• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1073-1077
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• 2003

This study aims to investigate the fabrication process of nano silicon mold using electron beam lithography (EBL) to generate the nanometer level patterns by nano-imprinting technology. the nano-patterned mold including 100mm pattern size has been fabricated by EBL with different doses ranged from 22 to 38 ${\mu}C/cm^2$ on silicon using the conventional polymethylmetharcylate(PMMA) resist. The silicon mold is fabricated with various patterns such as circles, rectangles, crosses, oblique lines and mixed forms, The effect of dosage on pattern density in EBL is discussed based on SEM (Scannning Electron Microscopy) analysis of fabricated molds. The mold surface is modified by hydrophobic fluorocarbon (FC) thin films to avoid the stiction during nano-imprinting process.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.340-341
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• 2006

High functional micro devices are demanded in a variety of fields. For realising such demands, development of high-precision micro-components installed in the devices are needed. To achieve high-precision in the mold processing of micro-components, the development of mold materials, i.e., the development of WC-Co hardmetal with higher hardness and fracture strength is essential, together with the developments of processing technology of high precision mold and mold-forming technology of high precision micro-components, etc. The role of development of the finer submicro-grained hardmetal in a NEDO national project aiming the integrated development of these all technologies and some results are mainly explained.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.258-259
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• 2006

New powder compaction process, in which a Bingham semi-solid/fluid mold is utilized, is developed to fabricate micro parts. In the present process, a powder material is filled as slurry in a solid wax mold, dried and compressed. The wax is heated during compaction and becomes semi-solid state, which can acts as a pressurized medium for isostatic compaction. Since the compacted micro parts are very fragile, the mold's temperature is controlled to higher than its melting point during unloading, to avoid breakage of the compacts. To demonstrate effectiveness of this process, some micro compacts of alumina are shown as examples.

• Korea-Australia Rheology Journal
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• v.19 no.3
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• pp.165-169
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• 2007

The light guide plate (LGP) of LCD-BLU (Liquid Crystal Display-Back Light Unit) is usually manufactured by forming numerous dots by etching process. However, the surface of those etched dots of LGP is very rough due to the characteristics of etching process, so that its light loss is relatively high due to the dispersion of light. Accordingly, there is a limit in raising the luminance of LCD-BLU. In order to overcome the limit of current etched-dot patterned LGP, micro-lens pattern was tested to investigate the possibility of replacing etched pattern in the present study. The micro-lens pattern fabricated by the modified LiGA with thermal reflow process was applied to the optical design of LGP. The attention was paid to the effects of different optical pattern type (i.e. etched dot, micro-lens). Finally, the micro-lens patterned LGP showed better optical qualities than the one made by the etched-dot patterned LGP in luminance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.623-624
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• 2005

Micro injection molding is a branch of micro system technology and has been under development for the mass manufacture of micro parts. Enhanced technological products like micro optical devices are entering the market. This paper presents fundamental research on the injection molding technique in micro fabrication. In order to successful manufacturing of micro plastic parts, it is necessary to research for development of micro-injection machine, machining of micro mold, decision of optimum injection conditions and the research for polymer material. Therefore in this study, in order to machining of micro mold, a mold core with microscopic V-shaped groove was tooled by ultra-precise tooling machine. The transcription experiments with a polymer, PMMA resin on the surface of core with Ni plating were carried out and surface profile of injected parts was measured with AFM.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.138-145
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• 2006

An injection molding is necessary to mass-product for micro-nano system, so micro-nano mold must be developed for injection molding. The micro-nano mold has precision and strength to overcome a surround of injection. So in this paper, two methods were used. First, after etching the Al, Ni was electroplated in etched AI. The other, LIGA method was used. A temperature and thickness of Ni are important factors in these methods. So after fabrication, the simulation was processed to find optimal thickenss of Ni and temperature.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.10a
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• pp.294-297
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• 2004

RTP(Rapid Thermal Pressing) is to fabricate desired pattern on polymer substrate by pressing patterned mold against the substrate heated around glass transition temperature. For a successful RTP process, the whole process including heating, molding, cooling and demolding should be conducted 'rapidly' as possible. As the RTP process is effective in replicating patterns on flat large surface without causing shape distortion after cooling, it is being widely used for fabricating various micro/bio application components, especially with channel-type microstructures on surface. This investigation finally aims to develop a RTP process machine for mass-producing micro/bio application components. As a first step for that purpose, we intended to examine the technological difficulties for realizing mass production by RTP process. Therefore, in the current paper, 4 kinds of RTP machines were examined and then the RTP process was conducted experimentally for PMMA film by using one of the machines, HEX 03. The micro-patterned molds used for RTP experiment was fabricated from silicon wafer by semi-conduct process. The replicated micro patterns on PMMA films were examined using SEM and the causes of defect observed in the replicated patterns were discussed.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2002.02a
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• pp.253-259
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• 2002

Micro cell structures with high aspect ratio were fabricated by injection molding method. The mold inserts had dimension $1.9cm\times8.3cm$ composed of a lot of micro posts and were fabricated by LIGA process. The size of the micro posts was $157{\mu}m\times157{\mu}m\times500{\mu}m$ and the gaps between two adjacent posts were $50{\mu}m$. Using Polymethylmethacrylate (PMMA) injection molding was performed. The key experimental variables were temperature, pressure, and time. By controlling these, good shaped mim cell structures with $50{\mu}m$ in wall thickness and $500{\mu}m$ in depth were obtained. In order to understand micro molding mechanism, shape changes of molded PMMA were studied with experimental variables. And the durability of mold insert was investigated, too. The results show that the most important factor in molding processes was the mold temperature that is closely related to the filling of the melt into the micro cavity. And the holding time before cooling showed a great effect on the quality of molded PMMA.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.3
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• pp.224-230
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• 2009

FIB has been commonly used as a very powerful tool in the semiconductor industry. It is mainly used for mask repair, device correction, failure analysis and IC error correction, etc. Currently, FIB is not being applied to the fabrication of the micro and nano-structured mold, because of low productivity. And also sputtering rate has been required to fabricate 3D shape. In the paper, we studied the FIB-Sputtering rate according to mold materials. And surface roughness characteristics had been analysed for micro or nano mold fabrication. Si wafer, Glassy Carbon, STAVAX and DLC that have been normally considered as good micro or nano mold materials were used in the study.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.168-171
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• 2009

High-frequency induction is an efficient way to heat mold surface by electromagnetic induction in a non-contact procedure. Though the induction heating has an advantage in terms of its rapid-heating capacity on the mold surface, it still has a restriction on mold temperature control due to geometric restriction of an induction coil according to the mold shape. It has been recently applied to the injection molding of thin-walled parts or micro/nano structures. For localized induction heating, an injection mold composed of ferromagnetic material and paramagnetic material is used. The electromagnetic induction concentrates on the ferromagnetic material, from which we can selectively heat for the local mold elements. The present study proposed a localized induction heating method by means of selective use of mold material. The feasibility of the proposed heating method is investigated through the comparison of experimental observations according to the mold material.