• Journal of Korean Society for Atmospheric Environment
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• v.22 no.E2
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• pp.78-88
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• 2006

In order to study the characteristics of cloud, a real-scale experiment for cloud generation was carried out using an extinct vertical mine (430 m height) located in the northeastern Honshu, Japan. The dry particles generated from the three-step concentrations of NaCl solutions were used for cloud generation. The number size distributions of initial dry particles and cloud droplets were monitored by Scanning Mobility Particle Sizer (SMPS) and Forward Scattering Spectrometer Probe (FSSP) at bottom and upper sites of pit, respectively. The polymeric water absorbent film (PWAF) method was employed to measure liquid water content ($W_L$) as a function of droplet size. Moreover the chemical properties of individual droplet replicas were determined by micro-PIXE. The CCN number concentration shows the lognormal form in dependence of the particle size, while the number size distributions of droplets are bimodal showing the peaks around $9{\mu}m$ and $20{\mu}m$ for every case. In comparison to background mineral particles, right shifting of size distribution line for NaCl particles was occurred. When NaCl solutions with three-step different concentrations were neulized, $W_L$ shows the strong droplet size dependence. It varied from $10.0mg\;m^{-3}$ up to $13.6mg\;m^{-3}$ with average $11.6mg\;m^{-3}$. A good relationship between $W_L$ and cloud droplet number concentration was obtained. Both chemical inhomogeneities (mixed components with mineral and C1) and homogeneities (only mineral components or C1) in individual droplet replicas were obviously observed from micro-PIXE elemental images.

• Journal of Korean Society for Atmospheric Environment
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• v.16 no.E
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• pp.29-38
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• 2000

For the detailed characterization of atmospheric aerosol, the analysis of single particle is highly valuable. In this study, to investigate the characteristics of single Asian dust storm particles, scanning electron microscope(SEM) coupled with and energy dispersive X-ray microanalyzer(EDX) and micro-PIXE were applied. Sampling was performed at Kyoto University located in Kyoto, Japan, in spring of 1999. Mass concentration during Asian dust storm events was higher roughly 3∼5 times than measured in the season of the highest concentration. Single particles were generally sharp-edged and irregular in shape and contained mostly crustal elements. Significant amount of S in coarse fraction was detected in individual particles. A large particles in coarse fraction existed as the mixture of soil components and S. A good agreement between the result of SEM-EDX analysis and that iof micro-PIXE analysis was obtained in this study.

• Journal of the Korean Vacuum Society
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• v.10 no.3
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• pp.361-367
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• 2001

Recently, Chemical Mechanical Polishing(CMP) has become a leading planarization technique as a method for silicon wafer planarization that can meet the more stringent lithographic requirement of planarity for the future submicron device manufacturing. The SOI(Silicon On Insulator) wafer has received considerable attention as bulk-alternative wafer to improve the performance of semiconductor devices. In this paper, the objective of study is to investigate Material Removal Rate(MRR) and surface micro-roughness effects of slurry and pad in the CMP process. When particle size of slurry is increased, Material Removal rate increase. Surface micro-roughness is greater influenced by pad than by particle size of slurry. As a result of AM measurement, surface micro-roughness was improved from 27 $\AA$ Rms to 0.64 $\AA$Rms.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.05b
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• pp.34-37
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the inter-metal dielectrics (IMD) layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}m$ POU (point of use) filter, which is depth-type filter and has 80% filtering efficiency for the $1.0{\mu}m$ size particle. In this paper, we studied the relationship between defect generation and pad count to understand the exact efficiency of the slurry filtration, and to find out the appropriate pad usage. Our preliminary results showed that it is impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the flow rate of slurry to overcome depth type filters weak-point, and to install the high spray of de-ionized Water (DIW) with high pressure.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.7
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• pp.991-996
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• 2002

This paper presents the fabrication method of a micro-riblet film (MRF) using MEMS technology and the experimental results of the drag reduction of an airfoil with MRFs. Riblets having grooved surface in the streamwise direction has been proven as an effective passive control technique of the drag reduction. A V-grooved pattern on (100) silicon wafer is etched with anisotropic bulk micromachining. The MRF is completed by replicating the V-grooved pattern with polydimethylsiloxane (PDMS). Experiments were performed by measuring a velocity field behind the trailing edge of a NACA 0012 airfoil with and without MRFs in a closed-type subsonic wind tunnel using particle image velocimetry (PlV) technique. The MRF provides about 3.8 % drag reduction compared to the drag on a smooth airfoil when the freestream velocity of wind tunnel is 3.3 m/s.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.10 no.2
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• pp.723-743
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• 2016

Indoor positioning is considered an enabler for a variety of applications, the demand for an indoor positioning service has also been accelerated. That is because that people spend most of their time indoor environment. Meanwhile, the smartphone integrated powerful camera is an efficient platform for navigation and positioning. However, for high accuracy indoor positioning by using a smartphone, there are two constraints that includes: (1) limited computational and memory resources of smartphone; (2) users' moving in large buildings. To address those issues, this paper uses the TC-OFDM for calculating the coarse positioning information includes horizontal and altitude information for assisting smartphone camera-based positioning. Moreover, a unified representation model of image features under variety of scenarios whose name is FAST-SURF is established for computing the fine location. Finally, an optimization marginalized particle filter is proposed for fusing the positioning information from TC-OFDM and images. The experimental result shows that the wide location detection accuracy is 0.823 m (1σ) at horizontal and 0.5 m at vertical. Comparing to the WiFi-based and ibeacon-based positioning methods, our method is powerful while being easy to be deployed and optimized.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.37-40
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• 2003

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. It is well known that the presence of hard and larger size particles in the CMP slurries increases the defect density and surface roughness of the polished wafers. In this paper, we have studied aging effect the of CMP slurry as a function of particle size. We prepared and compared the self-developed silica slurry by adding of abrasives before and after annealing. As our preliminary experiment results, we could be obtained the relatively stable slurry characteristics comparable to original silica slurry in the slurry aging effect.

• Structural Engineering and Mechanics
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• v.55 no.2
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• pp.315-334
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• 2015

This study's primary aim is to check the existence of a representative volume element for granular materials and determine the link between the properties (responses) of macro structures and the size of the discrete particle assembly used to represent a constitutive relation in a two-scale model. In our two-scale method the boundary value problem on the macro level was solved using finite element method, based on the Cosserat continuum; the macro stresses and modulus were obtained using a solution of discrete particle assemblies at certain element integration points. Meanwhile, discrete particle assemblies were solved using discrete element method under boundary conditions provided by the macro deformation. Our investigations focused largely on the size effects of the discrete particle assembly and the radius of the particle on macro properties, such as deformation stiffness, bearing capacity and the residual strength of the granular structure. According to the numerical results, we suggest fitting formulas linking the values of different macro properties (responses) and size of discrete particle assemblies. In addition, this study also concerns the configuration and displacement fluctuation of discrete particle assemblies on the micro level, accompanied with the evolution of bearing capacity and deformation on the macro level.

• Korean Chemical Engineering Research
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• v.45 no.2
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• pp.203-207
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• 2007

In this paper efficient method for particle removal from silicon wafers by usage of HF and ozone was studied. It was found that at least 0.3 vol% concentration of HF was required for particle removal and removal efficiency increased with the application of megasonic in ozonated water. Additional cleaning with minute amount of ammonia (0.01 vol%) after HF/Ozone step showed over 99% in removal efficiency. It is proposed that the superior cleaning efficiency of HF-Ozone-ammonia is due to micro-etching of silicon surface and impediment of particle re-adsorption in alkali environment. Compared to SC-1 cleaning method micro roughness has also been slightly improved. Therefore it is expected that HF-ozone-ammonia cleaning method is a viable alternative to the conventional wet cleaning methods.

• Atmosphere
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• v.15 no.3
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• pp.149-153
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• 2005

A balloon-borne Optical Particle Counter (hereafter "OPC Sonde"), which was developed by the atmospheric research group of Nagoya University, is used for getting the information of vertical profile of particle size and concentration in Anmyeon ($36^{\circ}32^{\prime}N$ $126^{\circ}19^{\prime}E$) on 18 March 2005. A range of five different particle sizes is shown in the vertical profile of aerosol number density estimated from the OPC Sonde. It was found that small size particles have vertically larger aerosol number density than relatively big ones. For all size ranges the vertical aerosol number density shows a decreased pattern as the altitude becomes higher. The aerosol number density of $0.3{\sim}0.5{\mu}m$, $0.5{\sim}0.8{\mu}m$, $0.8{\sim}1.2{\mu}m$ size ranges at the 10km height, which is the tropopause approximately, are $1,000,000ea/m^3$, $100,000ea/m^3$, $10,000ea/m^3$ respectively. The data of OPC Sonde are also compared with the data of PM10 $\beta$-ray) and Micro Pulse Lidar which are operating at Korea Global Atmosphere Watch Observatory in Anmyeon.