Journal of the Optical Society of Korea

Optical Society of Korea (한국광학회)
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Three Dimensional Shape Measurement of a Micro Fresnel Lens with In-line Phase-shifting Digital Holographic Microscopy

  • Kang, Jeon-Woong (Department of Physics, Pohang University of Science and Technology) ;
  • Hong, Chung-Ki (Department of Physics, Pohang University of Science and Technology)
  • Received : 2006.11.02
  • Published : 2006.12.25
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Abstract

An in-line phase-shifting digital holographic microscopy system was constructed by inserting a conventional microscope in the object arm of a Mach-Zehnder interferometer. It was used to measure the three dimensional shape of a micro Fresnel lens. It was also shown that both the lateral and the axial resolutions of the in-line phase-shifting system using a self-calibration algorithm were superior to those of the best off-axis system.

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