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Development of Micro mold with Electroplating Ni for Injection molding  

Hwang, Kyo-Il (성균관대학교 기계공학부 Microsystem Lab.)
Kim, Hun-Mo (성균관대학교 기계공학부)
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Abstract
An injection molding is necessary to mass-product for micro-nano system, so micro-nano mold must be developed for injection molding. The micro-nano mold has precision and strength to overcome a surround of injection. So in this paper, two methods were used. First, after etching the Al, Ni was electroplated in etched AI. The other, LIGA method was used. A temperature and thickness of Ni are important factors in these methods. So after fabrication, the simulation was processed to find optimal thickenss of Ni and temperature.
Keywords
Micro mold; Electroplating; LIGA; Injection molding;
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1 Roberts, K., Williamson, F., 'The Fabrication of and Array of Microcavities Utilizing SU-8 Photoresist As an Alternative 'LIGA' Technology,' University Government Industry Microelectronics Symposium, Proceedings of 13th Biennial, pp. 139-141, 1999   DOI
2 Madou, M. J., 'Fundamentals of Microfabrication Second Edition,' CRC, pp. 365-367, 2002
3 Wenmin, Qu, Christian, wengel, Adreas, Jahn, 'UV-LIGA:A Promising and Low-Cost Variant for Microsystem Technology,' Conference on Optoelectronic and Microelectronic Materials and Devices Porceedings, pp. 380-383, 1999   DOI
4 Noh, H. S., Huang, Y. and Hesteth, P. J., 'Parylene micromolding, a rapid and low-cost fabrication method for parylene microchannel,' Sensors and Actuators B: Chemical, Vol. 102, No.1, pp. 78-85, 2004   DOI   ScienceOn
5 Ando, T., Shikido, M., Sato, K., 'Tensile-mode fatigue testing of silicon films as structural materials for MEMS,' Sensor and Actuators A, A93, pp. 70-75, 2001   DOI   ScienceOn
6 Lorenz, H., Despont, M., Fahmi, N., 'SU-8: A Low cost Negative Resist for MEMS,' J. Micromech. Microeng, Vol. 7, pp. 121-124, 1997   DOI   ScienceOn
7 Lorenz, H., Despont, M., Vettiger, P., Renaud, P., 'Fabrication of Photoplastic High-Aspect Ratio Microparts and Micromolds Using SU-8 UV Resist,' Microsystem Technologies, Vol. 4, No. 8, pp. 143-146, 1998   DOI
8 Becker, E. W., Ehrfeld, W., Hagmann, P., 'Fabrication of Microstructures with High Aspect Ratios and Great Structual Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding (LIGA process),' Microelectronic Engineering, Vol. 4, pp. 35-36, 1986   DOI   ScienceOn
9 Heckele, M., Bacher, W., Muller, K. D., 'Hot embossing - The molding Technique for Plastic Microstructures,' Microsystem Technologies, Vol. 4, pp. 122-124, 1998   DOI
10 Kapels, H., Aigner, R., Binder, J., Fracture strength and fatigue of polysilicon determined by a novel thermal actuator,' Proceeding of the 29th European Solid-State Device Research Conference, IEEE, pp. 1522-1528, 1999   DOI   ScienceOn