• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.51-57
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• 2008

Recently, the manufacturer of microscopic structures along with the development of technology to produce electronics, communication and semiconductors allows various components to be smaller in size, with higher precision. Therefore, preoccupancy of micro/nano-level machining technology in order to product micro/nano-components and parts is key issue in the field of manufacturing. In this study, machinability of micro machining was studied through the machining of aluminum, brass and steel workpiece. Inspection of the cutting force variation patterns of large numbers of micro machining indicated that characteristics of the workpiece. Surface roughness prediction methods were developed by considering the variation of the static part of the feed direction cutting force. The accuracy of the proposed approaches were tested with experimental data and the agreement between the predictions and actual observations are addressed.

• 한국신재생에너지학회:학술대회논문집
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• 2005.06a
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• pp.273-276
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• 2005

Performance analysis of a solid oxide fuel cell/micro gas turbine hybrid system is conducted at design-point and part-load conditions and its results are discussed in this study. With detailed considerations of the heat and mass transfer phenomena along various flow streams of the SOFC, the analysis based on a quasi-2D model reasonably predicts its performance at the design-point operating conditions. In case of part-load operations, performance of the hybrid system to three different operation modes(fuel only control, speed control, and VIGV control) is compared. It is found that the simultaneous control of both supplied fuel and air to the system with a variable MGT rotational speed mode is the optimum choice for the high performance operation. And then, the dynamic characteristics of a solid oxide fuel cell are briefly introduced.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.397-400
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• 2004

The direct extrusion with porthole die can produce condenser tube which has the competitive power in costs and qualities compared with the existing conform extrusion. In general, porthole die extrusion has a great advantage in the forming that produces the hollow sections difficult to produce by conventional extrusion with a mandrel on the stem. Especially, condenser tube manufactured by porthole die belongs to sophisticated part and demands tighter dimension tolerance and higher surface finish than any other part. In order to confirm the general of porthole die extrusion, we perform the 3D FE analysis of hot porthole extrusion in non-steady state by using DEFORM 3D and investigate a pattern of elastic deformation for porthole die through the stress analysis using ANSYS 5.5 during extrusion process.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.3
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• pp.158-164
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• 2000

In recent year, desire and request fer micro automation are growing rapidly covering the whole range of the industry. This has been caused mainly by request of more accurate manufacturing process due to a higher density of integrated circuits in semiconductor industry. This paper presents a six d.o.f fine motion stage using magnetic levitation technique, which is one of actuating techniques that have the potential for achieving such a micro motion. There is no limit in motion resolution theoretically that the magnetically levitated part over a fixed stator can realize. In addition, it Is possible to manipulate the position and the force of the moving part at the same time. Then, the magnetic levitation technique is chosen into the actuating method. However, we discuss issues of design, kinematics, dynamics, and control of the proposed system. And a few experimental results fur step input are given.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.10
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• pp.102-108
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• 2004

In this paper, we studied a vibration problem that is critical and common to most precision measurement systems. For micro mechanical part measurements, results obtained from the vision-based precision measurement system may contain errors due to the vibration. In order to defeat this generic problem, for the current study, a PC based image processing technique was used first, to assess the effect of the vibration to the precision measurement and second, to develop an in-situ calibration algorithm that automatically compensate the measurement results in real time. We used a set of stereoscopic CCD cameras to acquire the images for the dimensional measurement and the reference measurement. The mapping function was obtained through the in-situ calibration to compensate the measurement results and the statistical analysis for the actual results is provided in the paper. Based on the current statistical study, it is expected to obtain high precision results for the micro measurement systems.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.591-596
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• 2001

Micron-size mechanical devices are becoming more prevalent, both in commercial applications and in scientific inquiry. Within the last decade, a dramatic increase in research activities has taken place, mostly due to the rapidly expanding growth of applications in areas of MEMS(Micro-Electro-Mechanical Systems), bioengineering, chemical systems, and advanced energy systems. In this study, we have described the effects of vortex viscosity variation on the flowfields in a micro-slot between rotating surfaces of revolution using a micropolar fluid theory. In order to solve this problem, we have used boundary layer equations and applied non-zero values of the microrotation vector on the wall. The results are compared with the corresponding flow problems for Newtonian fluid. Results show that the coefficient $\delta$ controls the main part of velocity ${\upsilon}_x$ and the coefficient M controls the main part of microrotation component ${\Omega}_{\theta}$.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.8 s.227
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• pp.1159-1165
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• 2004

This paper describes fabrication of a micro cell counter integrated with an oxygen micropump and counting experiment with Sephadex G-25 beads ($70{\sim}100\;{\mu}m$). The pumping part consisted of a microheater, catalyst (manganese dioxide) enveloped with paraffin, hydrogen peroxide, and microchannel, and the counting part consisted of collimated light, a microwindow, and a phototransistor including an external circuit. The micropump generated oxygen gas by decomposing hydrogen peroxide with manganese dioxide, which was initiated by melting the paraffin with the microheater, and pumped beads in the microchannel. When the beads passed the microwindow, they shaded the collimated light and changed the illumination on the phototransistor, which caused the current variation in the circuit. The signals, according to the bead size, reached up to 22 mV with noise level of 2 mV during 50 seconds and the numbers of peaks were analyzed by magnitude.

• Journal of Welding and Joining
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• v.23 no.5
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• pp.55-60
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• 2005

A precise bonding technique, transmission laser bonding using energy transfer, for polymer micro devices is presented. The irradiated IR laser beam passes through the transparent part and absorbed on the opaque part. The absorbed energy is converted into heat and bonding takes place. In order to optimize the bonding quality, the temperature profile on the interface must be obtained. Using optical measurements of the both plates, the absorbed energy can be calculated. At the wavelength of 1100nm $87.5\%$ of incident laser energy was used for bonding process from the calculation. A heat transfer model was applied for obtaining the transient temperature profile. It was found that with the power of 29.5 mW, the interface begins to melt and bond each other in 3 sec and it is in a good agreement with experiment results. The transmission IR laser bonding has a potential in the local precise bonding in MEMS or Lab-on-a-chip applications.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.34-35
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• 2006

The development of Micro MIM as a new manufacturing process for metallic micro parts made of advanced functional materials has been the subject of considerable research over the last years. This paper addresses important quality aspects on processing of new materials by Micro-MIM. Three examples of new functional materials that can be processed are reviewed in this paper. The first example is two-component-Micro-MIM to obtain multi-functional devices. A micro positioning encoder consisting of a magnetic / non-magnetic material combination is presented. The second issue is series production of the replicate of the smallest human bone in the ear (stapes) from Titanium as an example of medical application. Quality assurance and reproducibility in terms of injection moulding parameters are addressed. In the third part, first results on the processing of the shape memory alloy NiTi by Micro-MIM are presented. Potential applications include biocompatible devices and transportation, for example automotive and aerospace. Processing routes and initial microstructures obtained are discussed.