• 한국전기전자재료학회논문지
• /
• 제26권10호
• /
• pp.745-753
• /
• 2013

Performance of organic light-emitting diodes incorporating microlens array was simulated using a Light Tools software. Use of microlens array can help the light to escape out of the device. We simulated a reference device that is consisted of reflection layer, emissive layer, and flat transparent substrate. And in this reference device, outcoupled efficiency of 22% was obtained. Several shapes of microlens were applied such as hemisphere, trapezoid, cone, and rectangular parallelepiped. The results showed the improvement of outcoupled efficiency of the device with microlens compared to that of the reference one. And from the analyses of the simulated data, the obtained appropriate shape of microlens is hemisphere, and the improvement of the device with hemispherical lens is 57% higher than that of the reference one.

• 정보저장시스템학회논문집
• /
• 제2권2호
• /
• pp.91-95
• /
• 2006

High-density image sensors rave microlens array to improve photosensitivity. It is conventionally fabricated by reflow process. The reflow process has some weak points. UV imprinting process can be proposed as an alternative process to integrate microlens array on photodiodes. In this study, the UV imprionting process to integrate microlens array on image sensor was developed using UV transparent flexible mold and simulated image sensor substrate. The UV transparent flexible mold was fabricated by replicating master pattern using siliconacrylate photopolymer. The releasing property and shape accuacy of siliconacrylate mold was analysed. After UV imprinting process, replication quality and align accuracy was analysed.

• 반도체디스플레이기술학회지
• /
• 제21권2호
• /
• pp.25-31
• /
• 2022

By an aid of needle coating, we have fabricated a spherical microlens array using poly(methyl methacrylate) for potential applications in light extraction of organic light-emitting diodes. With an attempt to achieve high-density and high-aspect-ratio microlens arrays, we have investigated the coating behaviors by varying the material parameters such as the solute concentration and wettability of the poly(methyl methacrylate) solution and process parameters such as the dwell time of needle near the substrate, retract distance of needle from the substrate, and coating gap between the needle and substrate. Under the optimized coating conditions, it is demonstrated that high-aspect-ratio microlens arrays can be obtained using a coating solution with high solute concentration and a small amount of a hydrophobic solvent. It is found that the diameter and height of microlens array are decreased with increasing poly(methyl methacrylate) concentration, yet the overall aspect ratio is rather enhanced. By the addition of 5 wt% hexylamine in 35 wt% poly(methyl methacrylate) solution, we have achieved a spherical microlens with the height of 7.7 ㎛ and the width of 94.24 ㎛ (the aspect ratio of 0.082). To estimate the capability of light extraction by the microlens array, we have performed ray tracing simulations and demonstrated that the light extraction efficiency of organic light-emitting diode is expected to be enhanced up to 24%.

• 소성∙가공
• /
• 제15권1호
• /
• pp.21-26
• /
• 2006

A optical head unit for nano optical probe array was developed. The optical probe array is generated by Talbot effect. The shape and thickness of microlens array(MLA) were designed to minimize the spot size at the foci of MLA. To increase the optical efficiency of the system and obtain the large tolerance for fabrication, aperture size was theoretically optimized. Then microlens illuminated aperture array(MLIAA) as an optical head unit was fabricated using a ultra violet(UV) molding process on aluminum aperture array. In this process, Al aperture array was fabricated separately using the photolithography and reactive ion etching(RIE) process. Optical properties of the generated optical probes were measured and compared at Talbot distance from the aperture array having a diameter of $1{\mu}m$ and MLIAA.

• 정보저장시스템학회논문집
• /
• 제2권4호
• /
• pp.236-239
• /
• 2006

Glass micro molding process is the most suitable process for fabricating high precision glass microlens amy at low cost. A new glass micro molding process was proposed. Tungsten carbide mold was fabricated by imprinting and sintering process to overcome the difficulties of the conventional process. In the glass micro molding process, process conditions such as processing temperature and compression force were changed. Geometrical properties of the replicated glass microlens array were measured and compared at variety process conditions. The condition of glass micro molding process was optimized. The experimental result showed that developed process was effective to produce a glass microlens array.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 추계학술대회 논문집
• /
• pp.882-884
• /
• 2005

A new rectangular shape microlens array having high sag for solid-state lighting is presented. Proposed microlens, which has high sag, over $375{\mu}m$ and large diameter, over 3 mm can enormously enhance output optical extraction efficiency. Rectangular shape of microlens can maximize the fill factor of light-emitting-diode (LED) package and minimize the optical loss at the same time. This wafer level microlens array is fabricated on LED package. It has many advantages in optical properties, low cost, high aligning accuracy, and mass production.

• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2005년도 금형가공,미세가공,플라스틱가공 공동 심포지엄
• /
• pp.29-34
• /
• 2005

A optical head unit for nano optical probe away was developed. The optical probe array is generated by Talbot effect. The shape and thickness of microlens array(MLA) were designed to minimize the spot size at the foci of MLA. To increase the optical efficiency of the system and obtain the large tolerance for fabrication, aperture size was theoretically optimized. Then microlens illuminated aperture array(MLIAA) as an optical head unit was fabricated using a ultra violet(UV) molding process on aluminum aperture array. In this process, Al aperture array was fabricated separately using the photolithography and reactive ion etching(RIE) process. Optical properties of the generated optical probes were measured and compared at Talbot distance from the aperture array having a diameter of $1{\mu}m$ and MLIAA.

• 센서학회지
• /
• 제10권6호
• /
• pp.279-285
• /
• 2001

본 연구에서는 HNA를 이용한 Si의 bulk 식각을 통해 렌즈 모양을 갖는 몰드를 제작 한 뒤 그 위에 렌즈로 사용될 SU-8을 도포 한 다음 몰드와 렌즈를 분리시키는 방법으로 마이크로렌즈 배열을 제조하는 공정을 개발하였으며 이는 공정순서가 단순하며 경제적인 것을 특징으로 한다. Stirring 속도 800rpm 이상의 조건에서 높이 $45{\mu}m$, 직경 $150{\mu}m$의 높은 fill factor를 가지는 렌즈의 제작조건을 확립하였으며, 이와 같이 제작된 초소형 렌즈는 적외선 감지 소자와 같은 영상 소자나 projection display 영역에 응용되어 소자 성능을 향상시킬 수 있다.

• 마이크로전자및패키징학회지
• /
• 제20권2호
• /
• pp.23-28
• /
• 2013

마이크로렌즈 어레이는 광학 시스템의 기본 부품으로, 사용 목적에 따라 초점거리가 다르게 제작되며, 대체로 긴 초점거리의 렌즈들이 많이 제작되고 있다. 본 논문에서는 졸겔(sol-gel) 내부에 들어있는 형광으로 염색된 물질을 관찰하기 위하여 마이크로렌즈 어레이를 제작하였다. 일반적으로 형광 현미경에서 관찰되는 형광 빛은 그 강도가 약하지만 마이크로렌즈를 이용할 경우 빛을 집중시켜 선명한 관찰이 가능하게 한다. 이를 실현시키기 위해 photoresist thermal reflow법을 사용하여 초점 거리가 짧은 마이크로렌즈를 제작하였으며, 렌즈의 형상 관련 오차를 측정하였다. 측정 오차에 기반을 둔 포토마스크 보정 및 스핀 코팅 조건을 조정하여 적합한 마이크로렌즈의 직경과 형상을 구현하였다.

• 한국광학회지
• /
• 제18권6호
• /
• pp.441-446
• /
• 2007

OLED 소자는 유리기판과 공기 층의 경계면에서 발생하는 전반사와 ITO-유기층으로 형성되는 광도파로를 따라 진행하는 도파모드 결합으로 인해 내부에서 생성된 빛의 80% 이상이 외부로 추출되지 못하게 된다. 본 연구에서는 마이크로 렌즈 어레이와 회절격자 레지스트 층을 이용하여 소자 내부에서 손실되는 빛을 외부로 추출시킴으로써 OLED의 발광효율을 향상시킨다. 마이크로 렌즈 어레이를 이용하여 유리기판-공기 전반사로 인해 내부에 갇히는 빛을 외부로 출력시키고, ITO 와 유기물 사이에 회절격자 레지스트 층을 삽입하여 ITO-유기층 광도파로에 갇힌 빛들을 수직방향으로 추출될 수 있도록 하였다. 제작된 OLED 소자에 전류밀도 $20mA/cm^2$를 인가한 경우, 마이크로 렌즈 어레이를 적용한 OLED에서 22%의 효율 개선을 얻었고, 회절격자 레지스트 층을 가지는 OLED 의 경우 41%의 효율개선을 얻을 수 있었다.