• 대한전자공학회논문지SD
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• 제37권8호
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• pp.1-8
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• 2000

0.3 g의 하드디스크 드라이브에 사용될 수 있는 마그네틱 헤드를 장착할 수 있는 트랙 추적용 마이크로 액추에이터를 제작하였다. 이 액추에이터는 정전방식을 적용하였으며 2${\mu}m$ 두께의 열산화막과 20${\mu}m$ 두께의 실리콘 막이 직접접합된 SOI 웨이퍼를 이용하여 단지 3장의 마스크만을 사용하여 제작하였다. 고유진동수는 18.5 kHz이고 15 V DC와 15 V AC 전압이 동시에 가해진 상황에서 그 변위가 1.4 ${\mu}m$이였고 이때 30 V일 때 50 N의 정전력을 나타내었다. 또한 2.21 kHz의 서보 주파수 대역에서 이득여유가 7.51 dB이고 위상여유가 50.98$^{\circ}$이였다. 따라서 이 트랙추적 마이크로 액추에이터는 10 Gb/in$^2$의 기록밀도를 요구하는 하드디스크 드라이브에 충분히 이용될 수 있을 것이다.

• 대한기계학회논문집A
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• 제25권12호
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• pp.2002-2008
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• 2001

Nonlinear vibration characteristics of a piezoelectric-type micro actuator used for hard disk drives are experimentally studied. The nonlinear characterisitics include hysteresis, superharmonic resonance, jump phenomenon, and shifting of natural frequencies. The vibration modes and frequencies of the commercial actuator of the Hutchinson's Magnum series are measured using a laser vibrometer. From harmonic excitation to the PZT acturator, we observe interesting hysteresis patterns with 3 times input frequency. It is shown that the micro actuator has the typical 3 times superhamonic resonances coupled to the first torsional and sway modes of the suspension.

• 대한기계학회논문집B
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• 제27권2호
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• pp.236-242
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• 2003

Thermal bubbles find their diverse application areas in the MEMS (MicroElectroMechanial Systems) technology, including bubble jet printers, microactuators, micropumps, etc.. Especially, microactuators and micropumps, which use a microbubble growing by a controlled heat input, frequently involve mechanical and thermal interaction of the bubble with a solid structure, such as a cantilever beam and a membrane. Although the concept is experimentally verified that an internal pressure of the bubble can build up high enough to deflect a thin solid plate or a beam, the physics of the entire process have not yet been thoroughly explored. This work reports the experimental study of the growth of a thermal bubble while deflecting a thin cantilever beam. A physical model is presented to predict the elastic response of the cantilever beam based on the experimental measurements. The scaling law constructed through this work can provide a design guide for micro- and nano-systems that employ a thermal bubble for their actuation/pumping mechanism.

• 대한기계학회논문집A
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• 제20권5호
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• pp.1363-1371
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• 1996

This paper presents the design, fabrication, and testing of polysilicon electrostatic microactuators that resonate in the direction parallel to the silicon susbstrates. A set of six different designs has been developed using a theoretical model and design formulae developed for the mocroactuators. Microactuator prototypes are fabricated from a 2.1 $\mu{m}$-thick LPCVD polysilicon film, using a 4-mask surface-micromachining process. The prototypes are tested under a d.c. bias voltage of 45V with an a.c. drive voltage amplitude of 20 v.Measured resorant frequencies are in the ranges of 40-60 kHz, showing a good agreement to their theoretical estimates within error bounds of .$\pm$.5%. Important issues inthe design and microfabrication of the microactuators are discussed, together with potential applicaitons of the key technology involved.

• 대한기계학회논문집A
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• 제27권8호
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• pp.1259-1265
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• 2003

We present a new post-fabrication frequency tuning method for laterally driven electrostatic microresonators using a DC-biased electrostatic comb array of linearly varied finger-length. The electrostatic tuning force and the equivalent stiffness, adjusted by the DC-biased tuning-comb array, have been formulated as functions of geometry and DC tuning voltage. A set of frequency-turnable microresonators has been designed and fabricated by 4-mask surface-micromachining process. The resonant frequency of the microfabricated microresonator has been measured for a varying tuning voltage at the reduced pressure of 1 torr. The maximum 3.3% reduction of the resonant frequency is achieved at the tuning voltage increase of 20V.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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• pp.1145-1147
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• 1999

평판전극배열을 이용한 회전구동형 마이크로 액츄에이터의 구동력을 증대시키기 위하여 전극의 형상을 최적화 하였다. 기존 평판구동형 마이크로 액츄에이터의 형상을 변형시켜 반경에 무관하게 전극의 수직간격을 최소간격으로 일정하게 유지함으로서 구동력을 배가시키는 효과를 발생시켰다. 이러한 구동력의 증가는 결국 요구되는 변위를 만족시키면서 고유진동수를 증가시켜 마이크로액츄에이터의 구동성능을 향상시킬 수 있다.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2002년도 동계연구발표회 논문개요집
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• pp.140-141
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• 2002

In proto-type microactuators driven by magnetostrictive Tb-Fe thin films, the deflection was observed to be much smaller than that expected from large-sized "standard" Tb-Fe thin films. A striking difference was observed when the results from a thin substrate of 28 $\mu\textrm{m}$ for microactuator applications were compared with those from a standard substrate. At a standard substrate thickness (several hundred $\mu\textrm{m}$), an amorphous phase was formed and the coercivity was low being 80 Oe. (omitted)

• 한국표면공학회지
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• 제29권5호
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• pp.424-429
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• 1996

Thin films of Ti-Ni alloy were formed by sputtering under various Ar gas pressures and r. f. powers to investigate the optimum sputtering conditions and to demonstrate their shape memory effect. The composition and structure of the films were examined by electron micro-probe analysis and scanning electron microscope. These films were annealed in order to crystallize them. The mechanical property of the annealed films was evaluated by a conventional bending test. The transformation tmeperatures were determined by differential scanning calorimetry. The shape memory behaviour was examined quantiatatively by changing in sample temperature under various constant loads. It was found that the Ar gas pressure had a critical effect on the mechanical property of the thin film,s although the r.f. power also affected it. The films formed at a high Ar gas pressure were too brittle to be bent successfully. However, the films formed at a low Ar gas pressur could be bent and their shape memory behavior was found to be comparable with that of bulk Ti-Ni alloys.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3286-3288
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• 1999

The electrostatically actuated test structure was presented to measure the micro mechanical characteristics of micromaterials as thin films forming the microactuators. The test structure was fabricated by the surface micromachining processes and driven by the electrostatic force, In order to measure the fracture toughness, the sharp notch in the test structure was introduced by the etching process. On the basis of the beam bending theory, the elastic modulus was measured by using the microcantilevr beam and the mechanical displacement, curvature and deflection curve under the electrostatic force was evaluated by using the electrostatic structure.

• 대한기계학회논문집A
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• 제34권8호
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• pp.1119-1127
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• 2010

본 논문에서는 작동 평면상의 네 위치에서 사중안정점을 가지는 신개념 전자기형 마이크로 액추에이터의 구조체와 전자기 로렌츠력을 이용하는 구동 방식을 제시하고, 이의 타당성을 비선형 구조해석 및 전기-열해석을 통하여 검증하였다. 사중안정성 액추에이터의 구현을 위해서 관련 분야에서 널리 연구되고 있는 쌍안정성 액추에 이터의 개념을 확장 응용하였다. 비선형 유한요소해석을 이용하여 사중안정성 미소 구조체의 정적 해석과 과도동 적 해석을 수행함으로써 액추에이터 구조체의 다중안정성 유무를 파악하고 이 결과를 분석하여 구조체 설계에 반영하였다. 사중안정성 미소 구조체를 도체화하여 자기장 내에서 구조체에 전류를 통할 때에 발생하는 로렌츠력으로 평면상의 네 안정점으로 구조체를 구동할 수 있도록 고안하고, 그 때 필요한 구동전류의 크기 및 전자기 구동에 의한 주울열에 의한 온도분포를 계산하여 전반적인 타당성을 검토하였다. 본 논문은 지금까지의 관심 대상인 쌍안정성의 이용이 아니라 더욱 확장된 다중안정성을 가진 미소 액추에이터의 구조체와 전자기 구동방법을 제안하여 향후에 다중안정성을 필요로 하는 마이크로 시스템에 활용될 수 있도록 하는데 그 의미가 있다.