• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1824-1827
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• 2005

For application to micro fluid control systems such as ${\mu}TAS$ (Micro Total Analysis Systems) and DDS (Drug Delivery Systems), it is very significant to handle precise and minute flow rates with low pressure pulsation. In this study, a novel valveless piezoelectric pump using peristaltic motion with three disk type PZT actuators is presented. The newly devised pump with an effective size of $70mm{\times}60mm{\times}55mm$ has three actuator layers connected in series from inlet to outlet. The PZT actuator has a maximum displacement of 240 ${\mu}m$ and a maximum force of 1.6 N. When the driving voltage for PZT actuators is sequentially applied with a certain phase shift, the pumping is performed by peristaltic motion of liquid volume. The working fluid is shut off without the driving voltage. Three methods for sequential driving are proposed and experimentally investigated. First and second methods utilize an intermittent sinusoidal waveform with phase shift of $90{\circ}\;and\;120^{\circ}$, respectively. Third method uses a rectangular waveform with phase shift of $90^{\circ}$. A controller with multi-phase shifter is designed and fabricated. Then, frequency and voltage-flow rate characteristics and load pressure-flow rate characteristics are experimentally investigated to verify the validity of the developed pump.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.2
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• pp.153-160
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• 1999

Dual-stage servo system for super-high density HDD has the chances of being composed of the coarse actuator(VCM) for track-seeking control and the fine actuator(microactuator) for-following control in near future. This paper presents the concept design of dual-stage servo system and the track-following control using an electrostatic microactuator for super-high density HDD. The electrostatic microactuator is designed and fabricated by MEMS(micro-electro-mechanical system) process. Both the nonlinear plant(voltage/displacement-to-electrostatic force) and the linear plant(electrostatic force-to-displacement) of the microactuator are established. Inverse function of the nonlinear plant is employed for a feedforward nonlinear compensator design. And feedforward control effect of this compensator is shown by time-domain experiments. A track-following feedback controller is designed using the feedback nonlinear compensator which is derived from the feedforward nonlinear compensator. The track-following control experiment is done to show the control efficiency of the proposed control system. And, excellent track-following control performance(2.21kHz servo-bandwidth, 7.51dB gain margin, $50.98^{\circ}$phase margin) is achieved by the proposed control system.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.2290-2295
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• 2005

In this paper, it is developed simulator system of 3 D.O.F parallel robot for educate of expertness. This simulator system is composed of three parts ? 3 D.O.F parallel robot, controller (hardware) and software. First, basic structure of the robot is 3 active rotary actuator that small geared step motor with fixed base. An input-link is connected to this actuator, and this input-link can connect two ball joints. Thus, two couplers can be connected to the input-link as a pair. An end-plate, which is jointed by a ball joint, can be connected to the opposite side of the coupler. A sub-link is produced and installed to the internal spring, and then this sub-link is connected to the upper and bottom side of the coupler in order to prevent a certain bending or deformation of the two couplers. The robot has the maximum diameter of 230 mm, 10 kg of weight (include the table), and maximum height of 300 mm. Hardware for control of the robot is composed of computer, micro controller, pulse generator, and motor driver. The PC used in the controller sends commands to the controller, and transform signals input by the user to the coordinate value of the robot by substituting it into equations of kinematics and inverse kinematics. A controller transfer the coordinate value calculated in the PC to a pulse generator by transforming it into signals. A pulse generator analyzes commands, which include the information received from the micro controller. A motor driver transfer the pulse received from the pulse generator to a step motor, and protects against the over-load of the motor Finally, software is a learning purposed control program, which presents the principle of a robot operation and actual implementation. The benefit of this program is that easy for a novice to use. Developed robot simulator system can be practically applied to understand the principle of parallel mechanism, motors, sensor, and various other parts.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.5
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• pp.523-529
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• 2010

Recently, several research groups have been investigating the motion of flagellated bacteria, with the aim of examining the feasibility of using bacterial chemotaxis as an efficient power source for microactuators. In this study, microparticle-tracking velocimetry ($\mu$-PTV) is used for investigating the motion of fluorescent microbeads propelled by bacterial chemotaxis. Flagellated bacteria, Serratia marcescens, are spontaneously attached to the surface of the fluorescent polystyrene (PS) microbeads in an aqueous culture. The microbeads thus treated are injected into the test medium, which contains the solidified chemoattractant L-aspartate. With time, the particles slowly move toward the zone in which the L-aspartate concentration is high. This study shows that chemotaxis of flagellated bacteria can be applied as an efficient power source for microactuators.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.466-471
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• 2008

Structural vibration and noise are hot issues in underwater vehicles such as submarines for their survivability. Therefore, active vibration and noise control of submarine, which can be modeled as hull structure, have been conducted by the use of piezoelectric materials. Traditional piezoelectric materials are too brittle and not suitable to curved geometry such as hull structures. Therefore, advanced anisotropic piezoceramic actuator named as Macro-Fiber Composite (MFC), which can provide great flexibility, large induced strain and directional actuating force is adopted for this research. In this study, dynamic model of the smart hull structure is established and active vibration control performance of the smart hull structure is evaluated using optimally placed MFC. Actuating performance of MFC is evaluated by finite element analysis and dynamic modeling of the smart hull structure is derived by finite element method considering underwater condition. In order to suppress the vibration of hull structure, Linear-Quadratic-Gaussian (LQG) algorithm is adopted. After then active vibration control performance of the proposed smart hull structure is evaluated with computer simulation and experimental investigation in underwater. Structural vibration of the hull structure is decreased effectively by applying proper control voltages to the MFC actuators.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1198-1201
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• 2005

A new foxtail actuator driven by V-shape beam deflection using electrostatic force has been designed, fabricated and characterized for nano-resolution manipulators. The proposed foxtail mechanism was implemented using a pair of electrostatic actuators and a pair of holding actuators, which was analyzed based on the electromechanically coupled motion of voltage - displacement relation. The proposed actuator was fabricated onto Silicon-on-Insulator (SOI) wafer and its stepping characteristics were measured by micro optical interferometer consisting of integrated micromirror and optical fiber. The fabricated foxtail microactuator was successfully operated from 1nm to 76nm, and the magnitude of step displacement was controllable up from 26nm/cycles to 53nm/cycle by changing the voltage.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.1
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• pp.7-13
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• 2008

In this paper, the pumping performance of a piezoelectric valveless micropump is simulated with a commercial finite element analysis software, COMSOL Multiphysics. The micropump developed in the previous work is composed of a 4-layer lightweight piezo-composite actuator (LIPCA), a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, structural domain and fluid domain are coupled in the simulation. Water flow rates are numerically predicted for geometric parameters of the micropump. Based on this study, the micropump is optimally designed to obtain its highest pumping performance.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.45 no.1
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• pp.31-40
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• 2008

This paper presented the development and real-time control of a magnetostrictive micro actuator. Magnetostrictive material has many advantages such as high response time, precision displacement and powerful output force. But Magnetostrictive material has characteristic of hysteresis. Conventional Preisach model which based on experimental data is not suitable to the real-time control because of controlling a magnetostrictive system by Preisach model costs a lot of calculating time. And, we prove the validity of proposed model through the experimental comparison between the classical Preisach model and the proposed one.

• Journal of Aerospace System Engineering
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• v.10 no.1
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• pp.86-94
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• 2016

In this paper, position control of focal plane compensation device using piezoelectric actuator is conducted. The forcal plane compensation device installed on earth observation satellite camera compensates micro-vibration from reaction wheels. In this study, four experimental models of the open-loop compensation device are derived using MATLAB system identification toolbox in the input range of 0~50Hz. Subsequently, the PID controller for each model is designed and the performance test of each controller is conducted through MATLAB/Simulink. According to frequency response analysis of the closed-loop compensation device system, the PID controller designed for 38~50Hz input range has enough tracking performance for the whole 0~50Hz input range. The maximum output error is about $1{\mu}m$ for the input range. The simulation results has been verified by the experimental method.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.9 s.186
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• pp.179-189
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated f3r the purpose of an application to PSD (Probe-based Storage Device). However, all of the components (platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficiencies such as a few percentage, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having a large areal efficiency of about 25%. For obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design and analysis, the fabrication and measurement results. Experimental results show that the driving ranges of the fabricated stage along the x and y axis were 27$\mu$m, 38$\mu$m at the supplied voltages of 65V, 70V, respectively and the natural frequencies along x and y axis were 180Hz, 310Hz, respectively. The total size of the stage is about 5.9$\times$6.8mm$^2$ and the platform size is about 2.7$\times$3.6mm$^2$.