• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1155-1158
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• 2005

Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. However, we do not anticipate the electric conductivity of the final product at the existing micro-stereolithography. The reason is that this technology uses polymer to make the product. Thus the new suspension which was mixed conventional photopolymer with metal powder was developed in this study. The developed suspensions were based on SL5180 which is commercialized resin and IMS03 that is made in our laboratory. And Triton X-100 was added at the suspension for getting the scattering effect and stabilizing effect. The layer recoating device was developed to be flat the mixed high viscosity suspension. A 3D micro structure was manufactured by using recoating system and micro-stereolithography system. The fabricated product was sintered to get the electric conductivity. After sintering, a pure copper product was made. In this study, new process was developed by making metal micro structure having an electric conductivity. This technology broadened the realm of the micro-stereolithography technology. And it will be applied to make the 3D micro structure of free form which has a high hardness and an electric conductivity in the near future.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.934-937
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• 2001

It is well-known that the micro fabrication technology of micro parts are the high energy beam or silicon-based micro machining method such as LIGA Process, Laser machining, photolithography and etching technology. But, for fabricating complex 3-D structure it is better to use mechanical machining. This machining method by the mechanical machine tool with nanometer accuracy is getting attention in some field-especially micro optics machining such as grating, holographic lens, micro lens array, fresnel lens, encoder disk etc.. In this study, we survey the micro fabrication by mechanical cutting method and set up the mechanical micro machining system. And we carried out micro cutting experiments for micro parts with v-shape groove.

• Journal of the Optical Society of Korea
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• v.10 no.4
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• pp.178-183
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• 2006

An in-line phase-shifting digital holographic microscopy system was constructed by inserting a conventional microscope in the object arm of a Mach-Zehnder interferometer. It was used to measure the three dimensional shape of a micro Fresnel lens. It was also shown that both the lateral and the axial resolutions of the in-line phase-shifting system using a self-calibration algorithm were superior to those of the best off-axis system.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.10a
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• pp.75-79
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• 2001

In the recent years, as the research and the development of micro and precision machinery become active, the interest of micro actuators using SMA(Shape Memory Alloy) has been increased. The dynamic characteristic analysis of SMA is necessary for actuator application and many common researches report the material characteristics of SMA sufficiently. However, the research on dynamic characteristics is very deficient. In this paper, the helical spring are fabricated with NiTi SMA wire of high resistivity, The force, response speed, temperature, and displacement are measured by digital force gauge, infrared thermometer, and laser displacement sensor so that the dynamic characteristics of this SMA is analyzed. Also, bidirectional actuator was fabricated and experimented for its performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.755-758
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• 1997

In the recent years, as the research and the development of micro and precision machinery become active, the interest of micro actuators using SMA(Shape Memory Alloy) has been increased. The dynamic characteristic analysis of SMA is necessary for actuator application and many common researches report the material characteristics of SMA sufficiently. However, the research of dynamic characteristics is very deficient. In this paper, the helical spring is fabricated with NiTi SMA wire of high resistivity The force, response speed, temperature, and displacement are measured by digital force gauge, infrared thermometer, and laser displacement sensor so that the dynamic characteristics of this SMA actuator is analyzed.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.1
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• pp.16-20
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• 2008

This paper presents the construction of micro tool clamping device using a Ni-Ti shape memory alloy(SMA) ring. Clamping force of the device is produced by elastic force of the SMA reverted to its original shape in normal temperature. Phase transformation of the SMA was realized by temperature control using a peltier element. Prototype of the SMA tool clamping device was fabricated and examined its clamping force and clamping/unclamping operation.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.79-82
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• 2005

Fresnel lens has number of applications in the optical systems because of its advantages. It is nearly flat lens that has small weight. It is conventionally used in lighthouse beacons, condensing unit of overhead projector and etc. Recently, demands of small size optical systems such as display units, information storage systems, optical detecting units had increased. Conventional manufacturing process of high quality Fresnel lens is direct machining. But it is not suitable for mass production because of high cost and long cycle time. Replication process is more suitable for mass production. But the Fresnel lens has number of sharp blade shape prism. In the replication process, this blade shape causes defects that can affect optical efficiency. In this study, replication process of blade shape pattern that has maximum height of $280{\mu}m$, aspect ratio 1.4 for Fresnel lens application.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.5
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• pp.306-313
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• 2015

In this study, the change of optical characteristics was studied according to the micro optical pattern provided by photo lithography followed by thermal reflow process. The shape and luminance variation with micro pattern was evaluated by SEM and spectrometers. Also, we analyzed the luminance characteristics using the 3D-optical simulation (Optis works) program. As a result, we found that the radius of curvature(R) in micro pattern is decreased up to 77%($150^{\circ}C$) compared to the radius of curvature at the condition $100^{\circ}C$, which is caused by efficient reflow of organic material without chemical changes. The highest enhancement of brightness with optimum micro pattern was obtained at the condition of $120^{\circ}C$ reflow process. The brightness gain with optical micro patterns is more than 15% at the condition of R=16.95 um, ${\Theta}=77.14^{\circ}$ compared to original optical source. The results of light simulation with various radius of curvature and side angle of pattern shows the similar result of experiment evaluation of light behavior on optical micro patterns. It is regarded that the more effect on light enhancement was contributed by side angle which is effective factor on light reflection, rather than the curvature of micro-patterns.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2001.10a
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• pp.200-203
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• 2001

Micromolding methods such as micro-injection molding and micro-compression molding are most suitable for mass production of plastic micro-optics with low cost. In this study, plastic micro-optical components, such as refractive microlenses and diffractive optical elements(DOEs) with various grating patterns, were fabricated using micro-compression molding process. The mold inserts were made by ultrapricision mechanical machining and silicon etching. A micro compression molding system was designed and developed. Polymer powders were used as molded materials. Various defects found during molding were analyzed and the process was optimized experimentally by controlling the governing process parameters such as histories of mold temperature and compression pressure. Mim lenses of hemispherical shape with $250{\mu}m$ diameter were fabricated. The blazed and 4 stepped DOEs with $24{\mu}m$ pitch and $5{\mu}m$ depth were also fabricated. Optical and geometrical properties of plastic molded parts were tested by interferometric technique.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.64-67
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• 2009

Vibrational micro-forming of pyramidal shape patterns was conducted for an Al superplastic alloy, Al 5083 and a Zr-based bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$. A vibrational micro-forming system was specially designed for generating vibrational load by combining a PZT actuator with a signal generator. Single crystal Si micro dies with wet-etched pyramidal patterns were used as master dies for vibrational micro-forming. The micro-formed pattern height was increasing with increasing the frequency of the vibrational load. In particular, the vibrationally-microformed pattern height was similar or even higher than the statically-microformed pattern height when the load frequency exceeded about 125 kHz. It was also observed that the crystal grains affect the surface quality of the microformed pattern and the distribution of the pattern height in the die cavity array.