

  • Na, Hyeonock;Moon, Yong-Jae;Lee, Harim
    • 천문학회보
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    • 제41권1호
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    • pp.47.1-47.1
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    • 2016
  • The determination of three dimensional parameters (e.g., radial speed, angular width, source location) of Coronal Mass Ejections (CMEs) is very important for space weather forecast. To estimate these parameters, several cone models based on a flat cone or a shallow ice-cream cone with spherical front have been suggested. In this study, we investigate which cone model is proper for halo CME morphology using 26 CMEs which are identified as halo CMEs by one spacecraft (SOHO or STEREO-A or B) and as limb CMEs by the other ones. From geometrical parameters of these CMEs such as their front curvature, we find that near full ice-cream cone CMEs are dominant over shallow ice-cream cone CMEs. Thus we develop a new full ice-cream cone model by assuming that a full ice-cream cone consists of many flat cones with different heights and angular widths. This model is carried out by the following steps: (1) construct a cone for given height and angular width, (2) project the cone onto the sky plane, (3) select points comprising the outer boundary, (4) minimize the difference between the estimated projection speeds with the observed ones. We apply this model to 12 SOHO halo CMEs and compare the results with those from other stereoscopic methods (a geometrical triangulation method and a Graduated Cylindrical Shell model) based on multi-spacecraft data.

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유역을 대표하는 Horton 침투 모형내 매개변수의 최적 결정 (Optimal Determination of the Parameters Representative of a Basin in the Horton's Infiltration Model)

  • 유주환
    • 한국수자원학회논문집
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    • 제39권11호
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    • pp.977-984
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    • 2006
  • 최적화 방법을 이용하여 대표적 침투 모형으로 잘 알려진 Horton모형의 최적 매개변수를 결정하였다. Horton침투 모형내 초기 침투능은 10일 단위 선행 강수량과 선형 조합의 관계를 갖는다고 가정하였다. 그리고 종기 침투능과 감쇄지수 값은 유역내 하나의 대표치로 결정하였다. 이렇게 하여 유역을 대표하는 모형의 매개변수 최적치를 얻었고 호우 사상별로 Horton의 침투식을 결정하였다. 본 연구에서 적용한 10개의 호우 자료는 임진강 내에 있고 배수 면적이 $8.5km^2$되는 설마천 시험 유역내 전적비교 지점에서 관측된 것이다.

사영에 의한 모수모형의 추정가능함수 (Estimable functions of fixed-effects model by projections)

  • 최재성
    • Journal of the Korean Data and Information Science Society
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    • 제23권3호
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    • pp.487-494
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    • 2012
  • 본 논문은 고정효과모형의 모수추정과 관련된 추정가능함수를 다루고 있다. 고정효과모형에서 추정가능한 모수들의 함수를 구하기 위한 방법으로 가우스-조르단 방법을 이용하고 있다. 이 방법으로 구해진 추정가능함수의 일반형을 이용하여 추정가능함수들의 한 기저집합을 구성하는 문제를 다루고 있다. 또한, 추정가능함수들로 구성된 한 기저집합을 모수벡터로 갖는 모형은 완전계수의 열행렬을 모형행렬로 갖는 모형으로 효과모형과 동치인 모형임을 보여주고 있다. 두 모형에서의 사영행렬들은 동일공간으로의 사영을 나타내므로 총변동량은 변함이 없으나 사영행렬에 따른 자유도 1인 고유벡터로의 변동량은 달라질 수 있음을 논의하고 있다.

부분최소제곱법 모델의 파라미터 추정을 이용한 화학공정의 이상진단 모델 개발 (The Development of a Fault Diagnosis Model based on the Parameter Estimations of Partial Least Square Models)

  • 이광오;이창준
    • 한국안전학회지
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    • 제34권4호
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    • pp.59-67
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    • 2019
  • Since it is really hard to construct process models based on prior process knowledges, various statistical approaches have been employed to build fault diagnosis models. However, the crucial drawback of these approaches is that the solutions may vary according to the fault magnitude, even if the same fault occurs. In this study, the parameter monitoring approach is suggested. When a fault occurs in a chemical process, this leads to trigger the change of a process model and the monitoring parameters of process models is able to provide the efficient fault diagnosis model. A few important variables are selected and their predictive models are constructed by partial least square (PLS) method. The Euclidean norms of parameters of PLS models are estimated and a fault diagnosis can be performed as comparing with parameters of PLS models based on normal operational conditions. To improve the monitoring performance, cumulative summation (CUSUM) control chart is employed and the changes of model parameters are recorded to identify the type of an unknown fault. To verify the efficacy of the proposed model, Tennessee Eastman (TE) process is tested and this model can be easily applied to other complex processes.