• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.6
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• pp.1515-1522
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• 1990

Ultra precision cutting should be satisfied with two conditions of Mirror Like and shape grade, and especially Mirror Like depends on surface roughness. In this study, in order to develop Mirror Cutting for Al alloy, this was done with edge form of single crystal diamond tool divided into R type and S type. Surface roughness machined by S type tool is more satisfactory than by R type tool, being the lowest value of 13.8nm. In addition, Mirror surface can reach above 90% of reflection rate by both R type and S type tool, but machined surface by R type tool has much more fine fracture portions rather than by S type tool. Even though feed rate decreases from 5.mu.m to 1.mu.m, surface roughness doesn't show improvement.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.58-64
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some finding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipment with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6 nm in Ra.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.946-949
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• 2001

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some grinding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametral silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpiece are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipped with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6nm in Ra.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.12
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• pp.2962-2969
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• 1993

Recently, a study on the mirror-like surface grinding of brittle materials is active and as branch of these study, new dressing method for superabrasive wheel, electrolytic inprocess dressing(Elid) was developed. Using Elid, the mirror-like surface of brittle material can be generated without polishing or lapping process. In the future, Elid grinding will take important place in industry. But so far the analysis on Elid grinding was not quantitative but qualitative. In this study, The purpose is the quantitative analysis on Elid grinding by computer simulation, For computer simulation, the mean and the variance of the abrasive distribution were measured by tracing of the grinding wheel with stylus in transverse direction in the case of respective dressing current condition. This measurement result in a density distribution of abrasive by mathematical formulation using statistical method. The prediction of the surface roughness in Elid grinding was based on this density distribution.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.03a
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• pp.59-64
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• 1998

We need to achieve th mass product through methods of higher efficient, higher precise manufacturing process than those of existing precision abrasive machining. Thus, this study is to develop mirror-like surface machining technique of outer diameter of the piston pin by the compound magneto-electrolytic abrasive polishing system. The procedure of machining is followed as first, fulfill the pre-processing by cylindrical grinder, second, complete mirror-like surface by the method of magneto-electrolytic abrasive polishing used CBN non-woven abrasive pads. In this study, it was found that the best suitable conditions of mirror-like surface polishing were that the electrode density was 0.1A/$\textrm{cm}^2$, the applied pressure 1.5kgf/$\textrm{cm}^2$, the feed rate 0.5mm/rev, and the rotoation velocity of workpiece 80rpm, and that the surface roughness was reduced in this conditions.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.660-665
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of grinding wheel in the in-feed machining method. In this study, grinding experiments by the rotary surface grinding machine with straight type wheels ware conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding n/c equipment with an ELID wit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2 - 6 nm in Ra.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.94-101
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• 2004

From the Beckmann's reflection model of wave incident, reflected light from a surface is known to have not only specular but also diffuse components. The specular component dominant a surface for a mirror-like surface is distributed on the almost the same area as the spot on the surface, but the diffuse component region dominant f3r a rough surface spreads scattered on the larger areas than the spot. Therefore, statistic parameters from the scattered light distribution are more meaningful in the diffuse region, while the magnitude of rather meaning in the specular region. In usual, there need two sensors to acquire two kinds of information: Photo-detector for light intensity magnitude and image sensor for light intensity distribution. But dual sensor scheme requires a beam splitter usually to feed light to each sensor, and moreover there is not a combination rule to relieve the different sensor characteristics. In this study a new method is proposed for acquisition of the dual information using only an image sensor. Specular region is established on an image area being distinguished from a diffuse component, and laser power is adjusted so that no pixel of the image sensor in the specular region is saturated. Simulation based on the light reflection theory and the experimental results are quite well matched, and thus the proposed method was proved to be very useful for mirror-like surface measurement.

• Journal of the Korean Ceramic Society
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• v.47 no.4
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• pp.290-295
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• 2010

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.6
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• pp.1486-1496
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• 1993

The diamond wheel with superabrasive is required for mirror-like surface grinding of brittle materials. But the conventional dressing mothod can not apply to the diamond wheel with superabrasive. Recently electrolytic dressing method was developed for cast-iron bonded diamond wheel with superabrasive. This technique can take replace of lapping and polishing. Using the electrolytic dressing, the surface roughness of workpiece was improved largely and grinding force was very low and the continuity of the grinding force was also very improved. In this study, the purpose is the realization of mirror-like surface grinding of ferrite with electrolytic dressing of metal bonded diamond wheel. For application of ultraprecision grinding for brittle material, superabrasive wheel, air spindle and inprocess electrolytic dressing were used. In addition, the effects of pick current and pulse width on ground surface were investigated, and the suitable dressing conditions for ferrite were found out.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1881-1884
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• 2003

Diamond turning machines have, been used for the processing of surface like a mirror with the control scheme of minimizing shape error, Ultra-precision diamond fuming is applied to produce highly precision optical components required not only a high machining accuracy but also a good surface roughness. Al-6061 is widely used as optical parts such as laser reflector's mirror or multimedia instrument. In this study, thermal-imaged Al flat mirrors are fabricated by SPDT. The surface roughness 3.472 nm Ra, power 2 fringe(at 632.8 nm) and irregularity 1 fringe(at 632.8 nm) for form waviness of thermal-imaged Al flat mirror are very satisfied to the required specification in industry.