• 제목/요약/키워드: Microwave Plasma

검색결과 398건 처리시간 0.022초

붕소가 도핑된 다이아몬드 전극을 이용한 생체화학물질의 검출 (Detection of Bio-chemical by Boron-doped Diamond Electrode)

  • 이은주;등도소;박수길
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.167-169
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    • 2002
  • Selective, highly stable determination of serotonin was achieved in cyclic voltammetric measurement carried out at electrochemically treated conductive boron-doped diamond electrode. Boron-doped diamond electrodes were prepared on single crystal Si wafers by microwave plasma chemical vapor deposition and $B_2O_3$ was dissolved in acetone/methanol(9:1) mixture solution so that the B/C weight ratio ca. $10^4ppm$. Serotonin is a kind of indoleamines, which secreted from adrenal marrow cells. The serious problem to detection of serotonin is the interference phenomena of electroactive constituent, including AA. In this study, electrochemical treatment of HDD was carried out to discriminate between serotonin and AA responses. Experimental results showed that the peak potential of AA oxidation shift to the positive direction and the oxidation peak of serotonin was unchanged.

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Development of a Mushroom Powder Certified Reference Material for Element Analysis

  • Betru, Tegegn Gizachew;Yim, Yong-Hyeon;Lee, Kyoung-Seok
    • Mass Spectrometry Letters
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    • 제11권4호
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    • pp.108-112
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    • 2020
  • A certified reference material (CRM) for the analysis of nutrient elements in an edible mushroom (Ganoderma lyceum) powder has been developed (KRISS CRM 108-10-011). The mass fractions of calcium (Ca), iron (Fe), and zinc (Zn) were measured by isotope dilution inductively coupled plasma mass spectrometry (ID ICP/MS). To dissolve the fungi cell wall of mushroom consisted of chitin fibers, sample preparation method by single reaction chamber type microwave-assisted acid digestion with acid mixtures was optimized. The mean measurement results obtained from 12 sample bottles were used to assign as the certified values for the CRM and the between-bottle homogeneities were evaluated from the relative standard deviations. The certified values were metrologically traceable to the definition of the kilogram in the International System of Units (SI). This CRM is expected to be used for validation of analytical methods or quality control of measurement results in analytical laboratories when they determine the mass fractions of elements in mushroom or other similar samples.

열확산에 의한 다이아몬드 박막의 표면연마에 관한 연구 (A Study on the Surface Polishing of Diamond Thin Films by Thermal Diffusion)

  • 배문기;김태규
    • 열처리공학회지
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    • 제34권2호
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    • pp.75-80
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    • 2021
  • The crystal grains of polycrystalline diamond vary depending on deposition conditions and growth thickness. The diamond thin film deposited by the CVD method has a very rough growth surface. On average, the surface roughness of a diamond thin film deposited by CVD is in the range of 1-100 um. However, the high surface roughness of diamond is unsuitable for application in industrial applications, so the surface roughness must be lowered. As the surface roughness decreases, the scattering of incident light is reduced, the heat conduction is improved, the mechanical surface friction coefficient can be lowered, and the transmittance can also be improved. In addition, diamond-coated cutting tools have the advantage of enabling ultra-precise machining. In this study, the surface roughness of diamond was improved by thermal diffusion reaction between diamond carbon atoms and ferrous metals at high temperature for diamond thin films deposited by MPCVD.

Field emission of diamond films grown on glass substrates at low temperatures

  • Lee, S.W.;Han, I.T.;Lee, N.;Choi, W.B.;Kim, J.M.;Jeon, D.
    • Journal of Korean Vacuum Science & Technology
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    • 제3권1호
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    • pp.43-48
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    • 1999
  • Using microwave plasma-enhanced chemical vapor deposition, diamond films were successfully grown on Ti-coated glass substrates at temperatures as low as around 500$^{\circ}C$ in behalf of practical applications to field emitters. Electron emission was observed at turn-on fields below 18V-$\mu\textrm{m}$. Field emission characteristics of diamond films were discussed in terms of their crystalline qualities. diamond films with poorer crystalline qualities showed better field emission properties.

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Enhancement of the nucleation density for diamond film on the pretreated glass substrate by the application of cyclic modulation of the source-gas flow rate

  • Kim, T.-G.;Kim, S.-H.;Kim, Y.-H.
    • Journal of Korean Vacuum Science & Technology
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    • 제4권1호
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    • pp.18-22
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    • 2000
  • For the enhancement of the nucleation density of the diamond film, we introduced the cyclic process. The cyclic process was carried out by the on/off control of CH$_4$ flow rate for a relatively short time (10 min), compared with the total reaction time (6 h). Prior to depositing the diamond film, we made the pretreated glass substrate via the unidirectional scratch using ∼l $\mu\textrm{m}$ size diamond powders. Diamond films were deposited on the pretreated glass substrate in a microwave plasma enhanced chemical vapor deposition (MPECVD) system. We observed the enhancement of the nucleation density of the diamond films caused by the cyclic process. Detailed surface morphologies of the substrate were investigated after the cyclic process. Based on these results, we discussed the cause for the enhancement of the nucleation density on the pretreated glass substrate by the cyclic process.

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플라스틱 소재의 비소 함유량 분석에 관한 연구 (Analytic study on arsenic content in plastic materials)

  • 이재인;최철호;최기인;고병례;최인석;조훈식
    • 분석과학
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    • 제25권6호
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    • pp.402-409
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    • 2012
  • 연속흐름 수소화물 생성-유도결합 플라스마 원자 방출 분광기(FI-HG-ICP-AES) 이용하여 플라스틱 소재에 함유된 비소를 정량하기 위한 조건을 얻었다. 플라스틱 시료를 습식 산 분해 방법 및 마이크로파 산 분해 방법으로 전처리하여 시험 용액을 조제하였다. 인증표준물질(CRM)인 CRM-EC680k 및 CRM-EC681k를 사용하여 측정한 값과 인증값을 비교하여 분석 방법의 재현성 및 정확성을 확인하였다. 습식 산 분해 방법 및 마이크로파 산 분해 방법으로 전처리하여 FI-HG-ICP-AES로 측정한 결과 CRM-EC680k의 경우에는 4.1~4.3 mg/kg (인증값 $4.1{\pm}0.5$ mg/kg)이고, CRM-EC681k의 경우에는 28.9~30.6 mg/kg (인증값 $29.1{\pm}1.8$ mg/kg)이었다.

플라즈마 용사방식에 의해 형성된 페라이트-탄화규소 표면층의 마이크로파 흡수 특성(II) (Microwave Absorbing Characteristics of Ferrite-silicon carbide surface Films Produced)

  • 신동찬;손현
    • 한국통신학회논문지
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    • 제18권8호
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    • pp.1169-1175
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    • 1993
  • 레이다의 추적 및 탐색으로 부터 비행 물체를 보호하기 위한 목적으로, 알루미늄 합금표면에 페라이트-탄화규소 복합물인 마이크로파 흡수층을 플라즈마 용사방식으로 제작하였다. 본 논문에서는 페라이트-탄화규소층(I) 제조시 사용했던 탄화규소 입자의 평균크기인 34[rm]대신에15[rm]가 사용되었으며, 플라즈마 용사변수들 중에서 분말의 공급비율은 70[Kg/h]대신에 50[Kg/h] 그리고, 용사거리는 80[mm[ 대신에 100[mm]가 사용 되었다. X-band(8~12.4(GHz)레이다용 페라이트-탄화규소 전자파 흡수체를 실험적으로 설계하고 시험제작하여 전기적 특성을 평가한 결과, -lOdB의 반사량을 허용한도로 했을 때 약 2.8%의 대역폭이 얻어졌으며, 최대 흡수두께는 0.5(mm)로 매우 양호한 박층형 전자파 흡수체가 얻어졌다.

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CVD 다이아몬드가 코팅된 알루미늄 방열판의 방열 특성 (Heat Spreading Properties of CVD Diamond Coated Al Heat Sink)

  • 윤민영;임종환;강찬형
    • 한국표면공학회지
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    • 제48권6호
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    • pp.297-302
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    • 2015
  • Nanocrystalline diamond(NCD) coated aluminium plates were prepared and applied as heat sinks for LED modules. NCD films were deposited on 1 mm thick Al plates for times of 2 - 10 h in a microwave plasma chemical vapor deposition reactor. Deposition parameters were the microwave power of 1.2 kW, the working pressure of 90 Torr, the $CH_4/Ar$ gas ratio of 2/200 sccm. In order to enhance diamond nucleation, DC bias voltage of -90 V was applied to the substrate during deposition without external heating. NCD film was identified by X-ray diffraction and Raman spectroscopy. The Al plates with about 300 nm thick NCD film were attached to LED modules and thermal analysis was carried out using Thermal Transient Tester (T3ster) in a still air box. Thermal resistance of the module with NCD/Al plate was 3.88 K/W while that with Al plate was 5.55 K/W. The smaller the thermal resistance, the better the heat emission. From structure function analysis, the differences between junction and ambient temperatures were $12.1^{\circ}C$ for NCD/Al plate and $15.5^{\circ}C$ for Al plate. The hot spot size of infrared images was larger on NCD/Al than Al plate for a given period of LED operation. In conclusion, NCD coated Al plate exhibited better thermal spreading performance than conventional Al heat sink.

Low-temperature synthesis of graphene on nickel foil by microwave plasma chemical vapor deposition

  • Kim, Y.;Song, W.;Lee, S.Y.;Jung, W.;Kim, M.K.;Jeon, C.;Park, C.Y.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.80-80
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    • 2010
  • Graphene has attracted tremendous attention for the last a few years due to it fascinating electrical, mechanical, and chemical properties. Up to now, several methods have been developed exclusively to prepare graphene, which include micromechanical cleavage, polycrystalline Ni employing chemical vapor deposition technique, solvent thermal reaction, thermal desorption of Si from SiC substrates, chemical routes via graphite intercalation compounds or graphite oxide. In particular, polycrystalline Ni foil and conventional chemical vapor deposition system have been widely used for synthesis of large-area graphene. [1-3] In this study, synthesis of mono-layer graphene on a Ni foil, the mixing ratio of hydrocarbon ($CH_4$) gas to hydrogen gas, microwave power, and growth time were systemically optimized. It is possible to synthesize a graphene at relatively lower temperature ($500^{\circ}C$) than those (${\sim}1000^{\circ}C$) of previous results. Also, we could control the number of graphene according to the growth conditions. The structural features such as surface morphology, crystallinity and number of layer were investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM), transmission electron microscopy (TEM) and resonant Raman spectroscopy with 514 nm excitation wavelength. We believe that our approach for the synthesis of mono-layer graphene may be potentially useful for the development of many electronic devices.

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암석 용해방법에 따른 미량원소 분석결과 비교

  • 최만식;정창식;박계헌
    • 암석학회지
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    • 제3권1호
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    • pp.41-48
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    • 1994
  • 암석의 용해 방법에 따른 미량원소 분석결과를 비교해 보기 위해 미국 지질조사소의 암석 표준시료 3종류 (G-2, W-2, BHVO-1)를 비이커-가열판법, 마이크로파 오븐법, 알칼리 용융법으로 용해 시켜 유도결합 플라즈마 질량분석기를 사용, 각각의 미량원소 농도를 측정하여 용해 방법에 따른 차이를 살펴보았다. 전체적으로 보아 비이커-가열판법으로 용해시킨 경우와 마이크로파 오븐법으로 용해시킨 경우는 비슷한 분석결과를 보인다. 알칼리 용융법을 사용하여 용해시킨 경우 높은 온도 때문에 Pb, Cu, Rb 등의 휘발성 원소 상당 부분이 손실된다. 산분해법의 경우 Zr, Hf 등의 원소가 저어콘 등의 불용성 광물에 농집되어 있을 때에는 광물들의 불충분한 용해로 인해 측정 농동가 낮게 나타난다. 회토류 원소 분석결과는 시료 용해 방법 사이에 차이가 없었으며 추천치와 대체로 일치하였으나 알칼리 용융법의 경우 큰 희석인자로 인한 측정상의 문제점이 일부 있었다.

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