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http://dx.doi.org/10.5139/JKSAS.2008.36.1.007

Electro-Fluid-Structural Interaction Simulation of a Valveless Micropump  

Li, Guang-Zhe (건국대학교 대학원 신기술융합학과)
Goo, Nam-Seo (건국대학교 대학원 신기술융합학과)
Han, Cheol-Heui (충주대학교 항공.기계설계학과)
Publication Information
Journal of the Korean Society for Aeronautical & Space Sciences / v.36, no.1, 2008 , pp. 7-13 More about this Journal
Abstract
In this paper, the pumping performance of a piezoelectric valveless micropump is simulated with a commercial finite element analysis software, COMSOL Multiphysics. The micropump developed in the previous work is composed of a 4-layer lightweight piezo-composite actuator (LIPCA), a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, structural domain and fluid domain are coupled in the simulation. Water flow rates are numerically predicted for geometric parameters of the micropump. Based on this study, the micropump is optimally designed to obtain its highest pumping performance.
Keywords
Micropump; Piezo-composite actuator; Micro-electo-mechanical system; Electro-Fluid-Structural Interaction; MEMS;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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