• 대한기계학회논문집
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• 제10권1호
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• pp.78-85
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• 1986

본 연구에서는 결함재의 결함선단에 발생 전파하는 피로거동을 검토하기 위해서 미소원공과 미소슬릿을 가공하고, 이것들의 피로한도를 기준으로 해서 이들 결함의 형상이 피로크랙 전파특성에 미치는 영향을 상세히 고찰하고자 한다.

• 전자공학회논문지SC
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• 제45권6호
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• pp.16-25
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• 2008

미세 탐침이란 프로브 카드(Probe Card)를 구성하는 초미세탐침을 의미한다. 이러한 미세 탐침은 그 크기가 상당히 미세하기 때문에 외관 이상 유무를 사람의 눈으로 검사하기가 상당히 어렵다. 반면, 프로브카드를 구성하는 미세 탐침의 이상 유무는 상당히 중요한 요소라고 볼 수 있다. 이에 본 연구에서는 사람의 눈으로 검사하기 어려운 미세 탐침의 불량 상태를 자동화된 비전 시스템으로 검사할 수 있는 방법을 개발하였다. 즉 탐침의 구부러진 각도, Tip Length, 종단 직경을 고속으로 자동 검사할 수 있는 비전 기술을 개발한 것이다 제안한 방법에 의한 실험결과, 사람의 육안에 위한 검사보다 검사의 정확도와 속도가 향상되었으며, 또한 조명환경에 대해서도 강건성(robustness)이 향상되었음을 알 수 있었다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.1115-1117
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• 2005

This paper describes the three dimension model and simulation results of a thermal actuator based on polyMUMPs process, known as thermal multimorph actuator. The device has potential application in micro-transducers such as atomic force microscope (AFM) tip and scanning tunneling microscope (STM) tip. This device made of a multi-layer materials stack together with consisted of polysilicon, $SiO_2$ and gold. A mask layout design, three dimension model and simulation results are reported and discussed.

• 대한기계학회논문집A
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• 제31권10호
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• pp.1039-1045
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• 2007

Ultrasonic machining (USM) is suitable for machining hard, brittle and non-conductive materials such as silicon, glass and ceramics. Usually, when micro holes are machined on glass by USM, roundness of hole entrance is poor and cracks appear around the hole exit. In this paper the machining characteristics were studied for roundness improvement and exit crack prevention. From experiments, the tool bending and the shape of tool tip affect hole roundness. When the tool tip is hemispherical, good roundness of holes was obtained. The feedrate and the rotational speed of the tool affect the exit crack. With the machining conditions of 150 rpm in spindle speed and $0.5\;{\mu}m/s$ in feedrate, micro holes with less than $100\;{\mu}m$ in diameter were machined without an exit crack.

• 한국유체기계학회 논문집
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• 제9권2호
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• pp.19-24
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• 2006

Nano fountain-pen is a novel device to make the constant patterning in micro process using new designed probe. Fountain-pen nanolithography (FPN) is applied for constant supply of liquid in conjunction of patterns and surface variation in the micro process. In this study, nuo fountain-pen is composed with reservoir, micro channels, tip and scondary chamber. Instead of traditional method only using capillary force, liquid can be definitely and exactly injected with membrane pumping by the repulse force of tip. It is dfficult to perform experiments in the micro range so that we carried out a numerical analysis for internal flow, using a commercial code, FlUENT, The velocity, pressure and flow rate are obtained under laminar, unsteady, three-dimensional incompressible flow with no-slip condition, and results are graphically described.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2004년도 춘계학술대회 논문집
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• pp.250-253
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• 2004

Sharpness of the tip of micro needle is very Important quality that should be controlled in the manufacturing processes. Acupuncture needle is one of the most widely used micro-needle. And the tip sharpness of acupuncture needle Is usually checked by the magnitude of resisting force obtained through sharpness test. In this study, some sharpness tests of acupuncture needle were done and the relationship between the misalignment of specimen and the magnitude of resisting force. The diameter of the needle used in the test was $250\;{\mu}m$ and the length of it was 40 mm.

• 한국정밀공학회지
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• 제21권11호
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• pp.186-194
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• 2004

In this research, microfabrication technique using localized electrochemical deposition (LECD) with ultra short pulses is presented. Electric field is localized near the tool tip end region by applying a few hundreds of nano second pulses. Pt-Ir tip is used as a counter electrode and copper is deposited on the copper substrate in 0.5 M CuSO$_4$ and 0.5 M H$_2$SO$_4$ electrolyte. The effectiveness of this technique is verified by comparison with LECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration are investigated. The proper condition is selected from the results of the experiments. Micro columns less than 10 $\mu$m in diameter are fabricated using this technique. The real 3D micro structures such as micro pattern and micro spring can be fabricated by this method. It is suggested that presented method can be used as an easy and inexpensive method for fabrication of microstructure with complex shape.

• 한국정밀공학회지
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• 제20권5호
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• pp.189-195
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• 2003

Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for. the last few decade. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of silicon and silicon nitride were in the range of ${10}^{-1}$~${10}^{-3}$ and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was discussed. It was found that the tip wear has more severe for harder test materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

• International Journal of Precision Engineering and Manufacturing
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• 제5권2호
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• pp.39-45
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• 2004

Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for the last few decades. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of Si and ${Si}_3$$N_4$ tips were in the range of ${10}^{-1}$~${10}^{-3}$and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was investigated. It was found that the tip wear has more severe for harder counter surface materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

• 한국전산유체공학회지
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• 제16권1호
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• pp.90-95
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• 2011

The Navier-Stokes equations are solved to study the flow characteristics of a micro viscous pump. The viscous micropump is consisted of a stationary disk with a spiral shaped channel and a rotating disk. A simple geometrical model for the tip clearance is proposed and validated by comparing computed flow rate with corresponding experimental data. Present numerical solutions show satisfactory agreement with the corresponding experimental data. The tip clearance effect is found to become significant as the rotational speed increases. As the pressure load increases, a reversed flow region is seen to form near the stationary disk. The height of the channel is shown to be optimized in terms of the flow rate for a given rotational speed and pressure load. The optimal height of the channel becomes small as the rotational speed decreases or the pressure load increases. The flow rate of the pump is found to be in proportion to the width of channel.