• 제목/요약/키워드: Microprobe

검색결과 125건 처리시간 0.037초

Profile Measurements of Micro-aspheric Surfaces Using an Air-bearing Stylus with a Microprobe

  • Shibuya, Atsushi;Gao, Wei;Yoshikawa, Yasuo;Ju, Bing-Feng;Kiyono, Satoshi
    • International Journal of Precision Engineering and Manufacturing
    • /
    • 제8권2호
    • /
    • pp.26-31
    • /
    • 2007
  • A novel scanning probe measurement system was developed to enable precise profile measurements of microaspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A $50-{\mu}m-diameter$ glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN. The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 nm, The performance of the new scanning probe measurement system was verified by experimental data.

온난기후하에서 발달된 토양-세프로라이트내의 흑운모의 광물학적 및 형태의 변화 (Mineralogical and Morphological Changes of Biotite in a Soil-Sarprolite Profile Developed Under Temperature Climate)

  • 김재곤
    • 한국토양비료학회지
    • /
    • 제32권4호
    • /
    • pp.421-428
    • /
    • 1999
  • 토양내에서 흑운모의 풍화에 의하여 방출된 칼륨이 식물 성장에 필요에 의한 중요한 영양분의 원천의 하나로 인식되어왔다. 온난기후하에서 흑운모 화강암으로부터 발달된 토양-saprolite내에서 sand 크기의 흑운모의 풍화에 대하여 편광 현미경, 전자 현미경, X-선 회절 및 electron microprobe를 이용하여 형태학적, 광물학적, 그리고 화학적인 변화를 관찰하였다. 흑운모는 풍화가 진행될수록 그 색이 흑색에서 담황색으로 변했으며, paleochroism을 점점 잃어갔으며 그리고 가장자리와 층간 모두에서 풍화가 관찰되었다. 육각형의 구멍이 풍화된 흑운모 표면에서 관찰되었으며 그 수는 풍화가 더많이 진행된 흑운모에서 더 많은 경향을 보여주었다. 흑운모는 hydrobiotite, degraded biotite, illite 같은 중간단계 광물을 거치거나 혹은 중간과정이 없이 풍화에 의하여 kaolinite로 변형되었다. 풍화된 흑운모의 화학 성분은 표층으로 올라오면서 kaolinite의 화학 성분에 근접하는 경향을 보여주었으며 Si와 Al농도는 증가하였으며 K, Fe, Mg, Mn, Ti 함량은 감소하였다.

  • PDF

Ti-B 첨가(添加)에 의한 Al 의 응고조직(凝固組織)에 관(關)한 연구(硏究) (The Effects of Ti-B Addition on the Unidirectional Solidification of Al)

  • 성연수;이계완
    • 한국주조공학회지
    • /
    • 제7권4호
    • /
    • pp.358-365
    • /
    • 1987
  • To investigate the grain refining mechanism of Al by the addition of Ti-B, the unidirectional solidifications of 99.9%Al and 99.7%Al were performed under the condition of varing the pouring temperature. The solidification modes of Al were studied by the cooling curve analyses, metallographic and microprobe examinations. The results were as follows: 1) Grains were most refined with an addition of 0.15wt.%Ti-0.021wt.%B but the grain size with 0.2wt.%Ti-0.028wt.%B was increased. 2) The grain size of 99.7wt.%Al was even more refined than that of 99.9wt.%Al with the same amount of Ti-B. 3) As the pouring temperature increased, the grain size of pure Al and an alloy with 0.lwt.%Ti-0.014wt.%B was increased. However, an alloy with 0.2wt.%Ti-0.028wt.%B did not show any effects of temperature. 4) TiC(Al-Ti) and (Al-Ti-C) were identified as nucleants for Al.

  • PDF

열처리 조건에 따른 Rubrene 박막의 결정 특성 변화 연구

  • 윤영운;김송희;이한주;김태동;이기진
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
    • /
    • pp.124-124
    • /
    • 2009
  • We observed the changes of crystal structure of Rubrene (5,6,11,12-tetraphenylnaphthacene) polycrystal thin films at various in situ substrate temperature and process by scanning electron microscope(SEM), x-ray diffraction (XRD) and near-field microwave microprobe (NFMM). Amorphous rubrene thin film was initially obtained on 200 nm thick $SiO_2/Si$ substrate at 35 $^{\circ}C$ in a vacuum evaporation but in situ long time postannealing at the temperature 80 $^{\circ}C$ transformed the amorphous phase into crystalline. Four heating conditions are followed : (a) preheating (b) annealing (c) preheating, annealing (d) preheating, cooling(35 $^{\circ}C$), annealing. We have obtained the largest polycrystal disk in sample (c). But the highest crytallity and conductivity of the rubrene thin films were obtained in sample (d).

  • PDF

유기물 Pentacene 박막과 금속 계면에서의 Space Charge 연구 (A Study on Space Charge of Organic Pentacene/metal Interface)

  • 윤영운;;이후능;김송희;이기진
    • 한국전기전자재료학회논문지
    • /
    • 제20권1호
    • /
    • pp.41-46
    • /
    • 2007
  • Surface potential properties at the interface of pentacene thin films on gold (Au) and aluminum (Al) surfaces were investigated by using a near-field scanning microwave microprobe (NSMM). The surface potential formed across the pentacene film was observed by measuring the microwave reflection coefficient $S_{11}$ and compared with the result of a Kelvin-probe method. The obtained reflection coefficient ${\Delta}S_{11}$ of the pentacene thin films on Al was decreased as the pentacene film thickness increased due to the increased accumulation of negative space charges, while for Au ${\Delta}S_{11}$ was essentially constant.

An Archaeochemical Microstructural Study on Koryo Inlaid Celadon

  • Ham, Seung-Wook;Shim, Il-wun;Lee, Young-Eun;Kang, Ji-Yoon;Koh, Kyong-Shin
    • Bulletin of the Korean Chemical Society
    • /
    • 제23권11호
    • /
    • pp.1531-1540
    • /
    • 2002
  • With the invention of the inlaying technique for celadon in the latter half of the 12th century, the Koryo potters reached a new height of artistic and scientific achievement in ceramics chemical technology. Inlaid celadon shards, collected in 1991 during the surface investigation of Kangjin kilns found on the southwestern shore of South Korea, were imbedded in epoxy resin and polished for cross-section examination. Backscattered electron images were taken with an electron microprobe equipped with an energy dispersive spectrometer. The spectrometer was also used to determine the composition of micro-areas. Porcelain stone, weathered rock of quartz, mica, and feldspar composition were found to be the raw material for the body and important components in the glaze and white inlay. The close similarity between glaze and black inlay in the microstructure suggests that the glaze material was modified by adding clay with high iron content, such as biotite, for use as black inlay. The deep soft translucent quality of celadon glaze is brought about by its microstructure of bubbles, remnant and devitrified minerals, and the schlieren effect.

팔래듐-안티모니계의 화합물 및 상평형 연구 (Phases and Phase Relations of the System Pd-Sb)

  • 김원사
    • 한국광물학회지
    • /
    • 제8권1호
    • /
    • pp.13-22
    • /
    • 1995
  • Phase relations of the Pd-Sb system were investigated using the sealed-capsule technique; the quenched run products were studied by reflected light microscopy, X-ray diffraction, and electron microprobe analysis. Eight binary phases were confirmed to exist in the system: Pd20Sb7, Pd31Sb12, Pd8Sb3 (mertieite II), Pd5Sb2, Pd2Sb, Pd5Sb3, PdSb (sudburyite), and PdSb2, (unnamed PdSb2), The X-ray powder diffraction data of all the phases, except for Pd5Sb3, however, may be indexable on an orthorhombic cell, space group Cmc2, with a=3.362(1), b=17.484(7), c=6.934(2)$\AA$. Some physical properties as well as re-determined cell parameters are newly established. A revised phase relations of the Pd-Sb system are presented.

  • PDF

딕카이트의 열적 특성 연구 (Thermal Behavior of Dickite)

  • 조현구
    • 한국광물학회지
    • /
    • 제12권1호
    • /
    • pp.11-22
    • /
    • 1999
  • Thermal behavior of dickite was studied by thermal analysis, X-ray diffraction analysis, electron microprobe analysis, and scanning electron microscopy, Dickite has an endothermic peak at about$ 650^{\circ}C$ and an exothermic one at $960^{\circ}C$ in the differential thermal analysis. The endothermic reaction is assigned to the decomposition of dickite to meta-dickite. Hydroxyl radicals are removed from dickite structure by the reaction, resulting in the weight loss about 10.5~14.5% and appearance of a 14$\AA$ phase different from other kaolin minerals. The reaction slowly proceed in the range of $200^{\circ}C$. As the completion of decomposition, aciclular mullite forms at the expense of meta-dickite plates with random crystallographic relationship. Mullites have diverse silica versus alumina ratio. The exothermic reaction without weight loss seems to be due to the formation of spinel and amorphous silica. The spinel phase shows cryptocrystalline globular morphology accompanying a little amount of silica. From spinel phase shows cryptocrystalling globular morphology accompanying a little amount of silica. From this work, it is suggested that mullite is formed from meta-dickite much lower temperature than the reported one in the previous works.

  • PDF

A Study of Hydrogen-Induced Metal Atom Rearrangement

  • Noh, Hak;Park, Choong-Nyeon;Flanagan, Ted B.
    • 한국수소및신에너지학회논문집
    • /
    • 제7권1호
    • /
    • pp.111-115
    • /
    • 1996
  • Metal atom rearrangement has been shown to take place under the influence of hydrogen-induced atomic diffusion (HIAD) in initially homogeneous fee palladiumalloys by electron microprobe analysis, optical microscopy, mechanical property tests and hydrogen isotherms. HIAD takes place in palladium alloys at moderate to elevated temperatures leading to phase segregation under conditions where segregation does not normally occur, i.e., in the absence of H over the time scale of the experiments. From these results, it is confirmed that dissolved hydrogen plays a dual role in some of these alloys, i.e. it catalyzes metal atom diffusion. This research demonstrates the potential utility of employing H-induced changes for phase diagram determination of Pd alloys and possibly for other alloy system.

  • PDF

주사형 마이크로프로브 현미경과 나노테크놀로지 (Nanotechnology and scanning microprobe microscopy)

  • 장상목;;권영수
    • E2M - 전기 전자와 첨단 소재
    • /
    • 제9권6호
    • /
    • pp.616-625
    • /
    • 1996
  • 본 고에서는 최첨단 주사형 마이크로프로브현미경의 최근동향에 대해 기술하고자 한다. SNOAM의 관찰분야에의 응용이라는 관점에서 광학소자, 반도체재료, 유기박막등의 미소영역에의 광학특성의 관찰이외에 생물분야에서는 형광표식한 시료의 형상상과 형광상의 대비에서 세포나 생체고분자의 기능 해명에도 이용 가능하다고 생각된다. 또한 광가공기술에의 응용이나 기억소자 기술에의 응용도 고려되어져 금후의 응용분야에의 발전이 기대된다. 다가오는 21세기 정보화사회에서는 분자.원자를 제어하는 기술이 중심기술이 될 것으로 확신되고 있다. 그러나 현재 우리주변 기술로서 분자. 원자를 단위로 하는 평가, 분석 기술은 거의 찾을 수 없다. 따라서 주사형 마이크로 프로브 현미경은 Nano-technology로서 장래 정보화사회에 중요한 평가.분석기술의 하나로서 정착될것으로 생각된다.

  • PDF