• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.422-423
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• 2005

RF Micro switches is a miniature device or an array of integration devices and mechanical components and fabricated with Ie batch-processing techniques. RF Micro switches application area are in phased arrays and reconfigurable apertures for defence and telecommunication systems, switching network for satellite communication, and single-pole double throw switches for wireless application. Recently, RF Micro switches have been developed for the application to the milimeter wave system. RF Micro switches offer a substantilly higher performance than PIN diode or FET switches. In this paper, SPDT(single-pole-double-throw) switch are designed to use 10 GHz. Actuation voltage and displacement are simulated by tool.

• Proceedings of the Optical Society of Korea Conference
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• 2000.08a
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• pp.154-155
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• 2000

Optical switches using MEMS(Micro Electro Mechanical Systems) process have been widely developed since conventional optical switches cannot meet the requirements of new systems. $N_2$ type micro-mirror switches are easy to control, have simple optical systems but have difficulties in expanding the ports. Micromirrors of 2N type switches must be tilted at various angles and have relatively complicated optical systems but have advantage in expanding ports. Another type of optical switch using MEMS process is micro-waveguide type. It is reliable than other types since it has no moving parts.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.809-812
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• 2002

This paper presents the structures for a CPW shunt RF switch using MEMS(Micro Electro Mechanical System). Recent development in MEMS technology has made the design and fabrication of micro-mechanical switches as new switching elements. The micro-mechanical switches have low insertion loss, negligible power consumption, and good isolation compared to semiconductor switches. The fabricated structure shows an insertion loss of 2dB at 20GHz When a bias voltages of 12V is apply.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.8
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• pp.543-548
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• 2003

In this paper, we have proposed and fabricated a two-axis rotational micro-mirror with large tilt angle. Such a micro-mirror is a key element for N$\times$N high capacity optical cross-connect switches. The micro-mirror is required to have large tilt angle to increase the capacity of the cross-connect switches. For larger micro-mirror tilt angle between the grounded mirror plate and the bottom electrode is to be large enough to provide space for the tilting of the mirror. For our proposed structure, the gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates by using the bulk micromachining technology, and combined later by employing self-align technique. As a result, a large tilt angle has been achieved without using additional actuators. The measured tilt angles were as large as $\pm$5.5$^{\circ}$ and $\pm$8.4$^{\circ}$ in the x and y direction respectively, and the pull-in voltages for the two directions were 380 V and 275 V respectively. Finally the fabricated mirror was successfully utilized to steer the optical beam. To our knowledge, our micro-mirror has the best performance among the micro-mirrors reported internationally so far.

• Transactions on Electrical and Electronic Materials
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• v.16 no.4
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• pp.173-178
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• 2015

In lieu of the excellent radio frequency (RF) performance of microelectromechanical system ( MEMS) switches, these micro switches need higher actuation voltage for their operation. This requirement is secondary to concerns over the swtiches’ reliability. This paper reports high reliability operation of RF MEMS switches with low voltage requirements. The proposed switch is optimised to perform in the Q-band, which results in actuation voltage of just 16.4 V. The mechanical stress gradient in the thin micro membrane is computed by simulating von Mises stress in a multi-physics environment that results in 90.4 MPa stress. The computed spring constant for the membrane is 3.02 N/m. The switch results in excellent RF performance with simulated isolation of above 38 dB, insertion loss of less than 0.35 dB and return loss of above 30 dB in the Q-band.

• International Journal of Railway
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• v.5 no.1
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• pp.1-9
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• 2012

Reliability means that a product maintains its initial quality and performance at a certain period of time (time, distance, cycle etc) under given condition without failure. The given conditions include both environmental condition and operating condition. Environmental condition means a common natural environment such as temperature, humidity, vibration, and working condition means an artificial environment such as voltage, current load, place for installment, and hours of use, which occurs during the life of the product. In the field of railway vehicles, it is mandatory to use a part with the proved reliability as the extension of the life of vehicle become highly necessary. But the reliable assessment method for the reliability of the part is insufficient. If the reliability of the railway vehicle parts could be assessed by using the field data, the reliability of the entire system could also be evaluated reliably. In this study, life span of micro-switch for master controller is analyzed and prediction is performed based on its field data given by an operator considering the special circumstances of railway vehicles such as the operation of a large number of trains on the same line.

• Steel and Composite Structures
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• v.52 no.5
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• pp.501-513
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• 2024

Two-directional functionally graded materials (2D-FGMs) show extraordinary physical properties which makes them ideal candidates for designing smart micro-switches. Pull-in instability is one of the most critical challenges in the design of electrostatically-actuated microswitches. The present research aims to bridge the gap in the static pull-in instability analysis of microswitches composed of 2D-FGM. Euler-Bernoulli beam theory with geometrical nonlinearity effect (i.e. von-Karman nonlinearity) in conjunction with the modified couple stress theory (MCST) are employed for mathematical formulation. The micro-switch is subjected to electrostatic actuation with fringing field effect and Casimir force. Hamilton's principle is utilized to derive the governing equations of the system and corresponding boundary conditions. Due to the extreme nonlinear coupling of the governing equations and boundary conditions as well as the existence of terms with variable coefficients, it was difficult to solve the obtained equations analytically. Therefore, differential quadrature method (DQM) is hired to discretize the obtained nonlinear coupled equations and non-classical boundary conditions. The result is a system of nonlinear coupled algebraic equations, which are solved via Newton-Raphson method. A parametric study is then implemented for clamped-clamped and cantilever switches to explore the static pull-in response of the system. The influences of the FG indexes in two directions, length scale parameter, and initial gap are discussed in detail.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.147-150
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• 2005

Low actuation voltage and no contact stiction are the important factors to apply MEMS RF switches to mobile devices. Conventional electrostatic MEMS RF switches require several tens of voltages for actuation. In this paper we propose PAS MEMS RF switch which adopt PZT actuators and seesaw cantilevers to meet the above requirements. The fundamental structures of PAS MEMS switch were designed, optimized, and fabricated. Through the developed processes PAS SPDT MEMS RF switches were successfully fabricated on 4" wafers and they showed good electrical properties. The driving voltage was less than 5 volts. And the insertion loss was -0.5dB and the isolation was 35dB at 5GHz. The switching speed was about 5kHz. So these MEMS RF switches can be applicable to mobile communication devices or wireless multi-media devices at lower than 6GHz.

• 유체기계공업학회:학술대회논문집
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• 2006.08a
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• pp.305-308
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• 2006

For controlling micro-flows inside a LOC (lab-on-a-chip) a syringe pump or an electronic device for EOF(electro-osmotic flow) have been used in general. However, these devices are so large and heavy that they are burdensome in the development of a portable micro-TAS (total analysis system). In this study, a new flow control system employing pressure chambers, digital switches and speed controllers was developed. This system could effectively control the micro-scale flows inside a LOC without any mechanical actuators or electronic devices We also checked the feasibility of this new control system by applying it to a LOC of micro-mixer type. Performance tests show that the developed control system has very good performance. Because the flow rate in LOC is controlled easily by throttling the speed controller, the flows in complicate microchannels network can be also controlled precisely.

• Proceedings of the KIPE Conference
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• 2002.07a
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• pp.697-700
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• 2002

In this paper, we proposed the micro web-server Implementation on Strong ARM processor with embedded Linux. The parallel port connecting parallel I/O is controlled via HPPT protocol and web browser program. HTTP protocol is ported into Linux and the micro web server program and port control program are installed on-board memory using CGI to be accessed by web browser, such as Internet Explore and Netscape. 8bit LED and DIP switches are connected to the processor port and the switch input status is monitored and the LED output is controlled from remote hosts vie internet. The result of the proposed embedded micro-web server can be used in automation systems, remote distributed control via internet using web browser.