• Journal of the Korean Society for Precision Engineering
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• v.24 no.6
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• pp.96-104
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• 2007

Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanies for quantified force metrology at pieo- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 N $m^{-1}$) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01 ${\sim}$ 100 N $m^{-1}$ with relative uncertainties of less than 2%.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.10
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• pp.194-199
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• 2001

In this paper, we propose a new locomotive mechanism using impulsive force for microcapsule-type endoscope. It has the compact size for movement in the colon and actuating mechanisms for hi-directional movement. The actuating mechanism resembles a pneumatic cylinder and consists of body, inertia mass(piston). spring. pneumatic source and calve. When valve is ON, the pneumatic impulsive force between piston and body drives them in two opposite direction. As the air in the body is passed away, the contrary movements are occurred by spring reaction. Therefore, the direction of body's motion is determined by the relative magnitude of two opposite impulsive forces, i.e., pneumatic and spring force. The effect of two impulsive forces can simply be controlled by On-Off time of solenoid valve.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.11
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• pp.186-194
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• 2004

In this research, microfabrication technique using localized electrochemical deposition (LECD) with ultra short pulses is presented. Electric field is localized near the tool tip end region by applying a few hundreds of nano second pulses. Pt-Ir tip is used as a counter electrode and copper is deposited on the copper substrate in 0.5 M CuSO$_4$ and 0.5 M H$_2$SO$_4$ electrolyte. The effectiveness of this technique is verified by comparison with LECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration are investigated. The proper condition is selected from the results of the experiments. Micro columns less than 10 $\mu$m in diameter are fabricated using this technique. The real 3D micro structures such as micro pattern and micro spring can be fabricated by this method. It is suggested that presented method can be used as an easy and inexpensive method for fabrication of microstructure with complex shape.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.615-617
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• 1997

This paper reports experimental results on the fabrication and analysis of millimeter-sized bending actuators for active catheter by use of the shape memory alloy spring and the flexible beam. The major components of micro actuator are shape memory alloy spring, stainless steel strip and two acryl links. The micro actuator with the diameter of 2.0 mm and the length of 25 mm has been fabricated and characterized for the possible application to the micro active catheters. The measured maximum angle is $60^{\circ}$ and the response time is 5 sec.

• Current Applied Physics
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• v.18 no.11
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• pp.1368-1374
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• 2018

In this paper, forced vibration was used to regulate the droplet migration, fully recording the transient migration of droplets on a micro-textured substrate under the resonance frequency by a high-speed camera. The influence of resonance frequency and dynamic migration characteristics of droplets on the solid micro-texture surface under lateral vibration were researched. The experiment demonstrates that the driving force is caused by the difference between the left and right contact angles made the droplet oscillate and migrate, and as time t increases, the left and right contact points are periodically shifted and the amplitude of migration increases. Therefore, based on the droplet migration behavior and its force balance mechanism, a spring vibration model of migration behavior of the vibrating droplet micro unit was set up to predict the complete trajectory of its migration on a solid surface. The calculation results show that the theoretical displacement is less than the experimental displacement, and the longer the time, the larger the difference. Affected by the vibration, part of the droplet permeates through the micro-texture, resulting in the droplet losing height and the contact angle becoming smaller as well. While the other part of droplet overcomes the internal surface tension to migrate.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.4
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• pp.287-294
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• 2004

Dynamic Load/unload (L/UL) mechanism is an alternative to the contact start stop (CSS) technology which eliminates striction and wear failure modes associated with CSS. Inertia latch mechanism becomes important for mobile disk drives because of non operating shock performance. Various types of latch designs have been introduced in hard disk drives to limit a rotary actuator from sudden uncontrolled motion. In this paper, a single spring inertia latch is introduced for a small form optical disk drive, which uses a rotary actuator for moving an optical pick-up. A new small inertia latch with sin91e spring is designed to ensure both feasible and small size. The shock performance of the new inertia latch is experimentally verified.

• Journal of Sensor Science and Technology
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• v.20 no.2
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• pp.102-106
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• 2011

This paper presents a design and analysis of an electromagnetic micro generator which can convert low frequency vibration energy to electrical power. The design aspects of the micro generator comprised planar spring, Cu coil and a permanent magnet(NdFeB). Threetype spring designs and four materials(Parylene, FR-4, Cu and Si) were compared to find resonance frequency. It was found that the resonance frequency will be changed according to the spring shape and material. Mechanical and magnetic parameters had been adjusted to optimize the output power through a comprehensive theoretical study.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.612-614
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• 1997

Silicon based micro mirror array is a highly efficient component for use in optical applications such as adaptive optical systems and optical correlators. A micro mirror array designed, fabricated and tested here is consisted of $5{\times}5$ single layer polysilicon, electrostatically driven actuators. In this paper, deflection characteristics and pull-in behavior of the actuators for analog control was studied and particularly, the influence of the residual stress in flexure beams for the restorative force of actuators was considered. The springs are modeled as a residual stress-free spring and a spring with residual stress. In calculation, a mirror with the residual stress-free springs has 30.3N/m spring constant and 31.1V pull-in voltage. On the other hand, a mirror with the stressed springs has 23.6N/m and 27.4V respectively. The experimental result, which is 20.5N/m and 25.5V, shows that the stressed springs ore well modeled.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.11
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• pp.1840-1848
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• 2003

This paper presents the structural analysis and optimum design of a vertical micro-gyroscope with decoupled 2 degrees of freedom (DOF), driven by electrostatic force. Simplified beam models were presented to derive the structural stiffness of the driving spring of the U shape and the sensing spring of I shape. A finite element analysis (FEA) was performed to validate each derivation. A total mass and a polar mass moment of inertia were also obtained and used in calculating the resonance frequency at each mode of the 2 DOF. The resonance frequencies of the total system were calculated using the proposed models and it has been found that they were in excellent agreement with those of the FEA. Finally, the developed analysis program was then linked to an optimum design module, and an optimum design of the micro-gyroscope was successfully performed.

• Structural Engineering and Mechanics
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• v.59 no.3
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• pp.579-599
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• 2016

In this study, static bending of edge cracked micro beams is studied analytically under uniformly distributed transverse loading based on modified couple stress theory. The cracked beam is modelled using a proper modification of the classical cracked-beam theory consisting of two sub-beams connected through a massless elastic rotational spring. The deflection curve expressions of the edge cracked microbeam segments separated by the rotational spring are determined by the Integration method. The elastic curve functions of the edge cracked micro beams are obtained in explicit form for cantilever and simply supported beams. In order to establish the accuracy of the present formulation and results, the deflections are obtained, and compared with the published results available in the literature. Good agreement is observed. In the numerical study, the elastic deflections of the edge cracked micro beams are calculated and discussed for different crack positions, different lengths of the beam, different length scale parameter, different crack depths, and some typical boundary conditions. Also, the difference between the classical beam theory and modified couple stress theory is investigated for static bending of edge cracked microbeams. It is believed that the tabulated results will be a reference with which other researchers can compare their results.