• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.408-408
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• 2012

It is well known that magnetic random access memory (MRAM) is nonvolatile memory devices using ferromagnetic materials. MRAM has the merits such as fast access time, unlimited read/write endurance and nonvolatility. Although DRAM has many advantages containing high storage density, fast access time and low power consumption, it becomes volatile when the power is turned off. Owing to the attractive advantages of MRAM, MRAM is being spotlighted as an alternative device in the future. MRAM consists of magnetic tunnel junction (MTJ) stack and complementary metal- oxide semiconductor (CMOS). MTJ stacks are composed of various magnetic materials. FePt thin films are used as a pinned layer of MTJ stack. Up to date, an inductively coupled plasma reactive ion etching (ICPRIE) method of MTJ stacks showed better results in terms of etch rate and etch profile than any other methods such as ion milling, chemical assisted ion etching (CAIE), reactive ion etching (RIE). In order to improve etch profiles without redepositon, a better etching process of MTJ stack needs to be developed by using different etch gases and etch parameters. In this research, influences of $O_2$ gas on the etching characteristics of FePt thin films were investigated. FePt thin films were etched using ICPRIE in $CH_4/O_2/Ar$ gas mix. The etch rate and the etch selectivity were investigated in various $O_2$ concentrations. The etch profiles were studied in varying etch parameters such as coil rf power, dc-bias voltage, and gas pressure. TiN was employed as a hard mask. For observation etch profiles, field emission scanning electron microscopy (FESEM) was used.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.617-620
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• 1999

In this study, the polarization e(fecal and the birefringence effect of amorphous germanium (a-Ge) thin films were investigated by using linearly polarized He-Ne laser beam. The a-7e thin films were deposited on the quarts substrate by plasma enhanced chemical vapor deposition (PECVD) and thermal vacuum evaporation In order to obtain the optimum grating arrays, inorganci resists such as Si$_3$N$_4$ and a-Se$_{75}$ Ge$_{25}$ , were prepared with the optimized thickness by Monte Carlo (MC) simulation. As the results of MC simulation, the thickness ofa-Se$_{75}$ Ge$_{25}$ resist was determined with Z$_{min}$ of 360$\AA$ . The resists were exposed to Ga$^{+}$-FIB with accelerating energies of 50 keV, developed by wet etching, and a-Ge thin film was etched by reactive ion-etching (RIE). Finally, we were obtained grating arrays which grating width and linewidth are 0.8${\mu}{\textrm}{m}$, respectively and we studied the polarization and birefringence effect in transmission grating array made of high refractive amorphous material, and the applicability as waveplates and polarizers in optical device.e.e.

• The Journal of Advanced Prosthodontics
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• v.13 no.4
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• pp.258-267
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• 2021

PURPOSE. The purpose of this study was to compare the surface roughness, phase transformation, and surface topography of dental zirconia with three different yttrium oxide compositions under same grinding and polishing conditions. MATERIALS AND METHODS. Three zirconia disks (IPS e.max ZirCAD LT, MT, MT multi, Ivoclar Vivadent AG, Schaan, Liechtenstein) were selected for experimental materials. Sixty-nine bar-shaped specimens were fabricated as 12.0 × 6.0 × 4.0 mm using a milling machine and glazing was conducted on 12.0 × 6.0 mm surface by same operator. With a custom polishing device, 12.0 × 6.0 mm surfaces were polished under same condition. Surface roughness (Ra[㎛]) was measured before grinding (C), after grinding (G), and at every 3 steps of polishing (P1, P2, P3). X-ray diffraction and FE-SEM observation was conducted before grinding, after grinding, and after fine polishing (P3). Statistical analysis of surface roughness was performed using Kruskal-Wallis test and Mann-Whitney-U test was used as a post hoc test (α = .05). RESULTS. There were no significant differences of surface roughness between LT, MT, and MM groups. In LT, MT, and MM groups, P3 groups showed significantly lower surface roughness than C groups. X-ray diffraction showed grinding and polishing didn't lead to phase transformation on zirconia surface. In FE-SEM images, growths in grain size of zirconia were observed as yttrium oxide composition increases. CONCLUSION. Polished zirconia surface showed clinically acceptable surface roughness, but difference in yttrium oxide composition had no significant influence on the surface roughness. Therefore, in clinical situation, zirconia polishing burs could be used regardless of yttrium oxide composition.

• Journal of the Korean Magnetics Society
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• v.22 no.5
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• pp.173-177
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• 2012

The multilayer structure of glass/Ta(5.8 nm)/NiFe(5 nm)/Cu(t nm)/NiFe(3 nm)/FeMn(12 nm)/Ta(5.8 nm) as typical GMR-SV (giant magnetoresistance-spin valve) films is prepared by ion beam sputtering deposition (IBD). The coercivity and magnetoresiatance ratio are increased and decreased for the decrease of Cu thickness when the thickness of nonmagnetic Cu layer from is varied 2.2 nm to 3.0 nm. It means that the decrease of non-magntic layer is effected to the interlayer exchange coupling of pinned layer and the spin configuration array of free layer. For experiment of detecting and dropping of magnetic beads we used the GMR-SV sensor with glass/Ta/NiFe/Cu/NiFe/FeMn/Ta structure. From the comparison of before and after for the dropping status of magnetic bead, the variations of MR ratio, $H_{ex}$, and $H_c$ are showed 0.9 %, 3 Oe, and 2 Oe, respectively. The fabrication of GMR-SV sensor was included in the process of film deposition, photo-lithography, ion milling, and MR measurement. Further, GMR-SV device can be easily integrated so that detecting biosensor on a single chip becomes possible.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.299-299
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• 2007

후막형 무기 EL (electro-luminescence) 소자는 제조공정이 간단하고, 얇고, 가볍고, 유연한 동의 많은 장점들 때문에 휴대폰의 키패드 (key-pad) 및 광고용 back-light용으로 사용되고 있다. 이 무기 EL 소자는 비교적 손쉬운 스크린 프린팅 (screen-printing) 법으로 대면적을 제작할 수 있지만, LED (light emitting diode) 등과 비교하여 밝기가 낮아서 그 응용 분야가 제한되고 있다. EL 소자의 형광층은 전면 전극과 후면 전극 사이에 위치한다. EL은 이 형광층에 고 전기장이 걸릴 때, 전기장에 의해 가속된 전자가 형광층 내부에 첨가된 발광 중심의 전자를 여기시키고, 여기된 전자가 다시 바닥상태로 완화될 때 빛이 방출되는 현상이다. 즉, EL 소자는 이러한 전자 발광 현상을 이용한 소자로서, 전압 인가 시 발광 면 전체가 균일하게 발팡하는 평면 광원이다. 이러한 EL 소자에서 휘도의 증가는 후면 전극과 형광층 사이에 삽입되는 유전체 층의 특성과 밀접한 연관성이 있다. 본 연구에서는 고휘도 무기 EL 소자를 제작하기 위하여 이 유전체 층의 특성과 소자의 성능 사이의 관계를 알아보고자 하였다. 유전체 층에 사용하기 위해서 $BaTiO_3$-PVDF (polyvinylidene fluoride)의 복합체 필름을 제조하였다. 먼저 이 복합체 필름을 스크린 프린팅 (screen printing) 법으로 코팅하기 위한 페이스트 제작을 위해서, PVDF 수지를 용제에 녹였다. 그 다음, 일반 혼합기 및 삼단 롤밀 혼합기 (3-roll milling mixer) 등을 이용하여 $BaTiO_3$ 분말과 PVDF 용액을 다양한 비율로 혼합하여 페이스트를 제조하였다. ITO가 증착된 PET Film에 스크린 프린팅 법을 사용하여 형광층, 유전층, 배면 전극 등을 차례로 코팅하였다. $BaTiO_3$ (BT) 분말과 복합체 필름의 XRD 분석 결과, 분말 시료와 복합체 시료 모두 페로브스카이트 구조의 BT 회절선만 관찰되었다. 복합체의 단면 SEM 관찰에서는, BT 분말의 무게비가 증가할수록 더 치밀한 구조를 보여줌을 확인하였다. 또 EL소자의 유전상수와 휘도도 BT 분말의 혼합비가 증가할수록 증가하였다. 본 연구에서 제작한 무기 EL 소자의 최대 휘도는 약 $130\;cd/m^2$ 정도로 측정되었는데, 이는 휴대폰 키패드의 back-light용 광원으로 사용하기 충분하다고 판단되어진다.

• Journal of the Korean Academy of Esthetic Dentistry
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• v.30 no.2
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• pp.71-90
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• 2021

The virtual patient dataset is a collection of diagnostic data from various sources acquired from a single patient into a coordinate system of three-dimensional visualization. Virtual patient dataset makes it possible to establish a treatment plan, simulate various treatment procedures, and create a treatment planning delivery device. Clinicians can design and simulate a patient's smile on the virtual patient dataset and select the optimal result from the diagnostic process. The selected treatment plan can be delivered identically to the patient using manufacturing techniques such as 3D printing, milling, and injection molding. The delivery of this treatment plan can be linked to the final prosthesis through mockup confirmation through provisional restoration fabrication and delivery in the patient's mouth. In this way, if the diagnostic data superimposition and processing accuracy during the manufacturing process are guaranteed, 3D digital smile design simulated in 3D visualization can be accurately delivered to the real patient. As a clinical application method of the virtual patient dataset, we suggest a decision-making method that can exclude occlusal adjustment treatment from the treatment plan through the digital occlusal pressure analysis. A comparative analysis of whole-body scans before and after temporomandibular joint treatment was suggested for adolescent idiopathic scoliosis patients with temporomandibular joint disease. Occlusal plane and smile aesthetic analysis based on the virtual patient dataset was presented when treating patients with complete dentures.

• The Journal of Korean Academy of Prosthodontics
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• v.38 no.5
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• pp.583-594
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• 2000

Dislodgement of a crown or extension bridge and the loosening of a retainer of a bridge is a serious clinical problem in fixed restoration. Generally these problems are considered to be associated with deformation of the restoration. During biting, the restoration is subjected to complex forces and deforms considerably within the limit of its elasticity. Deformation of the restoration under the occlusal force induces excessive stress in the cement film, which then leads to the cement fracture. Such a fracture may eventually cause loss of the restoration. Because most of the past retention tests for full veneer crown were done without fatigue loading, they were not exactly simulating intraoral environment. And the purpose of this study was to evaluate the effect of cyclic cantilever loading on the retentive strength of full veneer crowns depending on different type of cements and taper of prepared abutment. Steel dies with $8^{\circ}\;or\;16^{\circ}$ convergence angle were fabricated through milling and crowns with the same method. These dies and crowns were divided into 8 groups. Group 1 : $16^{\circ}$ taper die, cementation with zinc phosphate cement, without loading Group 2 : $16^{\circ}$ taper die, cementation with zinc phosphate cement, with loading Group 3 : $8^{\circ}$ taper die, cementation with zinc phosphate cement, without loading Group 4 : $8^{\circ}$ taper die, cementation with zinc phosphate cement, with loading Group 5 : $16^{\circ}$ taper die, cementation with Panavia 21, without loading Group 6 : $16^{\circ}$ taper die, cementation with Panavia 21, with loading Group 7 : $8^{\circ}$ taper die, cementation with Panavia 21 without loading Group 8 : $8^{\circ}$ taper die, cementation with Panavia 21, with loading After checking the fit of die and crown, the luting surface of dies and inner surface of crowns were air-abraded for 10 seconds. The crowns were cemented to the dies, with cements mixed according to the manufacturer's recommendations. A static load of 5kg was then applied for 10 minutes with static loading device. Twenty-four hours later, group 1, 3, 5, 7 were only thermocycled, group 2, 4, 6, 8 were subjected to cyclic loading after thermocycling. Retentive tests were performed on the Instron machine. From the finding of this study, the following conclusions were obtained 1. Panavia 21 showed significantly higher retentive strength than zinc phosphate cement for all groups (p<0.05). 2. There was a significant difference in the retentive strength between $8^{\circ}\;and\;16^{\circ}$ taper for zinc phosphate cement(p<0.05), but no significant difference for Panavia 21 (p>0.05). 3. Cyclic loading significantly decreased the retentive strength for all groups(p<0.05). 4. For zinc phosphate cement, there was 35% reduction of the retentive strength after loading in the $16^{\circ}$ taper die, 25% in the $8^{\circ}$ taper die, and for Panavia 21, 21% in the $16^{\circ}$ taper die, 18% in the $8^{\circ}$ taper die.

• The Journal of Korean Academy of Prosthodontics
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• v.58 no.4
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• pp.313-320
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• 2020

Purpose: The purpose of this study was to evaluate the machining precision and the marginal and internal fit of single restorations fabricated with three types of lithium disilicate ceramic blocks and to evaluate the correlation. Materials and methods: Single restorations were designed using a CAD software program. The crown designed model file was extracted from the CAD software program. Three types of lithium disilicate blocks (Rosetta; HASS, IPS e.max CAD; Ivoclar vivadent, VITA Suprinity; VITA) were milled using a milling machine. For the fabrication of the crown scanned model file, the intaglio surface of the restoration was digitized using a contact scanner. Then, using the three-dimensional inspection software (Geomagic control X; 3D Systems), the process of the overlap of the crown designed model and the scanned model and 3-dimensional analysis was conducted. In addition, the marginal and internal fit of the crowns was evaluated by a silicone replication method. The difference among three types of single ceramic crown was analyzed using a Kruskal-Wallis H test, and Spearman correlation analysis was performed to analyze the correlation between machining precision and fitness (α=.05). Results: There was a significant difference in the machining precision and the marginal and internal fit according to the type of ceramic block (P<.001). In addition, the machining precision and the marginal and internal fit were positively correlated (P<.001). Conclusion: The marginal fit of crowns fabricated according to the types of ceramic blocks was within the clinically acceptable range (< 120 ㎛), so it can be regarded as appropriate machining precision applicable to all clinical as aspects in terms of the marginal fit.

• Journal of the Korean Magnetics Society
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• v.25 no.3
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• pp.67-73
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• 2015

This is a basic research for improving soft magnetic property of Fe based nano crystalline alloy powder core. The main study is done around characteristics of permeability, core loss, and DC bias depending on amount of insulation coating agent and particle size. First, $Fe_{73.5}Si_{13.5}B_9Nb_3Cu_1$ amorphous alloy ribbon was fabricated by using the planar flow casting (PFC) device. Then, heat treatment and ball milling were done to obtain alloy powder. The amount of polyether imide (PEI) added to it was varied by 0.5, 1.0, 2.0, 2.5 wt% to have compression molding into $16ton/cm^2$. After going through crystalline heat treatment, the made toroidal nano crystalline powder core ($OD12.7mm^*ID7.62mm^*H4.75mm$) had smaller permeability as amount of insulation coating agent decreases. However, it was found out that core loss and DC bias characteristics have been improved. The reason for this results were expected to be because green density of power core decreases as amorphous alloy powder particles become smaller as amount of alloy powder insulation coating agent increases, it was determined that 1 wt% of insulation coating agent is appropriate. Also, for powder core made based on alloy powder size with amount of insulation coating agent fixed at 1 wt%, effective permeability and core loss were outstanding as particle size became bigger. However, characteristics of DC bias became worse as applied DC field increases. This is expected to be due to insulation effect, residual pores, or molding density of powder core resulting from thickness of coating on surface of alloy powder.