• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.19 no.5
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• pp.411-417
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• 2007

This study has been conducted to investigate pumping characteristics of diffuser/nozzle based piezoelectric micropumps. The micropumps include a piezo disk (an actuator), a chamber and a set of diffuser and nozzle. Flow in the current micropumps is controlled by a set of diffuser and nozzle, not by a nap valve. The diffuser/nozzle based micropumps are more reliable in operation and are easier in manufacturing than the flap valve based micropumps. The flow rates of the piezoelectric micropumps have been closely analyzed with a numerical calculation. It has been found that the positions of the inlet and outlet of the micropump can influence the performance of the diffuser/nozzle based piezoelectric micropumps. This study may provide fundamental understanding for the design and analysis of the piezoelectric micropumps.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.8
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• pp.707-713
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• 2004

A numerical analysis has been conducted for flow characteristics of piezoelectric micropumps. In the present study, FSI (Fluid-Structure Interaction) model and grid deform model have been employed for each of two different geometries of the micropumps with two different frequencies in the piezoelectric diffuser/nozzle based micropumps. The displacement of piezo disk and flow rates have been closely examined at the inlet and outlet. It has been found that the motion of the piezo disk investigated with FSI model is not in accordance with that with grid deform model. The results show that the time averaged flow rate calculated with FSI model is larger than that with grid deform model. This study presents the performance analysis of piezoelectric micropumps with two different numerical models for different types of pumps.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.141-142
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• 2008

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.17 no.7
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• pp.642-648
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• 2005

This study has been conducted to investigate the thermopneumatic and flow characteristics of diffuser/nozzle based thermopneumatic micropumps. In this study, a transient three-dimensional numerical analysis using FSI (Fluid-Structure Interaction) model has been employed to analyze the effects of the interaction between the membrane and two fluids (air and water) in the thermopneumtic micropump. The transient temperature and pressure in the cavity, the transient displacements of the membrane and the net flow rate of the micropump have been closely calculated for the frequency of 1 Hz. It has been found that the difference of the flow rates at the inlet and outlet is larger in the cooling period than in the heating period and that the duty ratio is very important in association with pump performance because the temperature in the cavity ascends drastically in the heating period and descends slowly in the cooling period. This study can be regarded as fundamental understandings for the design and analysis of thermopneumatic micropumps.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.19 no.9
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• pp.654-661
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• 2007

This study has been conducted to investigate the pumping characteristics of diffuser-nozzle based thermopneumatic micropumps with different input voltages and frequencies. In this study, the displacements of the membrane have been obtained changing the input voltage and frequency in load-free state because it is very difficult to measure the displacement of the membrane in an actual load state. It has been found that the amplitude of the membrane displacement increases as the input voltage increases. The pressure head of the thermopneumatic micropump increases almost linearly over some range of the input voltage and decreases almost linearly as the frequency increases. Also, the results show that the thermopneumatic micropump can pump the fluid over a certain input voltage. This study can be utilized as basic data for design and evaluation of thermopneumatic micropumps.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.21 no.1
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• pp.33-40
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• 2009

In the present experimental study, the pumping performances of diffuser/nozzle based piezoelectric micropumps are estimated with different operating factors and geometries. Here, the effects of the input voltage and frequency on the pumping performances have been examined together with the influences of the positions of the inlet and outlet. The results show that the flow rate of the micropump is larger with larger input voltage with the largest flow rates for the frequency to be close to 6.0 Hz all through the current experimental study. Also, it has been found that the positions of the inlet and outlet affect much on the performance of the piezoelectric micropumps. Error estimation has been carried out for the evaluation of the pumping performance in association with the uncertainty of the measurement.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.2
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• pp.236-242
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• 2003

Thermal bubbles find their diverse application areas in the MEMS (MicroElectroMechanial Systems) technology, including bubble jet printers, microactuators, micropumps, etc.. Especially, microactuators and micropumps, which use a microbubble growing by a controlled heat input, frequently involve mechanical and thermal interaction of the bubble with a solid structure, such as a cantilever beam and a membrane. Although the concept is experimentally verified that an internal pressure of the bubble can build up high enough to deflect a thin solid plate or a beam, the physics of the entire process have not yet been thoroughly explored. This work reports the experimental study of the growth of a thermal bubble while deflecting a thin cantilever beam. A physical model is presented to predict the elastic response of the cantilever beam based on the experimental measurements. The scaling law constructed through this work can provide a design guide for micro- and nano-systems that employ a thermal bubble for their actuation/pumping mechanism.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.140.1-140.1
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• 2005

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.10a
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• pp.1-15
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• 2004

o Various microfluidic components including mixromixers and micropumps have been developed for disposable biochip applications. o Single cell capturing, positioning and nanoliter drug injection chip has been demostrated. o Multi-channel, two-dimensional micro-well array has been fabricated and cell capturing and specific reagent injection have been performed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.595-596
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• 2008