• Title/Summary/Keyword: Micro-Electrode

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Fluctuation in Plasma Nanofabrication

  • Shiratani, Masaharu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.96-96
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    • 2016
  • Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

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Properties of Working Electrodes with Nano YBO3:Eu3+ Phosphor in a Dye Sensitized Solar Cell

  • Noh, Yunyoung;Choi, Minkyoung;Kim, Kwangbae;Song, Ohsung
    • Journal of the Korean Ceramic Society
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    • v.53 no.2
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    • pp.253-257
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    • 2016
  • We added 0 ~ 5 wt% $YBO_3:Eu^{3+}$ nano powders in a scattering layer of a working electrode to improve the energy conversion efficiency (ECE) of a dye sensitized solar cell (DSSC). FESEM and XRD were used to characterize the microstructure and phase. PL and micro Raman were used to determine the fluorescence and the composition of $YBO_3:Eu^{3+}$ phosphor. A solar simulator and a potentiostat were used to confirm the photovoltaic properties of the DSSC with $YBO_3:Eu^{3+}$. From the results of the microstructure and phase of the fabricated $YBO_3:Eu^{3+}$ nano powders, we identified $YBO_3:Eu^{3+}$ having particle size less than 100 nm. Based on the microstructure and micro Raman results, we confirmed the existence of $YBO_3:Eu^{3+}$ in the scattering layer and found that it was dispersed uniformly. Through photovoltaic properties results, the maximum ECE was shown to be 5.20%, which can be compared to the value of 5.00% without $YBO_3:Eu^{3+}$. As these results are derived from conversion of light in the UV range into visible light by employing $YBO_3:Eu^{3+}$ in the scattering layer, these indicate that the ECE of a DSSC can be enhanced by employing an appropriate amount of $YBO_3:Eu^{3+}$.

Study on the tensile restraint crack characteristics in underwater welds of marine steel plates (선용 강판 수중용접부의 인장 구속 균열 특성에 관한 연구)

  • 오세규;강문호;김민남
    • Journal of Advanced Marine Engineering and Technology
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    • v.11 no.3
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    • pp.45-52
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    • 1987
  • Generally the factors affected largely by the cold cracking sensitivity of the weld are the quantity of the diffusible hydrogen, the brittleness and hardness of the bond area and the tensile restraint stress. These factors have relation each other, and if we can reduce one of these factors, it becomes instrumental to the root cracks prevention of weld. This study deals with the gravity type-underwater-welding of KR Grade A-3 marine steel plate using E4303 welding electrode in order to compare wet-underwater-welding with in-air- welding, resulting in obtaining the tensile restraint characteristics, the hardness distribution, the quantity of diffusible hydrogen and the macro- and micro-crack properties in both underwater and in-air welds. The main results obtained are as follows: 1) The quantity of diffusible hydrogen measured for 48 hours is about 18cc/100g-weld-metal for the in-air-weld of one pass and about 48cc/100g-weld-metal for the underwater-weld of one pass which is about 3 times penetration of diffusible hydrogen compairing with the case of the in-air-weld. However, it was experimentally confirmed that, by the multi-pass welding of 2 to 5 passes, the diffusible hydrogen in the underwater weld metal can be reduced as much as 27 to 49%. 2) The hardness of the weld metal indicates the highest value in the heat affected zones of underwater weld for more rapid cooling rate, resulting in the higher sensitivity of cold cracking. So, it is desirable to soften the higher hardness in the HAZ by tempering effect such as the multi-pass welding in the underwater welding. 3) At the bond vicinity of the underwater weld HAZ, micro cracks were found as resulted by both more rapid cooling rate and more diffusible hydrogen and also by the stress corrosion cracking under the tensile restraint stress in the underwater. But this could be prevented by the tempering effect of the following weld bead such as the multi-pass welding.

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Fabrication and characteristics of electrostatic micro mirror for optical disk drives (광 저장장치 응용을 위한 마이크로 미러의 제작과 그 특성)

  • Kim, Jong-Wan;Seo, Hwa-Il;Lee, Woo-Young;Rim, Kyung-Hwa;Jang, Young-Jo
    • Journal of Sensor Science and Technology
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    • v.11 no.1
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    • pp.39-47
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    • 2002
  • Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. The mirror was fabricated by using MEMS technology. Especially, the Process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the process reliability. The mirror size was $2.5mm{\times}3mm$ and it needed about 35V for displacement of $3.2{\mu}m$.

Prgress in MEMS Engine Development for MAV Applications (KAIST의 MAV용 MEMS 엔진 개발 현황)

  • Lee, Dae-Hoon;Park, Dae-Eun;Yoon, Eui-Sik;Kwon, Se-Jin
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.30 no.6
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    • pp.1-6
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    • 2002
  • Micro engine that includes Micro scale combustor is fabricated. Design target was focused on the observation of combustion driven actuation in MEMS scale. Combustor design parameters are somewhat less than the size recommended by feasibility test. The engine structure is fabricated by isotropic etching of the photosensitive glass wafers. Electrode is formed by electroplating of the Nickel. Photosensitive glass can be etched isotropically with almost vertical angle. Bonding and assembly of structured photosensitive glass wafer from the engine. Combustor size was determined to be 1mn scale. Piston in cylinder moves by fuel injection and reaction. In firing test, adequate engine operation including ignition, flame propagation and piston motion was observed. Present study warrants further application research on MEMS scale internal combustion power units.

The Fabrication of Nickel-Diamond Composite Coating by Electroplating Method (전기도금방법을 이용한 Ni-Diamond 복합도금층 제조에 대한 연구)

  • Moon, Yun-Sung;Lee, Jae-Ho;Oh, Tae-Sung;Byun, Ji-Young
    • Journal of the Microelectronics and Packaging Society
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    • v.14 no.1
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    • pp.55-60
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    • 2007
  • The codeposition behavior of submicron sized diamond with nickel from nickel electrolytes has been investigated. Electroplating of diamond dispersed nickel composites was carried out on a rotating disk electrode (RDE). The effects of current type and current density on the electrodeposited Ni-diamond composite coating were investigated. The effects of surfactants on the composite coating were also investigated. The hardness of coating was measured with varying electroplating conditions using Micro Vickers. As diamond was incorporated into the coating, the hardness of coating as well as the wear resistance was improved. The hardness of the coating was increased as much as 100% and the wear resistance was improved as much as 27%. The hardness of composite coating layer increased slightly at the diamond content of above 20 gpl.

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Environmental Monitoring Sub-System for Ubiquitous Terminal Using Metal Oxide Nano-Material Gas Sensor (나노 금속산화물을 이용한 유단말용 환경 모니터링 서브 시스템)

  • Moon, S.E.;Lee, H.Y.;Lee, J.W.;Park, J.;Park, S.J.;Kwak, J.H.;Maeng, S.;Park, K.H;Kim, J.;Udrea, F.;Milne, W.I.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.63-63
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    • 2008
  • Environmental monitoring sub-system has been developed using gas sensor module, Bluetooth module and PDA phone. The gas sensor module consists of $NO_2or$ CO gas sensor and signal processing chips. Gas sensor is composed of the micro-heater, sensing electrode and sensing material. Metal oxide nano-material was selectively deposited on a substrate with micro-heater and was integrated to the gas sensor module. The change in resistance of the metal oxide nano-material due to exposure of oxidizing or deoxidizing gases is utilized as the principle of this gas sensor operation mechanism. This variation detected in the gas sensor module was transferred to the PDA phone by way of Bluetooth module.

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Anodically prepared TiO2 Micro and Nanostructures as Anode Materials for Lithium-ion Batteries (양극산화를 사용한 TiO2 마이크로/나노 구조체 제조 및 리튬 이온 전지 음극재로의 응용 연구)

  • Kim, Yong-Tae;Choi, Jinsub
    • Applied Chemistry for Engineering
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    • v.32 no.3
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    • pp.243-252
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    • 2021
  • With increasingly strict requirements for advanced energy storage devices in electric vehicles (EVs) and stationary energy storage systems (EES), the development of lithium-ion batteries (LIBs) with high power density and safety has become an urgent task. Because the performance of LIBs is determined primarily by the physicochemical characteristics of its electrode material, TiO2, owing to its excellent stability, high safety levels, and environmentally friendly properties, has received significant attention as an alternative material for the replacement of commercial carbon-based anode materials. In particular, self-organized TiO2 micro and nanostructures prepared by anodization have been intensively investigated as promising anode materials. In this review, the mechanism for the formation of anodic TiO2 nanotubes and microcones and the parameters that influence their morphology are described. Furthermore, recent developments in anodic TiO2-based composites as anode electrodes for LIBs to overcome the limitations of low conductivity and specific capacity are summarized.

Plasma bioscience for medicine, agriculture and hygiene applications

  • Eun Ha Choi;Nagendra Kumar Kaushik;Young June Hong;Jun Sup Lim;Jin Sung Choi;Ihn Han
    • Journal of the Korean Physical Society
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    • v.80
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    • pp.817-851
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    • 2022
  • Nonthermal biocompatible plasma (NBP) sources operating in atmospheric pressure environments and their characteristics can be used for plasma bioscience, medicine, and hygiene applications, especially for COVID-19 and citizen. This review surveyed the various NBP sources, including a plasma jet, micro-DBD (dielectric barrier discharge) and nanosecond discharged plasma. The electron temperatures and the plasma densities, which are produced using dielectric barrier discharged electrode systems, can be characterized as 0.7 ~ 1.8 eV and (3-5) × 1014-15 cm-3, respectively. Herein, we introduce a general schematic view of the plasma ultraviolet photolysis of water molecules for reactive oxygen and nitrogen species (RONS) generation inside biological cells or living tissues, which would be synergistically important with RONS diffusive propagation into cells or tissues. Of the RONS, the hydroxyl radical [OH] and hydrogen peroxide H2O2 species would mainly result in apoptotic cell death with other RONS in plasma bioscience and medicines. The diseased biological protein, cancer, and mutated cells could be treated by using a NBP or plasma activated water (PAW) resulting in their apoptosis for a new paradigm of plasma medicine.

Measurement of Spatiotemporal Distribution for the Density of Excited Xe Atoms in the 1s5 in Accordance with Various ITO-shapes in Ac-PDP (교류형 플라즈마 평판 표시장치(AC-PDP)에서 ITO 전극 구조에 따른 Xe 여기종의 시공간 밀도 분포 연구)

  • Cho, S.H.;Hong, Y.J.;Son, C.G.;Han, Y.G.;Jeong, Y.H.;Gwon, G.C.;Hong, B.H.;Cho, G.S.;Choi, E.H.
    • Journal of the Korean Vacuum Society
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    • v.18 no.1
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    • pp.54-59
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    • 2009
  • We have measured the spatiotemporal behavior for the density of excited Xe atoms in the $1s_5$ metastable states by laser absorption spectroscopy in accordance with various shapes of ITO electrode. The maximum density of excited Xe atoms in the Is5 state in a discharge cell for fish-boned, T-shaped and squared ITO electrodes has been measured to be $3.01{\times}10^{13}\;cm^{-3}$, $2.66{\times}10^{13}\;cm^{-3}$ and $2.06{\times}10^{13}\;cm^{-3}$, respectively. Throughout this experiment, we could understand the influence of the shapes of ITO electrode of micro discharge cell on the high efficiency of AC-PDPs.