• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.422-428
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system (100mm stroke and ${\pm}$ 10nm positioning accuracy) with single plane X-Y stage are materialized.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.3
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• pp.137-143
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• 2002

This paper presents the In-process compensation to control cutter runout and improve the machined surface quality. Cutter runout compensation system consists of the micro-positioning servo system with piezoelectric actuator which is embeded in the sliding table to manipulate radial depth of cut in real-time. Cutting force feedback control was proposed in the angle domain based upon repetitive learning control strategy to eliminate chip load variation in end milling process. Micro-positioning control due to adaptive actuation force response improves the machined surface quality by compensation runout effect induced cutting force variation. This result will provide lots of information to build-up the preciswion machining technology.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.301-306
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• 2004

In this study, Dual servo mechanism with VCM(Voice Coil Motor) and PZT is designed for a high precision force and position control. We designed the VCM actuator and dual servo mechanism with leaf spring. VCM actuators, with their high linearity, simple structure, low weight, and high efficiency, are increasingly being used in micro-positioning applications. There are many kinds of VCM with a structure. VCM actuators are divided into two types by moving parts. One is moving magnet type and the other moving coil type. We described the properties of these two types of VCM. Design parameters of VCM are defined through the FEM simulation analysis of magnetic field and dynamic model of dual servo mechanism. These researches help to for decreasing loss in the air gap of VCM. We present dual servo mechanism is effective mechanism for a force control in hi h precision, properties of designed VCM.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1344-1348
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• 2003

A precision micro-positioning system with a high displacement resolution and wide motion range has been required for industrialized applications in variety fields. This paper discusses the design of a precision micro-rotation stage with flexure hinges. Proposed system is applied to grinding machine for micro parts. Rotational motion is generated with this system. For this systems having a full rotation motion with high precision, a dual servo system with a coarse stage and a fine stage is proposed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.342-347
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• 2002

After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.4
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• pp.13-18
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• 2003

This paper presents the in-process compensation to control cutter ronout and to improve the machined surface quality. Cutter ronout compensation system consists of the micro-positioning servo system with piezoelectric actuator which is embeded in the sliding table to manipulate radial depth of cut in real-time. Cutting force feedback control was proposed in the angle domain based upon repetitive learning control strategy to eliminate chip load variation in end milling process. Micro-positioning control due to adaptive actuation force response improves the machined surface quality by cutter ronout compensation.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.