• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.464-467
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• 1997

In this paper, a high precision track following control algorithm is proposed for micro electrostatic actuator considering of the application for hard disk drive. The micro electrostatic actuator proposed has nonlinear voltage-displacement characteristic in a working range of 0.8.mu.m and has uni-directional movement. Mid range reference and open-loop bias are proposed for the revision of negative position error, and inverse model for linearization.

• Ceramist
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• v.7 no.3
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• pp.38-47
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• 2004

최근 micro structure, micro sensor, micro actuator 및 microelectronics 등을 활용하는 microelectromecha-nical systems (MEMS) 기술은 마이크로 로봇, micro manipulation, 광학 소자 및 시스템, 유체, 열, 바이오 및 화학공정 등을 위한 시스템 그리고 atomic force와 scanning tunneling microscope 등에 사용되는 다양한 소자 등 많은 잠재력을 가지고 있다. 이들 응용 분야 들은 micro actuator와 같은 mechanical power source가 요구되는 경우가 있다. 압전 특성을 포함하는 강유전체 재료는 이러한 micro actuator를 위해 여러 가지 다양한 장점을 지니고 있는데, 이들을 정리하면 다음과 같다. (중략)

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.755-761
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• 2003

Recently, the development of mobile devices demands information storage systems to use micro drive devices and cheap media. These should have several characteristics, for example, the subminiature of size, the robustness of shock, the minimum of cost and power consumption, and the removability of multiple applications. A conventional optical disk drive is more suitable for these specifications than the others. The optical storage system of the new generation to use a blue laser and a high numerical aperture (NA) is the perfect candidate for micro optical disk drives. In this paper, the micro actuator that can be applied to a micro optical disk drive is designed by response surface methodology to use a structural analysis and an electro-magnetic analysis. Based on above results, the coarse actuator and fine actuator are designed and improved from the point of view of the size and the power. Consequently, the designs of a micro actuator are proposed through these courses.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3328-3330
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• 1999

In this paper, the fabrication of a micro actuator with a micro electromagnet and an actuator diaphragm is presented. The micro electromagnet consists of a magnetic core and a micro inductive planar coil. The actuator diaphragm is the p+ silicon diaphragm on both sides of which magnetostrictive materials are deposited by sputtering. The micro electromagnet is fabricated by sputtering, evaporating, etching and electroplating. The magnetic flux density of the micro electromagnet is measured by using the gauss meter. The deflection of the actuator diaphragm is measured by using the laser vibrometer and optic microscope.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.5
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• pp.249-252
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• 2001

The paper represents the design and fabrication of an electrostatic micro actuator with $p^+$,/TEX> Si cantilevers. The micro actuator consists of a plate suspended by four $p^+$,/TEX> silicon cantilevers and an electrode on a glass substrate. The $p^+$,/TEX> Si structure is fabricated by the boron diffusion process and the anisotropic wet etch process. The cantilevers of the micro actuator curl down because of the residual stress gradient in $p^+$,/TEX> silicon. When the electrostatic forec is applied to the $p^+$,/TEX> cantilevers, the vertical displacement of the plate can be achieved. The deflection of the cantilever due to the residual stress gradient and the vertical displacement by electrostatic force were calculated. The displacement of the plate was measured with a laser displacement meter for various input voltages and frequencies. The feasibility of the proposed micro actuator for the applications to optical pickup devices or optical communication devices was confirmed by the experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1988-1991
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• 2005

A micro fluid actuator driven by electromagnetic force at MEMS(Micro Electro Mechanical System) level has been designed. The operation of the actuator was simulated in three steps. First, fluid flow analysis has been performed to determine the actuator load. With the load, dynamic behavior of the actuator structure has been analysed. Finally, fluid-structure interaction analysis has been performed to predict the performance of the actuator. To avoid excessive amount of computation, axisymmetric and plane strain 2-D models were used.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.951-955
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• 2004

Piezoelectric(PZT) actuator can substitute for solenoid which is used in fluid control field because it has faster response times and no possibility of explosion. Besides, it is available in a high temperature and it has low energy consumption. In this study, pneumatic micro valve, bimorph type PZT actuator using the softner type PZT, carbon plate as a shim and its controller circuit were suggested and investigated. Performance tests and characteristics analysis, such as displacement, force, hysteresis and frequency properties, were carried out. The displacement of the actuator measured at the end point was 63 ${\mu}m$., force of the actuator was 0.052 N and maximum operating frequency was 15Hz. Also, characteristics of the micro valve with PZT actuator were evaluated in a testing system. The results show that the suggested PZT actuator is suitable for micro valve.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3322-3324
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• 1999

This paper studies on the design and fabrication of a micro in-plane positioning actuator integrated with a microlens. Proposed in-plane actuator is a micro XY-stage which is composed of two linear comb drive actuators being orthogonal to each other. In the fabrication of actuator, the single crystalline silicon substrate anodically bonded with a #7740 glass substrate is used because of simple release and passivation. The structure of actuator is formed on the silicon facet of bonded fixture by chlorine-based deep RIE and then released by isotropic wet etching of glass (#7740) in hydrofluoric acid solution. Fabricated actuator has a large travel range up to $30({\pm}15){\mu}m$ and high resolution less than 0.01f1l1l in each direction. Experimented resonant frequency of this actuator is 630Hz. The micro-Fresnel lens is fabricated on the square-shape glass structure prepared in the center of actuator.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.381-385
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• 2003

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated by a micro-heater under pulse heating. The micro-actuator is consist of three plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive ion Etching) process. The middle plate includes the chamber and diaphragm, and the upper plate is the micro-heater. The micro-heater designed non-uniform width and results in periodic generation of stable single bubbles in D.I water. The single bubble appears precisely on the narrow part of the micro-heater and control is recorded.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.1
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• pp.115-121
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• 2005

Micromachines are extremely novel artifacts with a variety of special characteristics. Utilizing their tiny dimensions ranging roughly from 10 to $10^3$ micro-meters, the micromachines can perform tasks in a revolutionary manner that would be impossible for conventional artifacts. Micromachines are in general related to various coupled physical phenomena. They are required to be evaluated and designed considering the coupled phenomena. This paper describes finite element analysis (FEA) simulation of practical behaviors for the micro actuator. Especially, electric field modeling in micro actuators has been generally restricted to in-plane two-dimensional finite element analysis because of the complexity of the micro actuator geometry. However, in this paper, the actual three-dimensional geometry of the micro actuator is considered. The starting torque obtained from the in-plane two-dimensional analytical solutions were compared with that of the actual three-dimensional FE analysis results. The starting torque is proportional to $V^2$, and that the two-dimensional analytical solutions are larger than the three- dimensional FE ones. It is found that the evaluation of micro actuator has to be considered electrical leakage phenomenon.