• 제목/요약/키워드: Microwave Plasma

검색결과 398건 처리시간 0.025초

Experimental Research of an ECR Heating with R-wave in a Helicon Plasma Source

  • Ku, Dong-Jin;An, C.Y.;Park, Min;Kim, S.H.;Wang, S.J.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.274-274
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    • 2012
  • We have researched on controlling an electron temperature and a plasma collision frequency to study the effect of collisions on helicon plasmas. So, we have designed and constructed an electron cyclotron resonance (ECR) heating system in the helicon device as an auxiliary heating source. Since then, we have tried to optimize experimental designs such as a magnetic field configuration for ECR heating and 2.45GHz microwave launching system for its power transfer to the plasma effectively, and have characterized plasma parameters using a Langmuir probe. For improving an efficiency of the ECR heating with R-wave in the helicon plasma, we would understand an effect of R-wave propagation with ECR heating in the helicon plasma, because the efficiency of ECR heating with R-wave depends on some factors such as electron temperature, electron density, and magnetic field gradient. Firstly, we calculate the effect of R-wave propagation into the ECR zone in the plasma with those factors. We modify the magnetic field configuration and this system for the effective ECR heating in the plasma. Finally, after optimizing this system, the plasma parameters such as electron temperature and electron density are characterized by a RF compensated Langmuir probe.

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Non-thermal plasma technology for abatement of pollutant emission from marine diesel engine

  • Panomsuwan, Gasidit;Rujiravanit, Ratana;Ueno, Tomonaga;Saito, Nagahiro
    • Journal of Advanced Marine Engineering and Technology
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    • 제40권10호
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    • pp.929-934
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    • 2016
  • Plasma technology has long been regarded as a key essential tool in many industrial and technological sectors. However, the advancement of plasma technology in marine applications has not been fully realized yet. Herein, we present a short overview on the recent trends in utilization of plasma technology for air-pollution treatment in marine diesel exhaust. Four non-thermal plasma system, including electron beam dry scrubber (EBDS), dielectric barrier discharge (DBD), electron beam-microwave (EB-MW) plasma hybrid system, and plasma-catalytic hybrid system, are described with emphasis on their efficiency in removals of $NO_x$ and $SO_x$ gases. Non-thermal plasma has the great potential to be an efficient and environmentally compatible technique in simultaneous removals of $NO_x$ and $SO_x$ gases from the exhaust of marine diesel engine in the future.

골중납 측정의 시료 전처리 (산분해법과 마이크로웨이브 분해법)와 측정 방법 (유도결합 플라즈마 질량분석법과 흑연로 원자 흡수 분광 광도법)의 비교 (Comparisons of sample preparation (acid digestion and microwave digestion) and measurement (inductively coupled plasma mass spectrometry and graphite furnace atomic absorption spectrometry) in the determination of bone lead)

  • 윤충식;최인자;박성균;김록호
    • 분석과학
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    • 제16권2호
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    • pp.152-158
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    • 2003
  • 본 연구는 인체의 골중 납 농도를 측정하는데 필요한 시료 전처리법과 기기 분석법을 평가하기 위하여 수행되었다. 절단한 인간 사체 다리의 뼈를 상온에서의 산 분해법과 마이크로웨이브 분해법 (microwave oven method)을이용하여 납을 추출하였으며, 유도결합 플라즈마 질량분석법 (ICP-MS)과 흑연로 원자 흡수 분광 광도법 (GF-AAS)으로 납 농도를 측정하였다. 표준시료를 이용하여 회수율을 조사한 결과, 산분해 후 ICP-MS로 측정한 경우 높은 회수율을 보였으나, 산분해 후 GF-AAS로 측정한 것은 표준 농도보다 낮은 값을 보였으며, 마이크로웨이브 분해한 경우는 두 측정기기 모두 표준 농도보다 높은 값을 보였다. 뼈 시료의 경우, 산분해 후 ICP-MS로 측정한 납 농도는 GF-AAS의 값과 높은 상관성을 보였으나 (상관계수 = 0.983), GF-AAS가 ICP-MS보다 계통적으로 높은 값을 측정하였다. 마이크로웨이브 분해 역시 두 분석방법이 높은 상관성을 보였으나 (상관계수 = 0.950), 대체로 산분해에 의한 값보다 높은 농도를 보였다. 결론적으로, 상온에서 질산으로 분해 후 ICP-MS를 이용하여 측정한 것이 골중 납 농도를 결정하는데 편이성과 정확성 면에서 가장 효율적인 방법으로 보인다.

CVD 다이아몬드 코팅의 고체입자 Erosion 특성 (Solid Particle Erosion of CVD Diamond)

  • 김종훈;임대순
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 1997년도 제25회 춘계학술대회
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    • pp.69-73
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    • 1997
  • Microwave Plasma assisted CVD (Chemical Vapor Deposition) and DC Plasma CVD were used to prepare thin and thick diamond film, respectively. Diamond coated silicon nitride and fiee standing diamond thick film were eroded by silicon carbide particles. The velocity of the solid particle was about 220m/sec. Phase transformation and the other crack formation were investigated by using Raman spectroscopy and microscopy.

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친환경 자동차산업의 용사(Thermal spray)에 대한 최신 연구동향 (Recent Study of Thermal Spray for Green Automotive Industry)

  • 유호천
    • Journal of Welding and Joining
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    • 제32권3호
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    • pp.43-52
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    • 2014
  • Recent developing tendency of thermal spray for green automotive industry are studied by searching of NDSL, KIPRIS, ScienceDirect and so on. Spraying techniques such as plasma spray, microwave treatment, dry-ice blasting, HVOF thermal spray, cold spraying, aerosol deposition are introduced, further more spraying materials such as nano particles, intermetallic compound, TiAlN, TiC, Si-Al alloys are investigated.

Competitive Growth of Carbon Nanotubes versus Carbon Nanofibers

  • Kim, Sung-Hoon
    • 한국세라믹학회지
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    • 제40권12호
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    • pp.1150-1153
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    • 2003
  • Carbon nanofilaments were formed on silicon substrate using microwave plasma-enhanced chemical vapor deposition method. The structures of carbon nanofilaments were identified as carbon nanotubes or carbon nanofibers. The formation of bamboo-like carbon nanotubes was initiated by the application of the bias voltage during the plasma reaction. The growth kinetics of bamboo-like carbon nanotubes increased with increasing the bias voltage. The growth direction of bamboo-like carbon nanotubes was vertical to the substrate.

Direct Solid Sample Analysis in the Moderate Power He Mip with the Spark Generation

  • S. R. Koirtyohann;Yong-Nam Pak
    • Bulletin of the Korean Chemical Society
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    • 제15권8호
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    • pp.622-627
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    • 1994
  • Conducting solid samples are successfully analyzed with the spark ablation combined to the moderate power (500W) Helium Microwave Induced Plasma (He MIP). The relative standard deviations are in the range of 3-10% and the detection limits are around 50 ${\mu}$g $g^-1$. These values are higher than those of Ar MIP or Ar Inductively Coupled Plasma. Spark ablated particles are examined to investigate the analytical characteristics of the system.

RF/마이크로웨이브 방전에서의 전자에너지 분포함수의 결정 (Determination of electron energy distribution functions in radio-frequency (RF) and microwave discharges)

  • 고욱희;박인호;김남춘
    • 한국진공학회지
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    • 제10권4호
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    • pp.424-430
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    • 2001
  • RF나 마이크로웨이브의 전기장이 작용될 때 플라즈마 방전에서의 전자에너지분포함수를 계산하기 위하여 전자 볼츠만 방정식을 수치적으로 푼다. 2차미분 방정식인 로렌츠근사를 사용하는 동차 전자 볼츠만 방정식과 적분-미분방정식인 입자균형방정식을 동시에 풀어 자체모순이 없게 방전 전기장의 크기를 결정한다. 이 수치코드를 이용하여 아르곤 방전에 대하여 전자에너지 분포함수를 RF와 마이크로파영역에 걸쳐 계산한다. 이로부터 전자에너지 분포함수와 이온화율에 대한 고주파 전기장의 주파수 변화에 따른 영향을 조사한다.

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Development of Continuous Flow Microwave Digestion Procedures for Analysis of Trace Metal in Water Using Ion Chromatography

  • Youn Doo Kim;Gae Ho Lee;Hyung Seung Kim;Dong Soo Kim;Kwang Kyu Park
    • Bulletin of the Korean Chemical Society
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    • 제15권9호
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    • pp.786-791
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    • 1994
  • A simple and rapid sample pretreatment process necessary for determination of metal oxides in water was proposed. Samples were injected into the continuous-flow tube installed inside the microwave oven and the treated samples were cooled before entered to the Ion Chromatography (IC) or Inductively Coupled Plasma (ICP). By coupling this microwave digestion system with IC or ICP, a fully automatic analytical procedures may be easily established. In this study, two different types of digestion methods were considered; the open tubing method (OTM) and the restraint tubing method (RTM). The RTM was proved to be 3 times faster in digestion period and 10 times higher in detection range than the OTM. Validation of proposed sample digestion system was carried out by using an ICP. The results showed that both of continuous-flow methods, the OTM and the RTM were comparable in accuracies with the conventional batch-type vessel digestion method.