• 대한기계학회논문집
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• 제14권6호
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• pp.1515-1522
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• 1990

본 연구에서는 천연다이아몬드의 인선형상을 R형과 S형으로 구분하여 제작하 고 미세이송과 절삭속도 변화를 주어 이에 얻어지는 표현거칠기, 칩 생성기구 및 경면 성을 검토하였다.

• 한국공작기계학회논문집
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• 제11권5호
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• pp.58-64
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some finding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipment with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6 nm in Ra.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.946-949
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• 2001

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some grinding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametral silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpiece are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipped with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6nm in Ra.

• 대한기계학회논문집
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• 제17권12호
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• pp.2962-2969
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• 1993

Recently, a study on the mirror-like surface grinding of brittle materials is active and as branch of these study, new dressing method for superabrasive wheel, electrolytic inprocess dressing(Elid) was developed. Using Elid, the mirror-like surface of brittle material can be generated without polishing or lapping process. In the future, Elid grinding will take important place in industry. But so far the analysis on Elid grinding was not quantitative but qualitative. In this study, The purpose is the quantitative analysis on Elid grinding by computer simulation, For computer simulation, the mean and the variance of the abrasive distribution were measured by tracing of the grinding wheel with stylus in transverse direction in the case of respective dressing current condition. This measurement result in a density distribution of abrasive by mathematical formulation using statistical method. The prediction of the surface roughness in Elid grinding was based on this density distribution.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1998년도 춘계학술대회 논문집
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• pp.59-64
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• 1998

We need to achieve th mass product through methods of higher efficient, higher precise manufacturing process than those of existing precision abrasive machining. Thus, this study is to develop mirror-like surface machining technique of outer diameter of the piston pin by the compound magneto-electrolytic abrasive polishing system. The procedure of machining is followed as first, fulfill the pre-processing by cylindrical grinder, second, complete mirror-like surface by the method of magneto-electrolytic abrasive polishing used CBN non-woven abrasive pads. In this study, it was found that the best suitable conditions of mirror-like surface polishing were that the electrode density was 0.1A/$\textrm{cm}^2$, the applied pressure 1.5kgf/$\textrm{cm}^2$, the feed rate 0.5mm/rev, and the rotoation velocity of workpiece 80rpm, and that the surface roughness was reduced in this conditions.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.660-665
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of grinding wheel in the in-feed machining method. In this study, grinding experiments by the rotary surface grinding machine with straight type wheels ware conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding n/c equipment with an ELID wit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2 - 6 nm in Ra.

• 한국정밀공학회지
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• 제21권6호
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• pp.94-101
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• 2004

From the Beckmann's reflection model of wave incident, reflected light from a surface is known to have not only specular but also diffuse components. The specular component dominant a surface for a mirror-like surface is distributed on the almost the same area as the spot on the surface, but the diffuse component region dominant f3r a rough surface spreads scattered on the larger areas than the spot. Therefore, statistic parameters from the scattered light distribution are more meaningful in the diffuse region, while the magnitude of rather meaning in the specular region. In usual, there need two sensors to acquire two kinds of information: Photo-detector for light intensity magnitude and image sensor for light intensity distribution. But dual sensor scheme requires a beam splitter usually to feed light to each sensor, and moreover there is not a combination rule to relieve the different sensor characteristics. In this study a new method is proposed for acquisition of the dual information using only an image sensor. Specular region is established on an image area being distinguished from a diffuse component, and laser power is adjusted so that no pixel of the image sensor in the specular region is saturated. Simulation based on the light reflection theory and the experimental results are quite well matched, and thus the proposed method was proved to be very useful for mirror-like surface measurement.

• 한국세라믹학회지
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• 제47권4호
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• pp.290-295
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• 2010

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system.

• 대한기계학회논문집
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• 제17권6호
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• pp.1486-1496
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• 1993

본 연구에서는 새로운 연속 전해드레싱 시스템을 구축하고 현재 전자재료로 널리 사용되고 있는 훼라이트에 대하여, 경면연삭을 실현하기 위한 제반 연삭조건 즉, 전해액의 영향, 파크전류와 펄스폭의 영향, 전해드레싱과 취성파괴와의 관계 등을 규명하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1881-1884
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• 2003

Diamond turning machines have, been used for the processing of surface like a mirror with the control scheme of minimizing shape error, Ultra-precision diamond fuming is applied to produce highly precision optical components required not only a high machining accuracy but also a good surface roughness. Al-6061 is widely used as optical parts such as laser reflector's mirror or multimedia instrument. In this study, thermal-imaged Al flat mirrors are fabricated by SPDT. The surface roughness 3.472 nm Ra, power 2 fringe(at 632.8 nm) and irregularity 1 fringe(at 632.8 nm) for form waviness of thermal-imaged Al flat mirror are very satisfied to the required specification in industry.