• 제목/요약/키워드: Micro-electronics

검색결과 1,010건 처리시간 0.027초

Fluctuation in Plasma Nanofabrication

  • Shiratani, Masaharu
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.96-96
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    • 2016
  • Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

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수분수집을 위한 초발수/초친수 복합 표면 제작: 그라비아 옵셋 프린팅과 콜로이달 리소그래피 공정 (Fabrication of a Hybrid Superhydrophobic/superhydrophilic Surface for Water Collection: Gravure Offset Printing & Colloidal Lithography)

  • 지승묵;김인영;김은희;정지은;김완두;임현의
    • 한국정밀공학회지
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    • 제29권1호
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    • pp.19-24
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    • 2012
  • We demonstrate the desert beetle back mimicking hybrid superhydrophilic/superhydrophobic patterned surface by using the combination method of colloidal lithography and gravure offset printing for nano and micro patterning, respectively. The two methods are cost-effective and industrially available techniques compared to the other nano/micro patterning methods. To verify the water collecting function of the hybrid surface, the water condensation behavior is investigated on the chilled surface in ambient temperature and high humidity. Due to the synergetic effect of drop and film wise condensation, the hybrid superhydrophobic/superhydrophilic surface shows the higher efficiency than one of single wettability surfaces. The work is underway to get the good patterns of hybrid surfaces for water collecting from the dew or fog.

실시간처리 운영체계 환경에서 Hybrid 방식을 이용한 디지털 DBS 위성수신기 성능개선 (Performance Enhancement of a DBS receiver using Hybrid Approaches in a Real-Time OS Environment)

  • 김성훈;김기두
    • 방송공학회논문지
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    • 제12권1호
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    • pp.53-60
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    • 2007
  • Digital Broadcasting Satellite (DBS) 수신기는 실시간으로 위성으로부터 수신되는 방송신호를 실시간으로 NTSC A/W 스트림으로 변환하는 기능을 수행한다. 따라서 Multi-tasking 방식은 실시간 응용시스템에서 프로세서의 효율적인 사용에 매우 효과적인 방법이다. 본 논문에서는 H/W, S/W micro kernel을 이용한 hybrid approach를 통하여 H/W micro kernel과 multi-tasking programming과의 관계를 적절히 조절하여 시스템의 처리속도를 증가시켰다. 또한 DBS수신기에서의 실시간 처리를 위해 각각의 프로세스들간의 스케줄 적정성을 확보하기 위해 시스템의 요구사항이 만족되도록 개발된 critical hard real-time task들에 대한 스케줄 적정성을 먼저 평가하고, 그 밖의 soft real-time task 들에 대한 스케줄링 가능성에 대한 평가를 진행하여 전체적으로 실시간 처리에 문제가 발생하지 않도록 embedded 소프트웨어를 개발하였다.

원전 극한 환경적용을 위한 필드버스 통신망 요건 (Fieldbus Communication Network Requirements for Application of Harsh Environments of Nuclear Power Plant)

  • 조재완;이준구;허섭;구인수;홍석붕
    • 한국IT서비스학회지
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    • 제8권2호
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    • pp.147-156
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    • 2009
  • As the result of the rapid development of IT technology, an on-line diagnostic system using the field bus communication network coupled with a smart sensor module will be widely used at the nuclear power plant in the near future. The smart sensor system is very useful for the prompt understanding of abnormal state of the key equipments installed in the nuclear power plant. In this paper, it is assumed that a smart sensor system based on the fieldbus communication network for the surveillance and diagnostics of safety-critical equipments will be installed in the harsh-environment of the nuclear power plant. It means that the key components of fieldbus communication system including microprocessor, FPGA, and ASIC devices, are to be installed in the RPV (reactor pressure vessel) and the RCS (reactor coolant system) area, which is the area of a high dose-rate gamma irradiation fields. Gamma radiation constraints for the DBA (design basis accident) qualification of the RTD sensor installed in the harsh environment of nuclear power plant, are typically on the order of 4 kGy/h. In order to use a field bus communication network as an ad-hoc diagnostics sensor network in the vicinity of the RCS pump area of the nuclear power plant, the robust survivability of IT-based micro-electronic components in such intense gamma-radiation fields therefore should be verified. An intelligent CCD camera system, which are composed of advanced micro-electronics devices based on IT technology, have been gamma irradiated at the dose rate of about 4.2kGy/h during an hour UP to a total dose of 4kGy. The degradation performance of the gamma irradiated CCD camera system is explained.

정전형 마이크로 액추에이터를 이용한 초고밀도 HDD용 Dual-Stage 서보 시스템 (Dual-Stage Servo System using Electrostatic Microactuator for Super-High Density HDD)

  • 김승한;성우경;이효정;이종원;최정훈;안영재;전국진;김봉환
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권2호
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    • pp.153-160
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    • 1999
  • Dual-stage servo system for super-high density HDD has the chances of being composed of the coarse actuator(VCM) for track-seeking control and the fine actuator(microactuator) for-following control in near future. This paper presents the concept design of dual-stage servo system and the track-following control using an electrostatic microactuator for super-high density HDD. The electrostatic microactuator is designed and fabricated by MEMS(micro-electro-mechanical system) process. Both the nonlinear plant(voltage/displacement-to-electrostatic force) and the linear plant(electrostatic force-to-displacement) of the microactuator are established. Inverse function of the nonlinear plant is employed for a feedforward nonlinear compensator design. And feedforward control effect of this compensator is shown by time-domain experiments. A track-following feedback controller is designed using the feedback nonlinear compensator which is derived from the feedforward nonlinear compensator. The track-following control experiment is done to show the control efficiency of the proposed control system. And, excellent track-following control performance(2.21kHz servo-bandwidth, 7.51dB gain margin, $50.98^{\circ}$phase margin) is achieved by the proposed control system.

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3D Lithography using X-ray Exposure Devices Integrated with Electrostatic and Electrothermal Actuators

  • Lee, Kwang-Cheol;Lee, Seung S.
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제2권4호
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    • pp.259-267
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    • 2002
  • We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D microstructures are revealed by development kinetics and modulated in-depth dose distribution in resist, usually PMMA. Fabrication of X-ray masks with integrated electrothermal xy-stage and electrostatic actuator is presented along with discussions on PMMA development characteristics. Both devices use $20-\mu\textrm{m}$-thick overhanging single crystal Si as a structural material and fabricated using deep reactive ion etching of silicon-on-insulator wafer, phosphorous diffusion, gold electroplating, and bulk micromachining process. In electrostatic devices, $10-\mu\textrm{m}-thick$ gold absorber on $1mm{\times}1mm$ Si shuttle mass is supported by $10-\mu\textrm{m}-wide$, 1-mm-long suspension beams and oscillated by comb electrodes during X-ray exposures. In electrothermal devices, gold absorber on 1.42 mm diameter shuttle mass is oscillated in x and y directions sequentially by thermal expansion caused by joule heating of the corresponding bent beam actuators. The fundamental frequency and amplitude of the electrostatic devices are around 3.6 kHz and $20\mu\textrm{m}$, respectively, for a dc bias of 100 V and an ac bias of 20 VP-P (peak-peak). Displacements in x and y directions of the electrothermal devices are both around $20{\;}\mu\textrm{m}$at 742 mW input power. S-shaped and conical shaped PMMA microstructures are demonstrated through X-ray experiments with the fabricated devices.

Classification Algorithms for Human and Dog Movement Based on Micro-Doppler Signals

  • Lee, Jeehyun;Kwon, Jihoon;Bae, Jin-Ho;Lee, Chong Hyun
    • IEIE Transactions on Smart Processing and Computing
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    • 제6권1호
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    • pp.10-17
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    • 2017
  • We propose classification algorithms for human and dog movement. The proposed algorithms use micro-Doppler signals obtained from humans and dogs moving in four different directions. A two-stage classifier based on a support vector machine (SVM) is proposed, which uses a radial-based function (RBF) kernel and $16^{th}$-order linear predictive code (LPC) coefficients as feature vectors. With the proposed algorithms, we obtain the best classification results when a first-level SVM classifies the type of movement, and then, a second-level SVM classifies the moving object. We obtain the correct classification probability 95.54% of the time, on average. Next, to deal with the difficult classification problem of human and dog running, we propose a two-layer convolutional neural network (CNN). The proposed CNN is composed of six ($6{\times}6$) convolution filters at the first and second layers, with ($5{\times}5$) max pooling for the first layer and ($2{\times}2$) max pooling for the second layer. The proposed CNN-based classifier adopts an auto regressive spectrogram as the feature image obtained from the $16^{th}$-order LPC vectors for a specific time duration. The proposed CNN exhibits 100% classification accuracy and outperforms the SVM-based classifier. These results show that the proposed classifiers can be used for human and dog classification systems and also for classification problems using data obtained from an ultra-wideband (UWB) sensor.

유전체 손실을 고려한 전원부에서 유기되는 노이즈 모델링에 관한 연구 (Modeling of the Power/Ground Plane Noise Including Dielectric Substrate Loss)

  • 김종민;남기훈;하정래;송기재;나완수
    • 한국전자파학회논문지
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    • 제21권2호
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    • pp.170-178
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    • 2010
  • 논문에서는 전원부에서 노이즈가 발생되어 신호선에 노이즈가 유기될 때, 유전체의 손실 특성이 노이즈에 미치는 영향에 관해서 연구를 하였다. 이를 분석하기 위해 Full-wave 시뮬레이터인 Ansoft사의 HFSS(High Frequency Structure Simulation)와 CST사의 MWS(MicroWave Studio)의 계산 결과와 측정 결과를 비교하여 신뢰성을 확보하였고, 실제 사용되고 있는 4가지의 상용 기판에 대한 유기되는 노이즈를 해석하였다. 또한, TLM(Transmission Line Method)를 이용해서 전원면의 회로 모델 구성 시 기판의 유전체 손실을 반영할 수 있는 Debye 모델을 적용하여 주파수에 대한 임피던스를 분석할 수 있는 모델을 적용 측정 결과와 3 GHz까지 일치하는 모델을 얻었다.

IMF금융위기와 광주권 경제공간의 변화 (The Financial Crisis of Korean Economy and the Changing Economic Space of Gwangiu City)

  • 김재철
    • 한국경제지리학회지
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    • 제3권1호
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    • pp.5-20
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    • 2000
  • 오늘날 금융자본의 세계화가 진전됨에 따라 금융위기의 발생가능성과 세계경제의 불확실성이 한층 더 높아지고 있다. 한국에서 IMF 금융위기는 사회 전반의 구조조정을 추동시키면서 양적, 질적 경제적 변화를 일으키고 있어 본 연구는 광주지역의 경제적 공간의 변화를 살펴보았다. 광주지역경제에 영향을 크게 미치는 산업은 서비스업과 수송장비제조업 등을 들 수 있는데 이들 산업은 IMF금융위기의 경제적 침체의 영향을 민감하게 받았고, 대신 고무 .플라스틱.기계장비.전기전각 부문의 제조업은 상대적으로 영향을 적게 받았다. 공간적으로는 서비스업의 감소로 도심지역의 상업이 쇠락하고, 첨단산업육성을 통한 위기 극복의 노력으로 인해 광산업 집적공간의 형성과 벤처기업이 입지한 창업보육센터나 벤처빌딩과 같은 미시산업공간이 나타나고 있다. 그러나 첨단산업의 지방뿌리내림은 첨단산업의 수도권 집중의 구조적, 지리적 한계를 지니고 있으며, 따라서 지역혁신체제의 구축에 대한 연구가 필요하리라 생각된다.

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MOSFET를 이용한 고효율 SCALDO 레귤레이터 구현 (Implementation of a High Efficiency SCALDO Regulator Using MOSFET)

  • 권오순;손준배;김태림;송종규
    • 전기전자학회논문지
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    • 제19권3호
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    • pp.304-310
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    • 2015
  • SCALDO(Supercapacitor Assisted LDO) 레귤레이터는 기존에 널리 사용되고 있는 SMPS(Switch Mode Power Supply)의 장점인 높은 효율과 LDO(Low Drop-out) 레귤레이터의 장점인 안정적인 출력 및 우수한 EMI(Electro Magnetic Interference)특성을 함께 가지는 레귤레이터로 현재 새롭게 연구되고 있는 전원회로이다. 하지만, 현재까지 연구된 SCALDO 레귤레이터의 경우 회로 내부의 스위치제어에 많은 전력이 소비되어 회로 전체의 효율이 감소되는 단점이 있다. 본 논문에서는 기존 SCALDO 레귤레이터의 단점을 극복하고 저전력으로 구동이 가능한 MOSFET를 SCALDO 레귤레이터에 적용함으로써 스위치제어 소비전력을 최소화하여 회로 전체의 효율을 향상시킨 새로운 SCALDO 레귤레이터를 구현 하였으며, 기존 SCALDO 대비 효율이 최대 9.5% 상승됨을 확인하였다. 또한 기존의 MCU(Micro-controller unit)를 이용한 펌웨어제어를 비교기 및 T-F/F(Flip Flop)을 이용한 하드웨어 제어로 대체함으로써 회로의 제작과정을 단순화 하였다.