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http://dx.doi.org/10.5139/JKSAS.2002.30.6.001

Prgress in MEMS Engine Development for MAV Applications  

Lee, Dae-Hoon (한국과학기술원 항공우주공학전공)
Park, Dae-Eun (한국과학기술원 전기전자공학전공)
Yoon, Eui-Sik (한국과학기술원 전기전자공학전공)
Kwon, Se-Jin (한국과학기술원 항공우주공학전공)
Publication Information
Journal of the Korean Society for Aeronautical & Space Sciences / v.30, no.6, 2002 , pp. 1-6 More about this Journal
Abstract
Micro engine that includes Micro scale combustor is fabricated. Design target was focused on the observation of combustion driven actuation in MEMS scale. Combustor design parameters are somewhat less than the size recommended by feasibility test. The engine structure is fabricated by isotropic etching of the photosensitive glass wafers. Electrode is formed by electroplating of the Nickel. Photosensitive glass can be etched isotropically with almost vertical angle. Bonding and assembly of structured photosensitive glass wafer from the engine. Combustor size was determined to be 1mn scale. Piston in cylinder moves by fuel injection and reaction. In firing test, adequate engine operation including ignition, flame propagation and piston motion was observed. Present study warrants further application research on MEMS scale internal combustion power units.
Keywords
MEMS Engine; MAV; Photosensitive Glass Wafer; Internal Combustion;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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