• 한국재료학회지
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• 제23권8호
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• pp.447-452
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• 2013

Recently, products that a have 3-dimensional(3D) micro structure have been in wide use. To fabricate these 3D micro structures, several methods, such as stereo lithography, reflow process, and diffuser lithography, have been used. However, these methods are either very complicated, have limitations in terms of patterns dimensions or need expensive components. To overcome these limitations, we fabricated various 3D micro structures in one step using a pair of diffusers that diffract the incident beam of UV light at wide angles. In the experiment, we used positive photoresist to coat the Si substrate. A pair of diffusers(ground glass diffuser, opal glass diffuser) with Gaussian and Lambertian scattering was placed above the photomask in the passage of UV light in the photolithography equipment. The incident rays of UV light diffracted twice at wider angles while passing through the diffusers. After exposure, the photoresist was developed fabricating the desired 3D micro structure. These micro structures were analyzed using FE-SEM and 3D-profiler data. As a result, this dual diffuser lithography(DDL) technique enabled us to fabricate various microstructures with different dimensions by just changing the combination of diffusers, making this technology an efficient alternative to other complex techniques.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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• pp.1155-1158
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• 2007

To reduce acoustic noise level of an AV projector, primary noise sources of AV projector were analyzed. Based on the analyzed result, methods to control each source are presented and tried. Structure-borne noise can be controlled by anti vibration design of mounting system, and air-borne noise by reducing flow resisitvity.

• 콘크리트학회논문집
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• 제29권1호
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• pp.101-107
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• 2017

본 연구는 시멘트계 재료의 프랙탈 특성에 관한 기초적 연구로써, 고로슬래그 미분말 혼입 시멘트 페이스트의 공극 구조를 수은압입법을 이용하여 측정하였고, 측정된 결과를 프랙탈 모델에 적용하여 그 특성을 분석하였다. 분석 결과, 고로슬래그미분말 혼입 시멘트 페이스트의 공극 구조는 그 범위가 나노미터부터 밀리미터 단위까지 다양하게 분포하는 불규칙한 조직이기 때문에, 전체 영역에 대한 프랙탈 차원을 산정했을 때 각 공극 영역의 특성을 반영할 수 없다. 따라서 프랙탈 차원 산정 시 공극 영역을 나누어서 분석하였다. Zhang and Li (1995) model을 적용했을 때, 시멘트와 GGBFS의 수화반응 결과 생성된 C-S-H 내의 gel pores 및 small capillary pores에 해당하는 micro 영역과 large capillary pores에 해당하는 macro 영역에서 각각 프랙탈 특성이 나타나는 결과를 보였다. 또한 macro 영역보다 micro 영역의 공극 표면이 더 불규칙한 형상을 나타내었다. Ji et al. (1997) model을 적용할 경우, micro 영역이 C-S-H 내의 gel pores에 해당하는 micro I과 small capillary pores에 해당하는 micro II로 구분되었으며, 각각의 프랙탈 특성이 산정되었다. 또한 Zhang and Li (1995) model을 결과와 유사하게, macro, micro II, micro I의 순서대로 공극 크기가 작아질수록 VFD 결과 값이 감소하였으며, 이는 곧 공극의 복잡성이 증가함을 나타낸다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.1945-1948
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• 2004

This paper describes the design and construction of a micro robotic system addressing such important aspects as versatility and low cost for rapid development and test of new control algorithm. The design and structure of micro robots are presented in detail. The supervision oriented concept is designed for controlling a group of micro robots. In this concept, the vision system recognizes the environment and the host computer decides the micro robot action based on the information from the vision system. In addition, the micro robots can be implemented cheaply and small in size because the structure of supervision oriented system is simplest. The experimental results and the performance of the proposed micro robotic system are discussed.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2002년도 금형가공 심포지엄
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• pp.253-259
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• 2002

Micro cell structures with high aspect ratio were fabricated by injection molding method. The mold inserts had dimension $1.9cm\times8.3cm$ composed of a lot of micro posts and were fabricated by LIGA process. The size of the micro posts was $157{\mu}m\times157{\mu}m\times500{\mu}m$ and the gaps between two adjacent posts were $50{\mu}m$. Using Polymethylmethacrylate (PMMA) injection molding was performed. The key experimental variables were temperature, pressure, and time. By controlling these, good shaped mim cell structures with $50{\mu}m$ in wall thickness and $500{\mu}m$ in depth were obtained. In order to understand micro molding mechanism, shape changes of molded PMMA were studied with experimental variables. And the durability of mold insert was investigated, too. The results show that the most important factor in molding processes was the mold temperature that is closely related to the filling of the melt into the micro cavity. And the holding time before cooling showed a great effect on the quality of molded PMMA.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.549-550
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• 2006

It has become topic continuously at MEMS or semiconductor process to form three-dimensional multilayer structure. In this paper, we devised the new polymer pattern method that has multilayer structure. This is method that uses different kind of polymeric material. Specially, polymers used in this study that we propose became all pattern by photolithography, prevented that process increases. Here, polymer that we use used polymer of epoxy order called "SU-8" and polymer of novolak resin called "AZ-1518". The result, "SU-8" was formed pattern to 3.5um thickness, and "AZ-1518" about pattern 3um thickness. Also, It was been 6um thickness at same pattern area.

• Design & Manufacturing
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• 제11권3호
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• pp.29-34
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• 2017

Increased demand for parts with micro-pattern structure made of metals, ceramics, and composites in various fields such as medical ultrasonic sensors, CT collimators, and ultra-small actuator parts. Micro powder injection molding (PIM) is a technology for manufacturing micro size, high volume, complex, precision, net-shape components from either metal or ceramic powder. In the present study, a standard mold with a variable insert core capable of producing various micro patterns was investigated. An injection molding test was performed on a standard mold using a line type micro-pattern core having an aspect ratio of 2, a slenderness ratio of 70, a pattern size of $200{\mu}m$, and a pattern spacing of $150{\mu}m$. During the filling process, the deformation of the mold with large aspect ratio and slenderness ratio was analyzed by the experiment and the numerical simulation according to the position of the gate. We proposed a mold structure that minimizes mold deformation by gate modification and enables uniform pattern filling behavior.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 춘계학술대회논문집
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• pp.452-457
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• 2003

As a fundamental study on developing elements with micro shape, micro mold parts machining and experiment of injection molding using it were performed. The ultra precision micro machining system with high functionality was fabricated, and utilized in the machining of micro parts. By using this machining system and micro end-mill tool, a micro circle column structure of high aspect ratio, diameter 60 $\mu\textrm{m}$, height 500 $\mu\textrm{m}$, was fabricated. And a micro lens molds were fabricated by using ball end-mill tool of 300 $\mu\textrm{m}$ diameter and diamond fly-cut tool of 150 $\mu\textrm{m}$ radius. A micro injection molding machine, which is clamping force 1.75 ton, injection capacity 2.8cc, was fabricated for injection molding experiment using micro molds. The injection molding experiment was performed by using the injection molding machine, micro cylinder structures and lens molds. This paper introduces these micro machining system and injection molding machine and demonstrates examples of injection molding using fabricated molds.

• International Journal of Precision Engineering and Manufacturing
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• 제6권2호
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• pp.5-11
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• 2005

Among the micro machining techniques, micro EDM is generally used for machining micro holes, pockets, and micro structures on difficult-cut-materials. Micro EDM parameters such as applied voltage, capacitance, peak current, pulse width, duration time are very important to fabricate the tool electrode and produce the micro structures. Developed micro EDM machine is composed of a 3-axis driving system and RC circuit equipped with pulse generator. In this paper, using micro EDM machine, the characteristics of micro EDM process are investigated and it is applied to micro holes, slots, and pockets machining. Through experiments, relations between machined surface and voltages and between MRR and feedrate are investigated. Also the trends of tool wear are investigated in case of hole and slot machining.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.319-320
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• 2009