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http://dx.doi.org/10.3807/JOSK.2006.10.4.178

Three Dimensional Shape Measurement of a Micro Fresnel Lens with In-line Phase-shifting Digital Holographic Microscopy  

Kang, Jeon-Woong (Department of Physics, Pohang University of Science and Technology)
Hong, Chung-Ki (Department of Physics, Pohang University of Science and Technology)
Publication Information
Journal of the Optical Society of Korea / v.10, no.4, 2006 , pp. 178-183 More about this Journal
Abstract
An in-line phase-shifting digital holographic microscopy system was constructed by inserting a conventional microscope in the object arm of a Mach-Zehnder interferometer. It was used to measure the three dimensional shape of a micro Fresnel lens. It was also shown that both the lateral and the axial resolutions of the in-line phase-shifting system using a self-calibration algorithm were superior to those of the best off-axis system.
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