Fatigue Test of MEMS Device: a Monolithic Inkjet Print

  • Park, Jun-Hyub (Department of Mechatronics Engineering, College of Engineering) ;
  • Oh, Yong-Soo (MEMS Lab, Samsung Advanced Institute of Technology, Tongmyong University of Information Technology)
  • Published : 2004.05.01

Abstract

A testing system was developed to improve the reliability of printhead and several printheads were tested. We developed a thermally driven monolithic inkjet printhead comprising dome-shaped ink chambers, thin film nozzle guides, and omega-shaped heaters integrated on the top surface of each chamber. To perform a fatigue test of an inkjet printhead, the testing system automatically detects a heating failure using a Wheatstone bridge circuit. Various models were designed and tested to develop a more reliable printhead. Two design parameters of the width of reinforcing layer and heater were investigated in the test. Specially., the reinforcing layer was introduced to improve the fatigue life of printhead. The life-span of heater with a reinforcing layer was longer than that without a reinforcing layer. The wider the heater was, the longer the life of printhead was.

Keywords

References

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