• Title/Summary/Keyword: Microwave Plasma

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Experimental Research of an ECR Heating with R-wave in a Helicon Plasma Source

  • Ku, Dong-Jin;An, C.Y.;Park, Min;Kim, S.H.;Wang, S.J.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.274-274
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    • 2012
  • We have researched on controlling an electron temperature and a plasma collision frequency to study the effect of collisions on helicon plasmas. So, we have designed and constructed an electron cyclotron resonance (ECR) heating system in the helicon device as an auxiliary heating source. Since then, we have tried to optimize experimental designs such as a magnetic field configuration for ECR heating and 2.45GHz microwave launching system for its power transfer to the plasma effectively, and have characterized plasma parameters using a Langmuir probe. For improving an efficiency of the ECR heating with R-wave in the helicon plasma, we would understand an effect of R-wave propagation with ECR heating in the helicon plasma, because the efficiency of ECR heating with R-wave depends on some factors such as electron temperature, electron density, and magnetic field gradient. Firstly, we calculate the effect of R-wave propagation into the ECR zone in the plasma with those factors. We modify the magnetic field configuration and this system for the effective ECR heating in the plasma. Finally, after optimizing this system, the plasma parameters such as electron temperature and electron density are characterized by a RF compensated Langmuir probe.

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Non-thermal plasma technology for abatement of pollutant emission from marine diesel engine

  • Panomsuwan, Gasidit;Rujiravanit, Ratana;Ueno, Tomonaga;Saito, Nagahiro
    • Journal of Advanced Marine Engineering and Technology
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    • v.40 no.10
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    • pp.929-934
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    • 2016
  • Plasma technology has long been regarded as a key essential tool in many industrial and technological sectors. However, the advancement of plasma technology in marine applications has not been fully realized yet. Herein, we present a short overview on the recent trends in utilization of plasma technology for air-pollution treatment in marine diesel exhaust. Four non-thermal plasma system, including electron beam dry scrubber (EBDS), dielectric barrier discharge (DBD), electron beam-microwave (EB-MW) plasma hybrid system, and plasma-catalytic hybrid system, are described with emphasis on their efficiency in removals of $NO_x$ and $SO_x$ gases. Non-thermal plasma has the great potential to be an efficient and environmentally compatible technique in simultaneous removals of $NO_x$ and $SO_x$ gases from the exhaust of marine diesel engine in the future.

Comparisons of sample preparation (acid digestion and microwave digestion) and measurement (inductively coupled plasma mass spectrometry and graphite furnace atomic absorption spectrometry) in the determination of bone lead (골중납 측정의 시료 전처리 (산분해법과 마이크로웨이브 분해법)와 측정 방법 (유도결합 플라즈마 질량분석법과 흑연로 원자 흡수 분광 광도법)의 비교)

  • Yoon, Chungsik;Choi, Inja;Park, Sungkyun;Kim, Rokho
    • Analytical Science and Technology
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    • v.16 no.2
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    • pp.152-158
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    • 2003
  • This study was conducted to evaluate two sample digestion procedures and instrumental determination parameters for analysis of lead in bone. Amputated human legs were treated by acid digestion or microwave dissolution prior to spectrometric analysis. Inductively coupled plasma mass spectrometry (ICP-MS) and graphite furnace atomic absorption spectrometry (GF-AAS) were used for determining bone lead levels. Recovery efficiencies using standard reference material from acid digestion measured by ICP-MS were in good agreement with those of the certified value, but in cases of acid digestion by GF-AAS and microwave digestion by both two methods, recovery underestimated and overestimated, respectively. For the bone samples, the lead concentrations obtained by ICP-MS after acid digestionwere in good agreement with those by GF-AAS (correlation coefficient = 0.983), but GF-AAS gave systematically higher values than ICP-MS. While a good agreement between two analytical methods after microwave digestion was also obtained (correlation coefficient = 0.950), bone lead concentrations from microwave were relatively higher than those from acid digestion. In conclusion, the use of the simple nitric acid digestion procedure at an ambient temperature coupled to ICP-MS seems to be efficient for the determination of lead in bone in consideration for both the convenience and validity.

Solid Particle Erosion of CVD Diamond (CVD 다이아몬드 코팅의 고체입자 Erosion 특성)

  • 김종훈;임대순
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1997.04a
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    • pp.69-73
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    • 1997
  • Microwave Plasma assisted CVD (Chemical Vapor Deposition) and DC Plasma CVD were used to prepare thin and thick diamond film, respectively. Diamond coated silicon nitride and fiee standing diamond thick film were eroded by silicon carbide particles. The velocity of the solid particle was about 220m/sec. Phase transformation and the other crack formation were investigated by using Raman spectroscopy and microscopy.

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Recent Study of Thermal Spray for Green Automotive Industry (친환경 자동차산업의 용사(Thermal spray)에 대한 최신 연구동향)

  • Yoo, Ho-Cheon
    • Journal of Welding and Joining
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    • v.32 no.3
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    • pp.43-52
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    • 2014
  • Recent developing tendency of thermal spray for green automotive industry are studied by searching of NDSL, KIPRIS, ScienceDirect and so on. Spraying techniques such as plasma spray, microwave treatment, dry-ice blasting, HVOF thermal spray, cold spraying, aerosol deposition are introduced, further more spraying materials such as nano particles, intermetallic compound, TiAlN, TiC, Si-Al alloys are investigated.

Competitive Growth of Carbon Nanotubes versus Carbon Nanofibers

  • Kim, Sung-Hoon
    • Journal of the Korean Ceramic Society
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    • v.40 no.12
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    • pp.1150-1153
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    • 2003
  • Carbon nanofilaments were formed on silicon substrate using microwave plasma-enhanced chemical vapor deposition method. The structures of carbon nanofilaments were identified as carbon nanotubes or carbon nanofibers. The formation of bamboo-like carbon nanotubes was initiated by the application of the bias voltage during the plasma reaction. The growth kinetics of bamboo-like carbon nanotubes increased with increasing the bias voltage. The growth direction of bamboo-like carbon nanotubes was vertical to the substrate.

Direct Solid Sample Analysis in the Moderate Power He Mip with the Spark Generation

  • S. R. Koirtyohann;Yong-Nam Pak
    • Bulletin of the Korean Chemical Society
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    • v.15 no.8
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    • pp.622-627
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    • 1994
  • Conducting solid samples are successfully analyzed with the spark ablation combined to the moderate power (500W) Helium Microwave Induced Plasma (He MIP). The relative standard deviations are in the range of 3-10% and the detection limits are around 50 ${\mu}$g $g^-1$. These values are higher than those of Ar MIP or Ar Inductively Coupled Plasma. Spark ablated particles are examined to investigate the analytical characteristics of the system.

Determination of electron energy distribution functions in radio-frequency (RF) and microwave discharges (RF/마이크로웨이브 방전에서의 전자에너지 분포함수의 결정)

  • 고욱희;박인호;김남춘
    • Journal of the Korean Vacuum Society
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    • v.10 no.4
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    • pp.424-430
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    • 2001
  • An electron Boltzmann equation is solved numerically to calculate the electron energy distribution functions in plasma discharge which is generated by radio-frequency (RF) and microwave frequency electric field. The maintenance field strengths are determined self-consistently by solving the homogeneous electron Boltzmann equation in the Lorentz approximation expressed by 2nd order differential equation and an additional particle balance equation expressed by integro-differential equation. By using this numerical code, the electron energy distribution functions in argon discharge are calculated in the range from RF to microwave frequency. The influence of frequency of the HF electric field on the electron energy distribution functions and ionization rate are investigated.

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Development of Continuous Flow Microwave Digestion Procedures for Analysis of Trace Metal in Water Using Ion Chromatography

  • Youn Doo Kim;Gae Ho Lee;Hyung Seung Kim;Dong Soo Kim;Kwang Kyu Park
    • Bulletin of the Korean Chemical Society
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    • v.15 no.9
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    • pp.786-791
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    • 1994
  • A simple and rapid sample pretreatment process necessary for determination of metal oxides in water was proposed. Samples were injected into the continuous-flow tube installed inside the microwave oven and the treated samples were cooled before entered to the Ion Chromatography (IC) or Inductively Coupled Plasma (ICP). By coupling this microwave digestion system with IC or ICP, a fully automatic analytical procedures may be easily established. In this study, two different types of digestion methods were considered; the open tubing method (OTM) and the restraint tubing method (RTM). The RTM was proved to be 3 times faster in digestion period and 10 times higher in detection range than the OTM. Validation of proposed sample digestion system was carried out by using an ICP. The results showed that both of continuous-flow methods, the OTM and the RTM were comparable in accuracies with the conventional batch-type vessel digestion method.