• Proceedings of the KSME Conference
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• 2001.06c
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• pp.502-506
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• 2001

This paper presents a new method for cutting steel with a diamond tool using electrolysis. The electrolysis is adopted in the diamond cutting to prevent the high chemical activity between a diamond tool and an iron-based workpiece. The basic principle of the method is to oxdize a thin substrate of the workpiece by electrolysis ahead of the diamond tool which cuts the oxidized layer. A desired shape can be obtained by repeating this process. The cutting force is reduced because the diamond tool removes only the weakened material by electroysis. The reduction of the cutting force suppresses the excessive wear of the diamond tool. The oxidization penetrates several micrometers in depth along the previously formed shape. The corrosion rates depend on current density and make suggestions on the optimum cutting conditions.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1099-1104
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• 2004

As consumer in optics, electronics, aerospace and electronics industry grow, the demand for ultra precision aspherical surface lens increases higher. To enhance the precision and productivity of ultra precision aspherical surface micro lens, the following specification of ultra precision grinding system is required: the highest rotational speed of the grinder is 100,000rpm and its turning accuracy is $0.1{\mu}m$, positioning accuracy is $0.1{\mu}m$. The development process of the grinding system for the ultra precision aspherical surface micro lens for optoelectronics industry is introduced. In the work reported in this paper, an intelligent grinding system for ultra precision aspherical surface machining was designed by considering the factors affecting the surface roughness and profiles accuracy. An aerostatic form was adopted to build the spindle of the workpiece and the spindle of grinder and ultra precision LM guide way was adopted in this system.

• 전기의세계
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• v.42 no.5
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• pp.23-33
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• 1993

마이크로 머신이란 글자 그대로 기계의 크기가 몹시 작은 기계를 의미한다. 기계전체의 크기가 1mm정도 혹은 그 이하인 기계를 마이크로 머신이라 일컫는데 이러한 기계들은 주로 아주 작고 가변운 물체(예를 들면 미생물체, 세포등)를 조작하거나, 아주 작은 물리량(예를 들면 변위, 힘, 각도, 유량등)을 발생시키거나 측정하는데 유리하다. 마이크로 머신으로의 초대(I) (전기학회잡지 1992년 11월호 기술해설 참조)에서는 마이크로 머신(MEMS, Micro Eletro Mechanical System)의 대표적인 연구성과를 소개하고, 주요한 제작기술인 Surface micro machining과 MEMS에 관련한 주요학술대회중의 하나인 IEEE Workshop을 소개하고, 1993년도 IEEE MEMS Workshop에서 발표된 연구를 중심으로 최근의 연구현황을 살펴보기로 한다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.31 no.9
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• pp.32-37
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• 2003

The trend of miniaturization has been applied to the research on micro rockets resulting in prototype rockets fabricated by MEMS processes. In this paper, the development of three-dimensional micro rockets using micro milling as well as the results of combustion and flight tests are discussed. The body of rocket was made of 6061 aluminum cylinder. The three-dimensional micro nozzles were fabricated on brass by micro endmill with 127${\mu}m$ diameter. Two different micro nozzles were fabricated, one with 1.0mm of throat diameter and the other with 0.5mm. The total mass of rocket was 7.32g and that of propellant was 0.65g. The thrust-to-weight ratio was between 1.58 and 1.74, and the flight test with 45 degree launch angle form the ground resulted in 46m-53m of horizontal flight distance

• Journal of the Korean Society for Precision Engineering
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• v.17 no.12
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• pp.68-75
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• 2000

This paper presents the construction of an ultra-precision machining system and machining experiments using the developed system. The system is composed of air bearing system, granite bed, air pad, and linear feeding mechanism. The cutting conditions have great effect on the surface quality in ultra-precision machining. the ultra-precision machining is mainly processed by several ${\mu}{\textrm}{m}$ depth of cut and feed rate. For this, tools with sharper cutting edge and less tool wear are needed. To satisfy these requirement, diamond is generally used as a tool material for ultra-precision machining. In order to evaluate the cutting characteristics of the PCD and MCD tools on the aluminum alloy, the machining experiments performed using the developed system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.209-210
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• 2006

We have successfully termed brown colored patterns inside of a transparent borosilicate glass generally known as BK7, laying the focus of near infrared Ti: sapphire femtosecond laser beam in the bulk BK7 glass. It is important to keep the laser power well below the damage threshold of BK7 in forming the color center. Thanks to the low laser power, there was no laser induced mechanical damage such as cracks or threads in the color formed area. From the absorbance spectrum and its gaussian fitting, we found the band gap of BK7, 4.21eV, and three absorption edges.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.10
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• pp.15-22
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• 2002

• Journal of the Korean Society for Precision Engineering
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• v.19 no.3
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• pp.137-143
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• 2002

This paper presents the In-process compensation to control cutter runout and improve the machined surface quality. Cutter runout compensation system consists of the micro-positioning servo system with piezoelectric actuator which is embeded in the sliding table to manipulate radial depth of cut in real-time. Cutting force feedback control was proposed in the angle domain based upon repetitive learning control strategy to eliminate chip load variation in end milling process. Micro-positioning control due to adaptive actuation force response improves the machined surface quality by compensation runout effect induced cutting force variation. This result will provide lots of information to build-up the preciswion machining technology.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.3
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• pp.224-230
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• 2009

FIB has been commonly used as a very powerful tool in the semiconductor industry. It is mainly used for mask repair, device correction, failure analysis and IC error correction, etc. Currently, FIB is not being applied to the fabrication of the micro and nano-structured mold, because of low productivity. And also sputtering rate has been required to fabricate 3D shape. In the paper, we studied the FIB-Sputtering rate according to mold materials. And surface roughness characteristics had been analysed for micro or nano mold fabrication. Si wafer, Glassy Carbon, STAVAX and DLC that have been normally considered as good micro or nano mold materials were used in the study.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.2
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• pp.34-39
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• 2010

In order to achieve and maintain dimensional accuracy in laser micro-machining, dominant parameters such as laser power and laser focus position need to be monitored and controlled real time. Also, in order to selectively machine multi-layered materials, the material being presently machined need to be recognized. This paper presents an auto-focusing (AF) module to keep laser focus on a large-area surface; a real-time laser power stabilizing module based on optical attenuation; and a laser-induced breakdown spectroscopy (LIBS) module. With these monitoring modules, position error in laser focus on a 4" silicon wafer was kept below $4{\mu}m$, initially $51{\mu}m$, and laser power stability of a UV laser source was improved from 1.6% to 0.3%. Also, the material transition from polyimide to copper in machining of FCCL (flexible copper clad laminate) was successfully observed.