• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.68-68
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• 2009

최근 디스플레이 산업의 발달로 LCD 판넬의 수요가 급증함에 따라 검사장치 분야도 동반 성장하고 있다. LCD 검사를 위한 probe unit은 미세전기기계시스템 (MEMS) 공정을 이용하여 제작된다. 본 연구에서는 probe card의 미세 슬릿을 제작하기 위한 Si 깊은 식각 공정을 수행하였다. 공정에 사용된 장비는 STS 사의 D-RIE 시스템으로 식각가스로 $SF_6$, passivation용으로 $C_4F_8$ 가스를 각각 사용하였다. 식각용 마스크는 $30{\sim}50{\mu}m$의 선폭을 probe card의 패턴에 따라 제작되었으며, 분석은 SEM 측정을 이용하였다. 식각 공정 중 발생하는 scallop은 시료를 oxidation 시켜 $SiO_2$ 층을 형성한 후에 식각용액에 에칭하여 제거하였다. 제거전 scallop의 크기는 약 120 nm에서 제거후 약 $50{\mu}m$로 크게 개선됨을 SEM 사진으로 확인하였다.

• The Journal of Engineering Geology
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• v.16 no.2 s.48
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• pp.179-187
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• 2006

Two specimens of mortar containing artificial slit and Geochang granite containing the straight notch were selected to be used in this research. Source mechanism of micro-crack by radiation pattern based on dislocation the-ory was estimated by the first motion of longitudinal wave and spatial distribution between the location of transducers for monitoring acoustic emission and source coordinates determined by the application of the least square method. Result of analysis showed that the orientation of dislocation surfaces due to shear dislocation and tensile dislocation squares considerably with crack direction visually observed. The ultimate goal of this study is to provide fundamental information for source mechanism of micro-crack within materials.

• Analytical Science and Technology
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• v.19 no.5
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• pp.407-414
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• 2006

An X-ray diffractometer for spatially resolved X-ray diffraction measurements was developed to identify phase in the narrow (micron-scaled) region of high burn-up fuels and some nuclear materials. The micro-XRD was composed of an X-ray microbeam alignment system and a sample micro translation system instead of a normal slit and a fixed sample stage in a commercial XRD. The X-ray microbeam alignment system was fabricated with a microbeam concentrator having two Ni deposited mirrors, a vertical positioner, and a tilt table for the generation of a concentrated microbeam. The sample micro translation system was made with a sample holder and a horizontal translator, allowing movement of a specimen at $5{\mu}m$ steps. The angular intensity profile of the microbeam generated through a concentrator was symmetric and not distorted. The size of the microbeam was $4,000{\times}20{\mu}m$ and the spatial resolution of the beam was $47{\mu}m$ at the sample position. When the diffraction peaks were measured for a $UO_2$ pellet specimen by this system, the reproducibility ($2{\Theta}={\pm}0.01^{\circ}$) of the peaks was as good as a conventional X-ray diffractometer. For the cross section of oxidized titanium metal, not only $TiO_2$ in an outer layer but also TiO near an oxide-metal interface was observed.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.12
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• pp.1113-1119
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• 2013

In this letter, a new approach is proposed for the design of a multi antenna for MIMO wireless devices. The proposed antenna covers various LTE(Long Term Evolution) service bands: band 17(704~746 MHz), band 13(746~787 MHz), band 5(824~894 MHz), and band 8(880~960 MHz). The proposed main antenna consists of a conventional monopole antenna with an inverted L-shaped slit for wideband operation. The proposed the LTE sub antenna is based on a switch loaded loop antenna structure, with a resonance frequency that can be controlled by capacitance of a logic circuit. The tuning technique for the LTE Rx antenna uses a RF MEMS(Micro-Electro mechanical system) to match the impedances to realize the bands of interest. Because the two proposed antennas are polarized orthogonally to each other, the ECC(Envelope Correlation Coefficient) characteristic between two antennas was measured to be very low (below 0.06) with an isolation characteristic below -20 dB between the two antennas in the operating overall LTE bands. The proposed antenna is particularly attractive for mobile devices that integrate LTE multiple systems.

• Korean Journal of Optics and Photonics
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• v.16 no.6
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• pp.508-515
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• 2005

We propose a fabrication method for refractive lens by variable velocity moving mask lithography and slit pattern. Distribution of exposure dose should be controlled for the curved photoresist surface that works as a refractive surface. We analyze theoretically the distribution of exposure dose by change of moving velocity, moving direction of mask and the shape of mask pattern, and confirm for the curved surface experimentally. The lens could have sag height of a few of hundreds ${\mu}m$, by using thick photoresist or Deep RIE process.

• Journal of Electrical Engineering and Technology
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• v.13 no.2
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• pp.892-901
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• 2018

Because of excellent electrical properties, epoxy resin is widely used in packaging and casting power equipment. Moisture and temperature in the environment are inclined to seriously affect the insulation tolerance of epoxy resin. This work focuses on the aging characteristics of epoxy resin in hygrothermal environment. Scanning electron microscopy images show that there are micro-crack, micro-slit and holes inside aged samples. The moisture absorption process undergoes three equilibrium stages and it does not follow the Fick's second law. Observing the change of hydrogen bonds in the infrared spectra of the dried samples, it is found that chemically moisture absorption immerges when the physical moisture absorption entered the third equilibrium stage. By Debye equation to fit the imaginary part of the dielectric constant, it is concluded that the uniformity of water molecule has a great influence on the electrical conductivity loss. Furthermore, the polarization loss can be more easily affected by water molecules than small free molecules. After the aged samples being dried, their real and imaginary part of the dielectric constant descend, but their original electrical properties cannot completely restored. After chemical moisture absorption appears inside the material, the residual space charges increase significantly and the charge dissipation rate slow down obviously.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.3
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• pp.1023-1026
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• 2010

In this paper, rheological property of polymer blends in a confined geometry was investigated. The shear viscosity was measured in a capillary rheometer incorporated with a specially designed piston and three slit dies having 0.1, 0.2 and 0.5 mm in thickness. It was observed that the viscosity of polymer blends does not depend on the die size when the phase of polymer blends is a sea-island structure. However, when the phase of polymer blends is a co-continuous structure, the viscosity of the blends was dependent on the die size. By additional investigations, this result is attributed to the slip phenomenon between polymer phases in the blends.

• Journal of the Korean Ceramic Society
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• v.23 no.2
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• pp.64-70
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• 1986

In this investigation x-ray diffraction method was mainly studied for quantitative analysis of clinker mineral composition. And also optical microscopic observation and Bogue calculation method were applied to compare with the x-ray diffraction method. In the procedure of x-ray diffraction analysis graphite monochromator automatic divergence slit and spinner for sample holder were used for minimizing the error due to the operation of the equipment. Especially the separation of overlapped peaks were proceeded by micro-processor automatically. The results of x-ray diffraction method for synthesized clinker were consistent with the Bogue value and the results of optical microscopic observation. However the results of quantitative analysis of mineral composition or commercial clinker containing solid solution of minor component were different from the Bogue value. On the other hand they agreed reasonably well with results of the optical mic-roscopic observation.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.210-212
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• 1993

In this paper, a silicon microvalve has been fabricated using micromachining technology. The valve consists of the several thin silicon diaphragms which are designed to open and close depending on the pressure difference. It is supposed to pass fluids in only one direction. The thin diaphragms are fabricated by boron etch stop using an anisotropic etchant, EPW. The fabricated valve has been tested for various pneumatic pressure. According to the experimental results, the slit width of the valve increases as the pneumatic pressure increases.