• 한국항공우주학회지
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• 제31권2호
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• pp.57-62
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• 2003

MEMS(미소전기기계시스템) 박막의 푸와송비 측정을 위한 미소굽힙기법이 제안되었다. 푸와송비 측정에 민감한 쌍원시편(두 개의 원모양)을 설계하고 표면미세가공 공정을 사용하여 제작하였다. 미소압입기로 하중을 가한 쌍원시편의 하중-변위 곡선을 분석하여 푸와송비를 측정할 수 있었다. 제안도니 미소굽힘기법은 표면미세가공에 적합하여 소자제작과정에서의 동시측정이 가능하고(in-situ measurement), 소자가 위치해 있는 작은 영영에서의 물성을 국부적으로 측정할 수 있는 장점이 있다. 제안된 기법을 검증하기 위하여 저압화학기상증착법에 의하여 증착된 2.3㎛ 다결정실리콘(Poly-silicon)의 푸와송비를 측정하였다. 실험에 사용된 다결정실리콘막의 푸와송비는 0.2569 이고 쌍원시편의 강성에 대한 측정표준편차는 2.66% 이었다.

• 대한기계학회논문집A
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• 제21권9호
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• pp.1432-1440
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• 1997

The flexibility as well as the stiffness is required to perform mechanical function of a structure such as compliant mechanisms, which can be applied to MEMS(Micro-Electro-Mechanical Systems), flexible manufacturing devices, and design for no assembly. In this paper, the optimal design problem to achieve both structural flexibility and stiffness is formulated using multi-objective function, and the optimization problem is resolved by using Finite Element Method(FEM) and Sequential Linear Programming(SLP). Design examples of compliant mechanisms are presented to validate the design method.

• 센서학회지
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• 제14권4호
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• pp.265-271
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• 2005

In this study, a variable capacitive pressure sensor is fabricated for TPMS (Tire Pressure Monitoring System). This study is for developing sensors which consecutively measure the tire pressure given as 30 psi from the industrial standard. For improving non-linearity of the prior capacitive pressure sensors, it is suggested that touch mode capacitive pressure sensor be applied. In addition, initial capacitance is designed as small as possible for the conformity to the wireless sensor. ANSYS, commercial FEA package, is used for designing and simulating the sensor. The device is progressed by MEMS (Micro Electro Mechanical Systems) fabrication and packaged with PDMS. The result is obtained sensitivity, 1 pF/psi, through a pressure test. The simulation result is discrepant from experiment one. Wafer's uniformity is presumed as the main reason of discrepancy.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.97.5-97
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• 2001

This paper presents development of a user-friendly automatic control system for ESR(Electro-Slag Remelting or Refining) process. It is a second-phase refining one, commonly applied to production of high-purity specialty steel. A primarily refined castingot acts as a consumable electrode and melts by the electric resistance heat generated when high current is induced through a slag bath. The quality of product is evaluated by its chemical composition, purity, micro-structure, uniformity, mechanical property, etc. To meet the standards, above all things, the process should be kept sound and the melt rate should track the optimum profile irrespective of environment variations. Current ESR system is manually operated ...

• 센서학회지
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• 제19권4호
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• pp.259-270
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• 2010

MEMS(micro electro mechanical systems) is a technology for the manufacture hyperfine structure, as a micro-sensor and a driving device, by a variety of materials such as silicon and polymer. Many study for utilizing the MEMS applications have been performed in variety of fields, such as light devices, high frequency equipments, bio-technology, energy applications and other applications. Especially, the field of Bio-MEMS related with bio-technology is very attractive, because it have the potential technology for the miniaturization of the medical diagnosis system. Bio-MEMS, the compound word formed from the words 'Bio-technology' and 'MEMS', is hyperfine devices to analyze biological signals in vitro or in vivo. It is extending the range of its application area, by combination with nano-technology(NT), Information Technology(IT). The LOC(lab-on-a-chip) in Bio-MEMS, the comprehensive measurement system combined with Micro fluidic systems, bio-sensors and bio-materials, is the representative technology for the miniaturization of the medical diagnosis system. Therefore, many researchers around the world are performing research on this area. In this paper, the application, development and market trends of Bio-MEMS are investigated.

• 센서학회지
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• 제14권5호
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• pp.337-342
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• 2005

A silicon-based micro-reactor to amplify small amount of deoxyribonucleic acid (DNA) has been fabricated using micro-electro-mechanical systems (MEMS) technology. Polymerase chain reaction (PCR) of DNA requires a precise and rapid temperature control. A Pt sensor is integrated directly in the chamber for real-time temperature measurement and an infrared lamp is used as external heating source for non-contact and rapid heating. In addition to the real-time temperature sensing, PCR needs a rapid thermocycling for effective PCR. For a fast thermal response, the thermal mass of the reactor chamber is minimized by removal of bulk silicon volume around the reactor using double-side KOH etching. The transparent optical property of silicon in the infrared wavelength range provides an efficient absorption of thermal energy into the reacting sample without being absorbed by silicon reactor chamber. It is confirmed that the fabricated micro-reactor could be heated up in less than 30 sec to the denaturation temperature by the external infrared lamp and cooled down in 30 sec to the annealing temperature by passive cooling.

• 한국정보통신학회논문지
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• 제23권11호
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• pp.1397-1406
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• 2019

신경학적 손상에 의한 언어장애인/비장애인 간의 일상적인 휴대폰 통화시 신경학적 손상으로 인한 발음의 정확도와 언어장애인의 발음 특징이 결합되어 원활한 의사소통을 저해하는 경우가 많다. 이러한 문제점을 개선하기 위하여 제한하는 방법은 언어장애인 특성에 맞춘 단어의 모호성(out of vocabulary) 개선과, 언어 장애인 구강 특성에 따른 어려운 발성 부분을 인위적으로 보정해주는 유도선이 포함된 MEMS(Micro Electro-mechanical System) Microphone 장치 개선이다. S/W적 개선은 도치기능이 포함된 결정트리이며, 연속어 특성을 감안하여 개선된 matrix-vector rnn 방법을 제시하였다. H/W와 S/W 특성을 감안하여 유사 사전을 만들어 원활한 의사소통을 위한 말명료도 향상에 기여하였다.

• Journal of Mechanical Science and Technology
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• 제18권5호
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• pp.798-807
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• 2004

A testing system was developed to improve the reliability of printhead and several printheads were tested. We developed a thermally driven monolithic inkjet printhead comprising dome-shaped ink chambers, thin film nozzle guides, and omega-shaped heaters integrated on the top surface of each chamber. To perform a fatigue test of an inkjet printhead, the testing system automatically detects a heating failure using a Wheatstone bridge circuit. Various models were designed and tested to develop a more reliable printhead. Two design parameters of the width of reinforcing layer and heater were investigated in the test. Specially., the reinforcing layer was introduced to improve the fatigue life of printhead. The life-span of heater with a reinforcing layer was longer than that without a reinforcing layer. The wider the heater was, the longer the life of printhead was.

• 한국정밀공학회지
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• 제33권7호
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• pp.601-606
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• 2016

In this paper, an energy harvester is developed that has advantages regarding piezoelectric noise minimization, mass production, and an easily available environmental energy source, electromagnetic induction, as well as low-frequency bandwidth and high amplitude. A process for fabricating a three-dimensional multilayered planar coil using micro-electro-mechanical systems (MEMS) on a flexible printed circuit board FPCB is introduced. Optimal shape and size were calculated via internal resistance and inductance, and a prototype was fabricated through the MEMS procedure while considering the possibility of mass production. Although the internal resistance matched the designed value, the electromotive force generated did not reach the intended amount. The main reason for the decrease in efficiency was the low area of coil outskirt exposed to the magnetic field while there was relative motion between the magnet and the coil.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2009년도 제33회 추계학술대회논문집
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• pp.492-495
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• 2009

Supersonic microjets acquire considerable research interest from a fundamental fluid dynamics perspective, in part because the combination of highly compressible flow at low-to-moderate Reynolds number is not very common, and in part due to the complex nature of the flow itself. In addition, microjets have a great variety engineering applications such as micro-propulsion, MEMS (Micro-Electro Mechanical Systems) components, microjet actuators and fine particle deposition and removal. Numerical simulations have been carried out at moderate nozzle pressure ratios and for different nozzle exit diameters to investigate and to understand in-depth of aerodynamic characteristics of supersonic microjets.