• 한국전기전자재료학회논문지
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• 제18권4호
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• pp.303-308
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• 2005

In this paper, the effects of oxidants on tungsten chemical mechanical polishing (CMP) process were investigated using three different oxidizers such as Fe(NO₃)₃, KIO₃ and H₂O₂. Moreover, the interaction between the tungsten film and the oxidizer was discussed by potentiodynamic polarization measurement with three different oxidizers, in order to compare the effects of W-CMP and electrochemical characteristics on the tungsten film as a function of oxidizer. As an experimental result, the tungsten removal rate reached a maximum at 5 wt％ Fe(NO₃)₃concentration, and when 5 wt％ H₂O₂was added in the slurry, the removal rate of W increased. Also, the microstructures of surface layer by atomic force microscopy(AFM) image were greatly influenced by the slurry chemical composition of oxidizers. It was shown that the surface roughness and removal rate of the polished surface were improved in Fe(NO₃)₃than KIO₃. The electrochemical results indicate that the corrosion current density of the 5 wt％ H₂O₂ and 5 wt％ H₂O/sub 2+/＋ 5 wt％ Fe(NO₃)₃was higher than the other oxidizers. Therefore, we conclude that the W-CMP characteristics are strongly dependent on the kinds of oxidizers and the amounts of oxidizer additive.

• 한국전기전자재료학회논문지
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• 제16권12S호
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• pp.1181-1186
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• 2003

Chemical Mechanical Polishing (CMP) is an essential dielectric planarization in multilayer microelectronic device fabrication. In the CMP process, it is necessary to minimize the extent of surface defect formation while maintaining good planarity and optimal material removal rates. The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on W passivation layer, in order to obtain higher removal rate (RR) and very low non-uniformity (NU %) during W-CMP process. In this paper, we compared the effects of oxidizer or W-CMP process with three different kind of oxidizers with 5 wt% hydrogen peroxide such as Fe(NO$_3$)$_3$, H$_2$O$_2$, and KIO$_3$. The difference in removal rate and roughness of W in stable and unstable slurries are believed to caused by modification in the mechanical behavior of Al$_2$O$_3$ particles in presence of surfactant stabilizing the slurry.

• 대한기계학회논문집B
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• 제21권1호
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• pp.99-112
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• 1997

Mixing process of impinging jets of liquid oxidizer and liquid fuel is simulated by using water and sodium carbonate (Na$_{2}$CO$_{3}$) solution. The shapes of liquid sheets are visualized and flowrate distributions are measured by collecting droplets using measuring cells. Mixing charateristics are studied by using acid-base titration. Stable liquid sheets are formed and two liquid jets are well mixed for symmetric impinging jets. Similarity in flowrate distribution for various measuring heights is observed. For asymmetric impinging jets, liquid sheets become unstable as the difference in the velocities of jets increases. In some extreme cases, liquid sheets are not formed and the jets are separated. Dimensionless variables are adopted demonstrating similarly in flowrate distribution. Mixing characteristics vary significantly with experiment conditions.

• 한국생물공학회:학술대회논문집
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• 한국생물공학회 2000년도 추계학술발표대회 및 bio-venture fair
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• pp.163-166
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• 2000

본 연구에서는 천연피혁제조공장에서 발생하는 대표적인 악취성분인 황화수소, 암모니아 및 benzene을 활성슬러지에서 획득한 혼합균주와 황산화균인 Thiobacillus sp.IW가 동시에 접종된 생물막반응기를 이용하여 효과적으로 제거하고자 하였다. Benzene의 경우 단일 및 복합성분의 악취에 대해 90%의 제거효율을 유지하였고, 암모니아는 99%의 아주 우수한 제거효율을 나타내었으나, 황화수소의 경우 처리효율은 85%정도로 다른 성분에 비해 낮았다.

• 한국연소학회:학술대회논문집
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• 대한연소학회 2003년도 제27회 KOSCO SYMPOSIUM 논문집
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• pp.153-157
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• 2003

Supersonic and hypersonic aircrafts must pass wide range of speed to reach high speed region. But for existing engines the most efficient operating speed ranges are decided according to their flying speed, so an engine which mixes several engines like TRJ (Turbo Ramjet) and ARJ (Air Turbo Ramjet) has been planed. This mixed type engine has inefficiency that more than two engines must be installed simultaneously, but the pulse detonation engine (PDE) that uses detonation wave has a strong point that it can operate in all speed range with single engine. This paper deals with the simulation of the pulse detonation engine which uses hydrogen peroxide $(H_2O_2)$ mono propellant. Hydrogen peroxide is low-cost propellant, and it is reacted without oxidizer. Comparison between $H_2-O_2$ mixture with $H_2O_2$ mono propellant about thrust, pressure, temperature and velocity shows that $H_2O_2$ is a very useful propellant.

• 한국연소학회지
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• 제22권3호
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• pp.23-28
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• 2017

The fuel and oxidizer mixing process in the shock tube driven section is simulated numerically. The boundary condition is set based on an shock tube experimental condition. The objective is to predict the gas mixing time for experiments. In the experiment, the amount of fuel to be injected is determined in advance. Then, according to duration of fuel injection, 5 cases with the same fuel mass but different fuel mass flow rate are simulated. After fuel is injected into the driven section, the fuel and air will be mixed with each other through convection and diffusion processes. The mixing time is predicted numerically for experiments.

• 한국추진공학회지
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• 제16권6호
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• pp.9-15
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• 2012

추력변화를 초공동 수중운동체의 추진체로 사용되는 수반응성 금속입자와 해수는 연소챔버 내에서 균질하게 혼합될 때 비추력이 극대화 된다. 본 연구의 목적은 상사성의 관점에서 분사기 형상이 입자 분포에 미치는 영향을 알아보는 것이다. 이를 위해 PIV기법을 이용하여 반경방향의 입자 분포와 입자 평균속도의 상사성에 대하여 알아보았다.

• Transactions on Electrical and Electronic Materials
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• 제7권3호
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• pp.108-111
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• 2006

The oxidizer-induced corrosion state and microstructure of surface passive metal-oxide layer greatly influenced on the removal rate of tungsten film according to the slurry chemical composition of different mixed oxidizers. In this paper, the actual polishing mechanism and pH-potential equilibrium diagram obtained from potentiodynamic polarization curve were electrochemically compared. An electrochemical corrosion effect implies that slurries with the highest removal rate (RR) have the high dissolution rate.

• 한국패션뷰티학회지
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• 제2권3호
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• pp.68-73
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• 2004

The purpose of this study was to review the changes of hair colors by means of powder decolorant and oxidizers. For this purpose, a questionnaire survey on uses of powder decolorant and oxidizers was conducted, and the collected data thereby were analyzed. This study was concluded as follows; First, it was confirmed that when the hydrogen peroxide was used alone, the hair color was not changed however its concentration was high. Second, when powder decolorant and hydrogen peroxide were mixed at the ratio of 1:2, it was found that the higher the concentration of hydrogen peroxide was, hair color was changed more. Third, it was confirmed that the hair color became brighter when hairs were decolored three times serially. Fourth, it was found that hairs became tougher when the concentration of hydrogen peroxide was higher and when hairs were decolored many times serially.

• 대한환경공학회지
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• 제27권2호
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• pp.138-144
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• 2005

본 연구는 질화작용에 관여하는 Nitrosomonas sp. 등의 암모니아산화세균과 Nitrobacter sp. 등 아질산산화세균이 $A^2/O$ Pilot 장치의 혐기조, 무산소조, 호기조에서 어떤 양상으로 변화하는지를 조사하는데 있다. 혼합액의 부유 질화세균군과 폐타이어로 성형 제조된 입상담체에 부착된 질화세균군은 FISH법으로 분석하였다. Pilot 장치의 질산화속도는 $1.97{\sim}2.98mg\;N/g\;MLVSS{\cdot}hr$의 값을 보였다. 각 반응조에서 총 부유 세균수중 암모니아 산화세균군 (NSO로 검출된 세균군)이 차지하는 비율은 호기조 < 무산소조 < 혐기조 순이었으나, 이와 반대로 아질산 산화세균(NIT로 검출된 세균)이 차지하는 비율은 혐기조 < 무산소조 < 호기조 순이었다. 생물막의 두께와 건조밀도 및 담체 무게당 부착된 미생물량은 각각 $180{\sim}188\;{\mu}m$, $38.5{\sim}43.9\;mg/cm^3$, $29.4{\sim}32.5\;mg/g$ 이었고, 담체에 부착된 총세균수 중 질화세균이 차지하는 비율은 NSO(3.2%)와 NIT(2.8%)가 거의 비슷하였으나, 각 반응조에 존재하는 부유성 질화세균, 즉 NSO($22.8{\sim}28.4%$)와 NIT($17{\sim}26%$)에 비해서는 부착성 질산화 세균의 비가 현저히 낮았다.