• 제목/요약/키워드: Mo electrode

검색결과 236건 처리시간 0.029초

금속기판에서 재결정화된 규소 박막 트랜지스터 (Recrystallized poly-Si TFTs on metal substrate)

  • 이준신
    • E2M - 전기 전자와 첨단 소재
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    • 제9권1호
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    • pp.30-37
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    • 1996
  • Previously, crystallization of a-Si:H films on glass substrates were limited to anneal temperature below 600.deg. C, over 10 hours to avoid glass shrinkage. Our study indicates that the crystallization is strongly influenced by anneal temperature and weakly affected by anneal duration time. Because of the high temperature process and nonconducting substrate requirements for poly-Si TFTs, the employed substrates were limited to quartz, sapphire, and oxidized Si wafer. We report on poly-Si TFT's using high temperature anneal on a Si:H/Mo structures. The metal Mo substrate was stable enough to allow 1000.deg. C anneal. A novel TFT fabrication was achieved by using part of the Mo substrate as drain and source ohmic contact electrode. The as-grown a-Si:H TFT was compared to anneal treated poly-Si TFT'S. Defect induced trap states of TFT's were examined using the thermally stimulated current (TSC) method. In some case, the poly-Si grain boundaries were passivated by hydrogen. A-SI:H and poly-Si TFT characteristics were investigated using an inverted staggered type TFT. The poly -Si films were achieved by various anneal techniques; isothermal, RTA, and excimer laser anneal. The TFT on as grown a-Si:H exhibited a low field effect mobility, transconductance, and high gate threshold voltage. Some films were annealed at temperatures from 200 to >$1000^{\circ}C$ The TFT on poly-Si showed an improved $I_on$$I_off$ ratio of $10_6$, reduced gate threshold voltage, and increased field effect mobility by three orders. Inverter operation was examined to verify logic circuit application using the poly Si TFTs.

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Transparent Conducting Ga-doped ZnO Thin Film for Flat-Panel Displays with a Sol-gel Spin Coating

  • Nam, Gil-Mo;Kwon, Myoung-Seok
    • Journal of Information Display
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    • 제9권3호
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    • pp.8-11
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    • 2008
  • A novel non-alkoxide sol-gel process for synthesizing Ga-doped ZnO thin film on glass was derived for possible use as a transparent electrode in flat-panel displays, using zinc acetate dehydrate as the starting material. The structural and electrical properties of thin films have been characterized as functions of Ga addition and post-heat-treatments. Their carrier density, Hall mobility, and optical transmittance were measured and discussed herein to explain the characteristics of the sol-gel-derived Ga-doped ZnO thin film on glass.

Doctor blade를 이용한 용액형 CIGS 균일 코팅에 관한 연구 (A Study of CIGS Coated Thin-Film Layer using Doctor Blade Process)

  • 유종수;윤성만;김도진;조정대
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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    • pp.93.2-93.2
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    • 2010
  • Recently, printing and coating technologies application fields have been expanded to the energy field such as solar cell. One of the main reasons, why many researchers have been interested in printing technology as a manufacturing method, is the reduction of manufacturing cost. In this paper, We fabricated CIGS solar cell thin film layer by doctor blade methods using synthesis of CIS precursor nanoparticles ink on molybdenum (Mo) coated soda-lime glass substrate. Synthesis CIS precursor nanoparticles ink fabrication was mixed Cu, In, Se powder and Ethylenediamine, using microwave and centrifuging. Using multi coating process as we could easily fabrication a fine flatness CIS thin-film layer ($0.7{\sim}1.35{\mu}m$), and reduce a manufacture cost and process steps. Also if we use printing and coating method and solution process in each layer of CIGS solar cell (electrode, buffer), it is possible to fabricate all printed thin-film solar cell.

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Fabrication of ZnO inorganic thin films by using UV-enhanced Atomic Layer Deposition

  • 송종수;윤홍로;성명모
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.312.1-312.1
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    • 2016
  • We have deposited ZnO thin films by ultraviolet (UV) enhanced atomic layer deposition using diethylznic (DEZ) and water (H2O) as precursors with UV light. The atomic layer deposition relies on alternating dose of the precursor on the surface and subsequent chemisorption of the precursors with self-limiting growth mechanism. Though ALD is useful to deposition conformal and precise thin film, the surface reactions of the atomic layer deposition are not completed at low temperature in many cases. In this experiment, we focused on the effects of UV radiation during the ALD process on the properties of the inorganic thin films. The surface reactions were found to be complementary enough to yield uniform inorganic thin films and fully react between DEZ and H2O at the low temperature by using UV irradiation. The UV light was effective to obtain conductive ZnO film. And the stability of TFT with UV-enhanced ZnO was improved than ZnO by thermal ALD method. High conductive UV-enhanced ZnO film have the potential to applicability of the transparent electrode.

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자동차용 강판의 4겹 다층 점용접물의 용접특성 평가 (An Evaluation of the Weldability Characteristics on the 4 Lap Spot Welded Joint of Structural Steel Sheets in Automobile)

  • 김회현;김성수;백승세;권일현;양성모;유효선
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 추계학술대회
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    • pp.314-318
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    • 2004
  • This research is conducted to investigate weldability characteristics with various welding conditions on the 4 lap spot welded joint of structural steel sheets in automobile. The relationship between the tensile-shear strength and the indentation depth has been investigated to evaluate the weldability and the optimum welding conditions. The welding current and the welding time have a greatly affect to the tensile-shear strength compared to the electrode force. It was found that the indentation depth has a relatively close relationship with the expulsion occurrence. The optimum welding conditions were proposed for the 4 lap spot welded joint.

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STS430 기판을 이용한 Flexible CIGS 박막 태양전지 제조 (Fabrication of Flexible CIGS thin film solar cells using STS430 substrate)

  • 정승철;안세진;윤재호;윤경훈
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2008년도 춘계학술대회 논문집
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    • pp.436-437
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    • 2008
  • Flexible CIGS thin film solar cell was fabricated using STS430 plate as a flexible substrate in this work. A diffusion barrier layer of $SiO_2$ thin film was deposited on STS430 substrate by PECVD followed by deposition of double layered Mo back contact. After depositing CIGS absorber layer by co-evaporation, CdS buffer layer by chemical bath deposition, ZnO window layer by RF sputtering and Al electrode by thermal evaporation, the solar cell fabrication processes were completed and its performance was evaluated. Corresponding solar cell showed an conversion efficiency of 8.35 % with $V_{OC}$ of 0.52 V, $J_{SC}$ of 26.06 mA/$cm^2$ and FF of 0.61.

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저온 화학기상증착법 및 급속가열 공정을 이용한 그래핀의 합성 (Graphene Synthesis by Low Temperature Chemical Vapor Deposition and Rapid Thermal Anneal)

  • 임성규;문정훈;이희덕;유정호;양준모;왕진석
    • 한국전기전자재료학회논문지
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    • 제22권12호
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    • pp.1095-1099
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    • 2009
  • As a substitute material for silicon, we synthesized few layer graphene (FLG) by CVD process with a 300-nm-thick nickel film deposited on the silicon substrate and found out the lowest temperature for graphene synthesis. Raman spectroscopy study showed that the D peak (wave length : ${\sim}1,350\;cm^{-1}$) of graphene was minimized and then the 2D one (wave length : ${sim}2,700\;cm^{-1}$) appeared when rapid thermal anneal is carried out with the $C_2H_2$ treated nickel film. This study demonstrates that a high quality FLG formed at a low temperature of $400^{\circ}C$ is applicable as CMOS devices and transparent electrode materials.

항공기 동력원으로 연료전지시스템 적용시 고려사항 고찰 (Study of Fuel Cell System for Aerial Vehicles)

  • 구영모;김명환;유승을
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2011년도 제37회 추계학술대회논문집
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    • pp.683-684
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    • 2011
  • 연료전지시스템을 항공기 동력원으로 사용하기 위해서는 요구되는 출력에 필요한 스택성능과 한정된 부피 내 연료전지시스템을 탑재하기 위한 운전장치 구성, 그리고 무게를 최소화하기 위한 부품 및 재료 선정이 필요하다. 스택의 기본성능은 MEA(Membrane electrode assembly)와 기체확산층 구조, 분리판 디자인 및 운전조건 등에 의해 결정된다. 스택의 기본성능은 연료전지시스템을 구성하는 운전장치 구성 및 성능에 의해 달라지기 때문에 어떠한 운전장치를 어떠한 구성으로 설계하는가에 따라서 성능이 변한다고 볼 수 있다. 본 연구에서는 연료전지시스템을 항공기 동력원으로 사용하기 위해서 고려되어야할 스택과 운전장치의 구성이 성능에 미치는 영향과 운전환경(스택 경사, 고도)이 연료전지 스택성능에 미치는 영향에 대해 고찰하였다.

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전기이중층 캐패시터의 특성에 미치는 혼성 도전재의 영향 (Effect of Conducting Composite on Characteristics of Electric Double Layer Capacitor)

  • 김익준;이선영;도칠훈;문성인;최성옥;손영모;김경호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.1140-1143
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    • 2002
  • This work describes the effect of conducting composite on the characteristics of electric double layer capacitor. The cell, which was fabricated with conducting composite consisted of 50 wt.% of SPB and 50 wt.% of VGCF, exhibits the higher specific capacitance, the lower resistance and the better rate capability than those of the cells fabricated with each single electronic conductor. These enhanced properties could be related with the dense structure of electrode.

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