• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.62-71
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• 1999

Integrating micro-machined sensors and actuators on the conventional devices with the copper power lines was incompatible to fabricate the mass produced micro electromechanical system (MEMS) devices. To achieve the compatibility of the wiring method between MEMS parts and devices, we developed the three-dimensional sputter-evaporation system that coats micropatterned thin copper films on the surface of the MEMS element. The system consists of a process chamber, two branch chambers, the substrate holder, and a linear-rotary motion feedthrough. Thin copper film was sputtered and evaporated on the biocompatible polymer, Pellethane$^{circed{R}}$ and silicone, catheter that is 2 mm in diameter and 700 mm in length. The metal film coating technique with three-dimensional thin film sputter-evaporation system was developed to apply the power and signal lines on the micro active endoscope. In this paper, we developed the three-dimensional metal film sputter-evaporation system operated on the low temperature for the biopolymeric substrates used in the medical MEMS devices.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.285-290
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• 2005

Micro On-Off valves are currently recognized as the core technology in the fields of the micro fluid chip fur medical applications and production lines of semi-conduct chip. Micro valves that operate by compressed air need the high-speed responsibility, repeatability, the absorbability and the uniform pressure by the poppet. In this study, Micro On-Off valves that posses the high-speed responsibility and the high rate of flow have designed and analyzed through the law of equivalent magnetic circuit and Finite Element Method (FEM) respectively. In case of poppet, Flow field characteristic was analyzed by the variation of poppet and it was able to display flow field by changing the location of the poppet. Also, we verified possibility of the design through the static and dynamic pressure and the 3D distribution curve of the force by working the front poppet.

• Transactions of Materials Processing
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• v.13 no.3
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• pp.230-235
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• 2004

A new design based on the appropriate geometry of molded part and type of runner system under the optimal processing conditions was proposed to minimize the micro weld lines on the sub deco surface molded by two shot molding. Theoretical and experimental studies were conducted to examine the cause of the weld lines during the overmolding process in two shot molding. Various dimensions and geometries of substrate$(1^{st}shot)$ and the wall thickness of overmold$(2^{nd}shot)$ have been proposed to avoid the weld lines which are the most inevitable appearance defects occurred on the sub deco. The each design proposal was analyzed by mold flow analysis after part modeling. The analysis results were compared with molded part from mass production tool. It could be seen that from the analysis that the proper geometry of plastic part and type of runner system considering pressure drop under the optimal processing conditions were the most influential factors to avoid weld lines occured on the sub deco.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.9
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• pp.20-25
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• 2010

The effect of micro surface structure on printing for printed electronics has been studied experimentally. The photolithography MEMS fabricationwass used to make a SU-8 molder which has micro structures on the surface, and the PDMS micro structure was fabricated by the PDMS molding method. In the aspect of printed electronics, we used silver paste conductive ink. We measured the surface energy variation on pillar microstructure. The microstructure was used to real printing experiment by a screen printing. We printed 1cm micro lines which have $30{\sim}250{\mu}m$ width, and checked the conductivity to sort out opened line pattern. Printability was defined by success probability of printed patterns and we found that the present microstructures improve the printability significantly.

• Journal of the Korean Society of Industry Convergence
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• v.20 no.4
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• pp.307-311
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• 2017

Ultra short pulse laser processing with the PI (polyimide) substrate is conducted to increase flexibility and radius of curvatures. A femtosecond laser is used to perform micro machining by minimizing the heat effect in PI substrate. The laser processing according to the parameters, such as fabricated line width, depth, laser power, distance between lines, is carried out to understand the characteristics of fabricated lines. A bending test is carried out to evaluate bending shapes and the radius of curvature after bending and spreading it 1000 times. The results demonstrates that the radius of curvature decreases in deepen lines and increases with the augment of the number of the fabricated lines, and distance between lines.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.663-666
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• 2000

Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$$.$4H$_2$O), as a precursor, using a focused Ar$\^$+/ laser beam ($\lambda$= 514 nm) on PCB boards and glass substrates. The linewidth and thickness of the lines were investigated as a function of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler (${\alpha}$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameter using probe station and semiconductor analyzer. we compared resistivities of the patterned lines with that of the Cu bulk, respectively.

• Laser Solutions
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• v.17 no.3
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• pp.10-14
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• 2014

By the specific character of femtosecond laser controlled volume of magnitude of micrometer scale could be ablated without melting phase in SKD11 and SUS304. According to the laser machining parameters various sectional shapes could be engraved on the surface of metals. Typical engraved lines were $10{\mu}m$ wide and deep. Coarse-milled surface was made $10{\mu}m$ lower than the original elevation by a bunch of laser-engraved lines in suitable spacing. The repeated banks with a height of $10{\mu}m$ could be made with the combination of the intact area.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.60 no.8
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• pp.1467-1472
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• 2011

This paper presents an optimal operation of microgrid systems and considering a tie-lines capacities that concerned each grid. The microgrid system consists of a wind turbine, a diesel generator, and a fuel cell. An one day load profile and wind resource for wind turbine generator were used for the study. For the grid interconnection, tie-line capacities were applied as constraints. The capacity constraints of tie-lines in production cost analysis are very important issues in the operation and planning of microgrid. In optimization, the Harmony Search (HS) algorithm is used for solving the problem of microgrid system operation which a various generation resources are available to meet the customer load demand with minimum operating cost. The application of HS algorithm to optimal operation of microgrid proves its effectiveness to determine optimally the generating resources without any differences of load mismatch.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.12.1-12.1
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• 2009

For the micro conductive line, memory device fabrication process use many expensive processes such as manufactur-ing of photo mask, coating of photo resist, exposure, development, and etching. However, direct printing technology has the merits about simple and cost effective processes because nano-metal particles contained inks are directly injective without mask. And also, this technology has the advantage about fabrication of fine pattern line on various substrates such as FPCB, PCB, glass, polymer and so on. In this work, we have fabricated the fine and thick metal pattern line on flexible PCB substrate for the next generation electronic circuit using Ag nano-particles contained ink. To improve the line tolerance on flexible PCB, metal lines are fabricated by sequential prinitng method. Sequential printing method has vari-ous merits about fine, thick and high resolution pattern lines without bulge.

• Proceedings of the IEEK Conference
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• 2000.07a
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• pp.403-405
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• 2000

This paper describes a single transistor type ferroelectric field effect transistor (1Tr FeFET) memory cell scheme, which select one unit memory cell and program/read it. The well voltage can be controlled by isolating the common row well lines. Through applying bias voltage to Gate and Well, respectively, we implement If FeFET memory cell scheme in which interference problem is not generated and the selection of each memory cell is possible. The results of HSPICE simulations showed the successful operations of the proposed cell scheme.