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Estimation of Specular Light Power by Adjusting Incident Laser Power for Measuring Mirror-Like Surface Roughness  

서영호 (부산대원 지능기계공학과)
김주년 (부산대원 지능기계공학)
안중환 (부산대학교 기계공학부)
Publication Information
Abstract
From the Beckmann's reflection model of wave incident, reflected light from a surface is known to have not only specular but also diffuse components. The specular component dominant a surface for a mirror-like surface is distributed on the almost the same area as the spot on the surface, but the diffuse component region dominant f3r a rough surface spreads scattered on the larger areas than the spot. Therefore, statistic parameters from the scattered light distribution are more meaningful in the diffuse region, while the magnitude of rather meaning in the specular region. In usual, there need two sensors to acquire two kinds of information: Photo-detector for light intensity magnitude and image sensor for light intensity distribution. But dual sensor scheme requires a beam splitter usually to feed light to each sensor, and moreover there is not a combination rule to relieve the different sensor characteristics. In this study a new method is proposed for acquisition of the dual information using only an image sensor. Specular region is established on an image area being distinguished from a diffuse component, and laser power is adjusted so that no pixel of the image sensor in the specular region is saturated. Simulation based on the light reflection theory and the experimental results are quite well matched, and thus the proposed method was proved to be very useful for mirror-like surface measurement.
Keywords
Surface roughness; Reflected beam; Specular region; Laser power; Image sensor;
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Times Cited By KSCI : 3  (Citation Analysis)
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1 Yim, D.Y., Kim, S.W., 'Optical roughness measurement of ground surface by light scattering,' Int. J. Mach. Tools Manufact, Vol. 30, No. 2, pp. 283-289, 1990   DOI   ScienceOn
2 Beckmann, P., Spizzichino, A., 'The scattering of electromagnetic waves from rough surfaces,' Pergamon press, Oxford, 1963
3 Nayar, Shree, K., Ikeuchi, Katsushi, Kanade, Takeo, 'Surface Reflection: Physical and Geometrical Perspectives,' IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 13, No. 7, pp. 611-634, July 1991   DOI   ScienceOn
4 Shen, Yun Feng, Lim, Han Seouk, Kim, Hwa Young, Ahn, Jung Hwan, 'A study on roughness measurement of polished surfaces using reflected laser beam image,' Journal of the Korean Society of Precision Engineering, Vol. 16, No. 2, pp.145-152, 1999   과학기술학회마을
5 HARADA, Hiroshi, NAKAJIMA, Hideki, YAMAGUCHI, Teruo, NODA, Atsuhiko, 'Optical Sensing of Surface Roughness for Polishing Robot ($3^{Rd}$ Report),' Japan society of precision engineering Vol. 68, No. 11, pp. 962-966, 2002
6 TAKAHASHI, Satoru, MIYOSHI, Takashi, TAKAYA, Yasuhiro and TATSUNO, Yasufumi, 'Study on In-Process measurment of silicon wafer surface defects by laser scattered defect pattern (2nd Report) - Fast defect measurment method using LSDP,' Japan society of precision engineering, Vol.68, No.7, pp. 1431-1435, 2002