Damages of Etched (Ba, Sr) $TiO_3$ Thin Films by Inductively Coupled Plasmas
(유도결합 플라즈마에 의한 (Ba,Sr)$TiO_3$ 박막의 식각 손상에 관한 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.14 no.10
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- pp.785-791
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- 2001