• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.258-259
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• 2006

New powder compaction process, in which a Bingham semi-solid/fluid mold is utilized, is developed to fabricate micro parts. In the present process, a powder material is filled as slurry in a solid wax mold, dried and compressed. The wax is heated during compaction and becomes semi-solid state, which can acts as a pressurized medium for isostatic compaction. Since the compacted micro parts are very fragile, the mold's temperature is controlled to higher than its melting point during unloading, to avoid breakage of the compacts. To demonstrate effectiveness of this process, some micro compacts of alumina are shown as examples.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.7
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• pp.761-768
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• 2011

The large surface micro machining system includes the equipments and processes for manufacturing the ultra precision micro patterned products with large surface through the mechanical machining. Recent major issue on the micro machining technology may be the development of optical parts for the back light unit of display which has the largest market. This special issue makes up with three parts; the large surface micro machining system and machine, machining process and forming process. In this paper, the state-of-the-art and core technology of large surface micro machining system is introduced with focus on the manufacturing technology for the back light unit of LCD TV. Then, some research results on the development of a roll die lathe is introduced which involves the concept of machine design, improvement of thermal characteristics in the spindle system, improvement of relative parallelism and straightness between spindle system and long stroke feed table, machining of micro pitch patterns. Finally, the direct forming process is introduced as the future work in the large surface micro machining field.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1885-1888
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• 2003

As high technology industries such as IT and display have developed, demand for application parts of micro lens and lens array has been extremely increasing. According to these trends, many researchers are studying on the fabrication technology for parts of the micro lens by a variety of methods such as MEMS, Lithography, LIGA and so on. In this paper, we have performed researches related to ultra precision micro lens, lens array mold and fabrication of Lenticular lens mold for three-dimensional display by using mechanical micro end-milling and fly-cutting fabrication method. Tools used in this research were a diamond tool of R 150$\mu\textrm{m}$. Cutting conditions set up feed rate, spindle revolution. depth of cut and dwell time as variables. And we analyzed surface quality variation of the processed products according to the cutting conditions, and then carried out experiments to search the optimum conditions. Through this research, we have confirmed that we can fabricate the ultra precision micro lens mold with surface roughness Ra=20nm and the holographic lens mold by using micro end-milling and fly-cutting fabrication method. Furthermore, we demonstrated problems happened in the fabrication of the micro lens and established the foundation of experimental study for formulating its improvement plan.

• Proceedings of the Materials Research Society of Korea Conference
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• 2005.05a
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• pp.173-173
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• 2005

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.459-465
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• 2004

Micro-factory is a small system to produce a small parts and this manufacturing system has advantages such as energy saving, resources saving, and manufacturing space saving. Micro-factory are classified according to production type and has many applications in various industry. In this paper, the basic concept and applications of micro-factory are introduced.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.05a
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• pp.237-240
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• 2004

In this study, we have developed a new $UV(\lambda=355nm)$ laser micromachining technology by direct ablation method without masks. This technology allows that 3D micro parts can be fabricated rapidly and efficiently with a low price. And it has a benefit of reducing fabricating process simply. Due to micro parts' fabrication, such technologies need the control of XYZ stages with high precision, the design of optical devices to maintain micron spot sizes of laser beam and the control technology of laser focus. Also, we have fabricated a micro-channel through the developed laser micromachining technology and verified it through the results.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3365-3370
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• 2007

We developed micro power generation system using piezoelectric materials. In our system, the ambient vibrating energy is converting to electric energy by deflection of piezoelectric beams. The system consists of energy generating parts, converting enhancement parts, electric regulation and charging parts, and interface with small-energy-consuming mobile devices. The geometry of piezoelectric beams, the source of vibrating energy, and the electric load of target application determine the characteristics of generating electric power, such as impedance, voltage, current and power density. Therefore, we made a model for analysis of generating power with given information such as piezoelectric materials, geometry, vibration type, and mass. With this model, we can calculate capacitance of piezoelectric beams, generating voltage, current, and power. To obtain maximum energy transfer efficiency, we approached this study in the view of material, electrical, and mechanical engineering

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.410-413
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• 2005

There are technical requirements to manufacture large size functional parts with not only simple geometries like a flat or spherical surface but also sculptured geometries. In addition, the required machining accuracy for these parts is becoming more severe day-by-day. In general, the forms of machined parts are determined by relative position between the workpiece and the tool during cutting. To improve machining accuracy, the relative position error should be maintained within the required accuracy. This study deals with estimation and calibration of depth of cut using AE signal in micro-machining.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.105-109
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• 2001

The micro optical parts such as ferrules are required to be manufactured within very small tolerances, as the slight deviation of the tolerance would give very large amount of loss in communication efficiency. For efficient optical communication, outer diameter, fiber diameter, fiber separation and eccentricity are significant parameters to be inspected., Thus we developed an automatic inspection system to evaluate shape parameters of the optical fiber connectors(ferrule) upto submicron accuracy using machine vision. new optical probe of multi fields of views has been developed and the image processing and data analysis algorithms have been complemented in real time basis. The developed system is successfully used in the practical ferrule manufacturing industry, and about 0.1$\mu\textrm{m}$ accuracy can be obtained with very fast inspection time.

• JSTS:Journal of Semiconductor Technology and Science
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• v.7 no.3
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• pp.133-139
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• 2007

Future MEMS systems will be composed of larger varieties of devices with very different functionality such as electronics, mechanics, optics and bio-chemistry. Integration technology of heterogeneous devices must be developed. This article first deals with the current development trend of new fabrication technologies; those include self-assembling of parts over a large area, wafer-scale encapsulation by wafer-bonding, nano imprinting, and roll-to-roll printing. In the latter half of the article, the concept towards the heterogeneous integration of devices and functionality into micro/nano systems is described. The key idea is to combine the conventional top-down technologies and the novel bottom-up technologies for building nano systems. A simple example is the carbon nano tube interconnection that is grown in the via-hole of a VLSI chip. In the laboratory level, the position-specific self-assembly of nano parts on a DNA template was demonstrated through hybridization of probe DNA segments attached to the parts. Also, bio molecular motors were incorporated in a micro fluidic system and utilized as a nano actuator for transporting objects in the channel.