• Korean Journal of Materials Research
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• v.23 no.8
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• pp.447-452
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• 2013

Recently, products that a have 3-dimensional(3D) micro structure have been in wide use. To fabricate these 3D micro structures, several methods, such as stereo lithography, reflow process, and diffuser lithography, have been used. However, these methods are either very complicated, have limitations in terms of patterns dimensions or need expensive components. To overcome these limitations, we fabricated various 3D micro structures in one step using a pair of diffusers that diffract the incident beam of UV light at wide angles. In the experiment, we used positive photoresist to coat the Si substrate. A pair of diffusers(ground glass diffuser, opal glass diffuser) with Gaussian and Lambertian scattering was placed above the photomask in the passage of UV light in the photolithography equipment. The incident rays of UV light diffracted twice at wider angles while passing through the diffusers. After exposure, the photoresist was developed fabricating the desired 3D micro structure. These micro structures were analyzed using FE-SEM and 3D-profiler data. As a result, this dual diffuser lithography(DDL) technique enabled us to fabricate various microstructures with different dimensions by just changing the combination of diffusers, making this technology an efficient alternative to other complex techniques.

• 한국정보디스플레이학회:학술대회논문집
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• 2007.08b
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• pp.1155-1158
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• 2007

To reduce acoustic noise level of an AV projector, primary noise sources of AV projector were analyzed. Based on the analyzed result, methods to control each source are presented and tried. Structure-borne noise can be controlled by anti vibration design of mounting system, and air-borne noise by reducing flow resisitvity.

• Journal of the Korea Concrete Institute
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• v.29 no.1
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• pp.101-107
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• 2017

This study aimed to conduct the basic analysis on the fractal characteristics of cementitious materials. The pore structure of cement paste incorporating ground granulated blast furnace slag (GGBFS) was measured using mercury intrusion porosimetry (MIP) and the fractal characteristics were investigated using different models. Because the pore structure of GGBFS-blended cement paste is an irregular system in the various range from nanometer to millimeter, the characteristics of pore region in the different scale may not be adequately described when the fractal dimension was calculated over the whole scale range. While Zhang and Li model enabled analyzing the fraction dimension of pore structure over the three divided scale ranges of micro, small capillary and macro regions, Ji el al. model refined analysis on the fractal characteristics of micro pore region consisting of micro I region corresponding to gel pores and micro II region corresponding to small capillary pores. As the pore size decreased, both models suggested that the pore surface of micro region became more irregular than macro region and the complexity of pores increased.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1945-1948
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• 2004

This paper describes the design and construction of a micro robotic system addressing such important aspects as versatility and low cost for rapid development and test of new control algorithm. The design and structure of micro robots are presented in detail. The supervision oriented concept is designed for controlling a group of micro robots. In this concept, the vision system recognizes the environment and the host computer decides the micro robot action based on the information from the vision system. In addition, the micro robots can be implemented cheaply and small in size because the structure of supervision oriented system is simplest. The experimental results and the performance of the proposed micro robotic system are discussed.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2002.02a
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• pp.253-259
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• 2002

Micro cell structures with high aspect ratio were fabricated by injection molding method. The mold inserts had dimension $1.9cm\times8.3cm$ composed of a lot of micro posts and were fabricated by LIGA process. The size of the micro posts was $157{\mu}m\times157{\mu}m\times500{\mu}m$ and the gaps between two adjacent posts were $50{\mu}m$. Using Polymethylmethacrylate (PMMA) injection molding was performed. The key experimental variables were temperature, pressure, and time. By controlling these, good shaped mim cell structures with $50{\mu}m$ in wall thickness and $500{\mu}m$ in depth were obtained. In order to understand micro molding mechanism, shape changes of molded PMMA were studied with experimental variables. And the durability of mold insert was investigated, too. The results show that the most important factor in molding processes was the mold temperature that is closely related to the filling of the melt into the micro cavity. And the holding time before cooling showed a great effect on the quality of molded PMMA.

• Proceedings of the IEEK Conference
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• 2006.06a
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• pp.549-550
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• 2006

It has become topic continuously at MEMS or semiconductor process to form three-dimensional multilayer structure. In this paper, we devised the new polymer pattern method that has multilayer structure. This is method that uses different kind of polymeric material. Specially, polymers used in this study that we propose became all pattern by photolithography, prevented that process increases. Here, polymer that we use used polymer of epoxy order called "SU-8" and polymer of novolak resin called "AZ-1518". The result, "SU-8" was formed pattern to 3.5um thickness, and "AZ-1518" about pattern 3um thickness. Also, It was been 6um thickness at same pattern area.

• Design & Manufacturing
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• v.11 no.3
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• pp.29-34
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• 2017

Increased demand for parts with micro-pattern structure made of metals, ceramics, and composites in various fields such as medical ultrasonic sensors, CT collimators, and ultra-small actuator parts. Micro powder injection molding (PIM) is a technology for manufacturing micro size, high volume, complex, precision, net-shape components from either metal or ceramic powder. In the present study, a standard mold with a variable insert core capable of producing various micro patterns was investigated. An injection molding test was performed on a standard mold using a line type micro-pattern core having an aspect ratio of 2, a slenderness ratio of 70, a pattern size of $200{\mu}m$, and a pattern spacing of $150{\mu}m$. During the filling process, the deformation of the mold with large aspect ratio and slenderness ratio was analyzed by the experiment and the numerical simulation according to the position of the gate. We proposed a mold structure that minimizes mold deformation by gate modification and enables uniform pattern filling behavior.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.05a
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• pp.452-457
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• 2003

As a fundamental study on developing elements with micro shape, micro mold parts machining and experiment of injection molding using it were performed. The ultra precision micro machining system with high functionality was fabricated, and utilized in the machining of micro parts. By using this machining system and micro end-mill tool, a micro circle column structure of high aspect ratio, diameter 60 $\mu\textrm{m}$, height 500 $\mu\textrm{m}$, was fabricated. And a micro lens molds were fabricated by using ball end-mill tool of 300 $\mu\textrm{m}$ diameter and diamond fly-cut tool of 150 $\mu\textrm{m}$ radius. A micro injection molding machine, which is clamping force 1.75 ton, injection capacity 2.8cc, was fabricated for injection molding experiment using micro molds. The injection molding experiment was performed by using the injection molding machine, micro cylinder structures and lens molds. This paper introduces these micro machining system and injection molding machine and demonstrates examples of injection molding using fabricated molds.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.5-11
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• 2005

Among the micro machining techniques, micro EDM is generally used for machining micro holes, pockets, and micro structures on difficult-cut-materials. Micro EDM parameters such as applied voltage, capacitance, peak current, pulse width, duration time are very important to fabricate the tool electrode and produce the micro structures. Developed micro EDM machine is composed of a 3-axis driving system and RC circuit equipped with pulse generator. In this paper, using micro EDM machine, the characteristics of micro EDM process are investigated and it is applied to micro holes, slots, and pockets machining. Through experiments, relations between machined surface and voltages and between MRR and feedrate are investigated. Also the trends of tool wear are investigated in case of hole and slot machining.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.319-320
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• 2009